Journal of Micromechanics and Microengineering 

Abstract: We survey progress over the past 25 years in the development of microscale devices for pumping fluids. We attempt to provide both a reference for micropump researchers and a resource for those outside the field who wish to identify the best micropump for a particular application. Reciprocating displacement micropumps have been the subject of extensive research in both academia and the private sector and have been produced with a wide range of actuators, valve configurations and materials. Aperiodic displacement micropumps based on mechanisms such as localized phase change have been shown to be suitable for specialized applications. Electroosmotic micropumps exhibit favorable scaling and are promising for a variety of applications requiring high flow rates and pressures. Dynamic micropumps based on electrohydrodynamic and magnetohydrodynamic effects have also been developed. Much progress has been made, but with micropumps suitable for important applications still not available, this remains a fertile area for future research.

Abstract: This review reports the progress on the recent development of micromixers. The review first presents the different micromixer types and designs. Micromixers in this review are categorized as passive micromixers and active micromixers. Due to the simple fabrication technology and the easy implementation in a complex microfluidic system, passive micromixers will be the focus of this review. Next, the review discusses the operation points of the micromixers based on characteristic dimensionless numbers such as Reynolds number Re, Peclet number Pe, and in dynamic cases the Strouhal number St. The fabrication technologies for different mixer types are also analysed. Quantification techniques for evaluation of the performance of micromixers are discussed. Finally, the review addresses typical applications of micromixers.

Abstract: Vibration energy harvesting is receiving a considerable amount of interest as a means for powering wireless sensor nodes This paper presents a small (component volume 01 cm3, practical volume 015 cm3) electromagnetic generator utilizing discrete components and optimized for a low ambient vibration level based upon real application data The generator uses four magnets arranged on an etched cantilever with a wound coil located within the moving magnetic field Magnet size and coil properties were optimized, with the final device producing 46 µW in a resistive load of 4 k? from just 059 m s-2 acceleration levels at its resonant frequency of 52 Hz A voltage of 428 mVrms was obtained from the generator with a 2300 turn coil which has proved sufficient for subsequent rectification and voltage step-up circuitry The generator delivers 30% of the power supplied from the environment to useful electrical power in the load This generator compares very favourably with other demonstrated examples in the literature, both in terms of normalized power density and efficiency

Abstract: An overview is given of research activities in the field of fluid components or systems built with microfabrication technologies. This review focuses on the fluidic behaviour of the various devices, such as valves, pumps and flow sensors as well as the possibilities and pitfalls related to the modelling of these devices using simple flow theory. Finally, a number of microfluidic systems are described and comments on future trends are given.

Abstract: This paper describes the characterization of a home-made negative photoresist developed by IBM. This resist, called SU-8, can be produced with commercially available materials. Three blends were prepared for this article and some of its optical and mechanical properties are presented. One of its numerous advantages is the broad range of thicknesses which can be obtained in one spin: from 750 nm to with a conventional spin coater. The resist is exposed with a standard UV aligner and has an outstanding aspect ratio near 15 for lines and 10 for trenches. These ratios combined with the electroplating of copper allow the fabrication of highly integrated electromagnetic coils.