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Showing papers in "Journal of the Indian Institute of Science in 2007"


Journal Article
TL;DR: A survey of the literature suggests that the research in this area is mostly focused on improving microfabrication and electronic circuitry as discussed by the authors, and that the resolution of the accelerometers is dependent on the sensitivity of the mechanical components and the ability of the electronic circuitry in suppressing the noise.
Abstract: In this paper, we review the high-resolution, micromachined accelerometers by enunciating the development of their mechanical components, the electronic circuitry and the microfabrication processes. A survey of the literature suggests that the research in this area is mostly focused on improving microfabrication and electronic circuitry. The resolution of the accelerometers is dependent on the sensitivity of the mechanical components as well as the ability of the electronic circuitry in suppressing the noise. The noise comes from mechanical components as well as electronic circuitry and plays a detrimental role in achieving high resolution. This is reviewed in this paper after explaining the working principles of selected high-resolution micromachined accelerometers. Sensing acceleration by measuring the change in capacitance is widely used but it has many complications. These are discussed in detail by presenting various techniques for sensing capacitance. The microfabrication processes that dictate the design are reviewed by tracking the evolution of high-resolution accelerometers found in the literature and comparing their sensitivities and resolutions. This paper gives an account of the significant accomplishments, some challenges for the future, and a few novel concepts in achieving high resolution of the order of a millionth of g, the acceleration due to gravity.

73 citations


Journal Article
TL;DR: In this article, the authors discuss the development of squeeze film flow modelling, tracking its routes to the air damped vibrating system studies in the early twentieth century, and then discuss the current developments motivated by the complexities in squeezing film flow analysis brought out by the geometries and flow conditions prevalent in dynamic MEMS devices.
Abstract: Squeeze film effects naturally occur in dynamic MEMS structures because most of these structures employ parallel plates or beams that trap a very thin film of air or some other gas between the structure and the fixed substrate. An accurate estimate of the effect of squeeze film is important for predicting the dynamic performance of such devices. In design, availability of very good models for squeeze film effects is indispensable. In this paper, we discuss the development of squeeze film flow modelling, tracking its routes to the air damped vibrating system studies in the early twentieth century. We try to capture the early developments in gas lubrication theory and then discuss the current developments motivated by the complexities in squeeze film flow analysis brought out by the geometries and flow conditions prevalent in dynamic MEMS devices.

62 citations


Journal Article
TL;DR: In this article, the authors reviewed the relevant micromachining technology and the design considerations and gave the details of the polysilicon piezoresistor based pressure sensors with Silicon On Insulator (SOI) approach for integrating pressure sensor and associated electronics.
Abstract: Silicon micromachining for realizing micro mechanical structures has received considerable interest due to the several advantages of this technology over the conventional machining techniques. Silicon pressure sensors were the first micro mechanical transducers developed. Since then the market for micromachined pressure sensors has grown in leaps and bounds and found application in all walks of life including defense and space applications. The relevant micromachining technology and the design considerations are reviewed in this paper. The paper also gives the latest developments in this area and gives the details of the polysilicon piezoresistor based pressure sensors with Silicon On Insulator (SOI) approach for integrating pressure sensor and associated electronics.

58 citations