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JournalISSN: 0167-9317

Microelectronic Engineering 

Elsevier BV
About: Microelectronic Engineering is an academic journal published by Elsevier BV. The journal publishes majorly in the area(s): Resist & Lithography. It has an ISSN identifier of 0167-9317. Over the lifetime, 12033 publications have been published receiving 180640 citations.

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Journal ArticleDOI
TL;DR: In this article, the status of work performed by the Karlsruhe Nuclear Research Center with the cooperation of Siemens AG and the Fraunhofer Institute for Solid State Technology is described.

726 citations

Journal ArticleDOI
TL;DR: In this article, the authors compare the electrical properties of carbon nanotubes with equivalent metal wires made of gold and describe their progress in process integration, and propose a multi-walled carbon-nanotubes as an interconnect material of the future.

596 citations

Journal ArticleDOI
Yifang Chen1
TL;DR: In this article, a review of electron beam lithography (EBL) based nanofabrication techniques for pattern transfer is presented, focusing on how to apply the property of EBL resists for constructing multilayer stacks towards pattern transfer.

502 citations

Journal ArticleDOI
TL;DR: Nanoimprint lithography, a high-throughput, low-cost, nonconventional lithographic method proposed and demonstrated recently, has been developed and investigated as discussed by the authors, which has demonstrated 10 nm feature size, 40 nm pitch, vertical and smooth sidewalls, and nearly 90° corners.

485 citations

Journal ArticleDOI
Teruo Fujii1
TL;DR: Fundamentals of PDMS-based microfluidic devices and their functions are described as well as the experimental results, where microreactors, microchips for capillary gel electrophoresis, and hydrophobic vent valves are successfully fabricated and operated.

479 citations

No. of papers from the Journal in previous years