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Showing papers in "Microelectronic Engineering in 2015"


Journal ArticleDOI
Yifang Chen1
TL;DR: In this article, a review of electron beam lithography (EBL) based nanofabrication techniques for pattern transfer is presented, focusing on how to apply the property of EBL resists for constructing multilayer stacks towards pattern transfer.

502 citations


Journal ArticleDOI
TL;DR: Categorize the applications of the POCT diagnostic systems according to the analyte types such as proteins, cells, nucleic acids, and metabolites, and advantages and disadvantages of POCT systems are reviewed and discussed along with future prospects.

376 citations


Journal ArticleDOI
TL;DR: This review provides easy-to-understand examples and targets the microtechnology/engineering community as well as researchers in the life sciences, and discusses both research and commercial activities.

375 citations


Journal ArticleDOI
TL;DR: In this article, the basic principles of multi-photon polymerization are presented, the experimental set-up requirements are described and the employed materials demands are thoroughly mentioned as well as the most representative examples of the recent developments in the field.

229 citations


Journal ArticleDOI
TL;DR: A comprehensive overview of through-silicon-via technology (TSV) is presented, including etch, insulation, and metallization, along with the backside processing, assembly, metrology, design, packaging, reliability, testing and yield challenges that arise with the use of TSVs.

189 citations


Journal ArticleDOI
TL;DR: In this paper, the key electrical and mechanical properties of graphene with the focus on their applications in sensors and actuators are reviewed, and state-of-the-art synthesis processes for graphene and CNTs are discussed.

185 citations


Journal ArticleDOI
TL;DR: In this article, a review of extreme wetting states of surfaces, their fabrication processes focusing on plasma processing technology, and their incorporation into devices and systems is presented, and perspectives and challenges are discussed.

170 citations


Journal ArticleDOI
TL;DR: A short tribute to the recent advances in electroless plating in the last 30 years is given in this paper, where the authors present a short summary of the recent developments in electroplating.

129 citations


Journal ArticleDOI
TL;DR: In this article, the authors provide a review of the block copolymer self-assembly process and its application in IC manufacturing, focusing on the application of nanowires, nanodots, and nanoelectronics.

109 citations


Journal ArticleDOI
TL;DR: GaN-based light emitting diode on silicon (LEDoS) micro-displays are designed and fabricated by integrating monolithic LED micro-arrays and active matrix substrates using flip-chip technology.

106 citations


Journal ArticleDOI
TL;DR: In this paper, the authors review the sources of stochastic variations in 1D-Resistive RAM and show that at low current both ruptured filaments and narrowed filaments exist.

Journal ArticleDOI
TL;DR: In this article, a review of stencil lithography in nanoscale patterning for the direct deposition of complex materials and the patterning on non-conventional substrates is presented.

Journal ArticleDOI
TL;DR: This review summarizes the reported MEMS resonators integrated monolithically in CMOS technology and their main applications as oscillator circuits in timing applications and in sensory systems and contributes to establish the state-of-the art on CMOS-MEMS resonators.

Journal ArticleDOI
TL;DR: A review of interference lithography at short wavelengths of extreme ultraviolet (EUV) and soft X-ray can be found in this paper, where high-resolution patterning with EUV and beyond EUV light is discussed.

Journal ArticleDOI
TL;DR: In this article, the most stable phases of silicene focusing on the electronic bandstructure attempting to answer the question about the existence of Dirac Fermions is discussed.

Journal ArticleDOI
TL;DR: In this paper, the PDMS residues are removed from Si surface by immersing the transferred structures in a solution of quaternary ammonium fluoride such as TBAF and non-hydroxylic aprotic solvent such as PMA (propylene glycol methyl ether acetate).

Journal ArticleDOI
TL;DR: In this paper, the history of resolution improvement efforts in optical lithography and throughput improvement in electron beam lithography through the development history of dynamic random access memories (DRAMs).

Journal ArticleDOI
TL;DR: In this paper, a handheld cantilever-based airborne nanoparticle detector (CANTOR-2) was developed for direct reading of exposure to airborne carbon engineered nanoparticles (ENPs) in indoor workplaces.

Journal ArticleDOI
TL;DR: In this article, the structural and electrical properties of Hf0.5O2 thin films after post deposition and post metallization annealing were investigated, and it was shown that the presence of top electrodes leads to the more preferable crystallization to polar o-phase and the increase in the remanent polarization value.

Journal ArticleDOI
TL;DR: In this article, the mechanical stability of poly(3,4-ethylenedioxythiophene):poly(styrenesulfonate) (PEDOT:PSS) films spin coated onto a UV treated PET substrate was investigated.

Journal ArticleDOI
TL;DR: In this paper, a review of NIL-based methods for patterning functional materials and nanomaterials is presented, and the optical and electrical properties of the nanostructured functional materials prepared by NIL are discussed.

Journal ArticleDOI
TL;DR: In this paper, the dielectric properties of (Al+Sb) co-doped TiO2 (ASTO) ceramics prepared by a solid state reaction method were investigated.

Journal ArticleDOI
TL;DR: In this paper, a CdSe/Pyrrolidone (PVP) nanocomposite has been synthesized by using Polyvinyl-pyrrolide (POP) as a polymer matrix, which has been characterized by X-ray Diffraction (XRD), Transmission Electron Microscopy (TEM), UV-VIS absorption and Photoluminescence (PL) spectroscopy.

Journal ArticleDOI
TL;DR: In this paper, the retention behavior of HfO2-based resistive switching memory cells (RRAM) is characterized as a function of Al doping concentration, which was previously reported to be a viable method for the improvement of the switching uniformity.

Journal ArticleDOI
TL;DR: In this paper, a rotational symmetrical resonator with dual-charged electret plates for low-level ambient kinetic energy harvesting is presented, which achieves an output power of 0.34µW at a low resonance of 66Hz at 0.5g, which corresponds to a normalized power density of 11.67 µWcm-3g-2.

Journal ArticleDOI
TL;DR: In this article, the authors presented a MEMS capacitive accelerometer with fully symmetrical double-sided H-shaped beam structure, which is fabricated from a single double-device-layer SOI wafer, which has identical buried oxide layer and device layer on both sides of a thick handle layer.

Journal ArticleDOI
TL;DR: A micro-piezoelectric cantilever array device for vibration energy harvesting was designed, microfabricated and characterized in this article, where the output power of the harvester was increased by connecting the array in series.

Journal ArticleDOI
TL;DR: The most recent approaches and designs to realize waterproof hair cell-like mechanotransducers for applications in underwater flow and acoustic sensing, mimicking the so-called "lateral line" in fishes are reviewed.

Journal ArticleDOI
TL;DR: In this paper, a single-layer metal mesh touch screen sensor based on the optimized reverse-offloading printing process was constructed and quantitatively evaluated using optical transmittance methods.

Journal ArticleDOI
TL;DR: An Al:HfO2 based memristor is presented as a suitable device as an artificial synapse in future neuromorphic circuits and it is demonstrated that the conductance of the device can be both gradually increased and gradually decreased, provided an accurate choice of pulse amplitude and time width is made.