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JournalISSN: 0946-7076

Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems 

Springer Science+Business Media
About: Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems is an academic journal published by Springer Science+Business Media. The journal publishes majorly in the area(s): Microelectromechanical systems & Actuator. It has an ISSN identifier of 0946-7076. Over the lifetime, 5743 publications have been published receiving 69333 citations. The journal is also known as: Micro- and nanosystems ; information storage and processing systems.


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Journal ArticleDOI
TL;DR: In this article, a review of recent research and developments of micropump designs with a particular emphasis on mechanical micropumps and summarizes their applications in biomedical fields is presented, with a comprehensive description of the actuation schemes, flow directing concepts and liquid chamber configurations with illustrative diagrams.
Abstract: This paper briefly reviews recent research and developments of micropump designs with a particular emphasis on mechanical micropumps and summarizes their applications in biomedical fields. A comprehensive description of the actuation schemes, flow directing concepts and liquid chamber configurations for micro pumping is provided with illustrative diagrams. Then, a comparative study of current mechanical micropump designs highlighting their advantages and limitations for various applications is presented, based on performance criteria such as actuation voltage and power consumption, ranges of operating frequency and maximum flow rate and backpressure. This study compiles and provides some basic guidelines for selection of the actuation schemes and flow rate requirements in biomedical applications. Different micropumps in biomedical applications, such as blood transport and drug delivery also have been reviewed.

317 citations

Journal ArticleDOI
TL;DR: The use of hot embossing is usually only for a few optical applications where high precision and high quality are important as mentioned in this paper, such as free standing thin columns or narrow oblong walls.
Abstract: Hot embossing is the technique to fabricate high precision and high quality plastic microstructures. Industrial fabrication of plastics components is normally achieved by injection molding. Hot embossing is actually used only for a few optical applications where high precision and high quality are important. The advantages of hot embossing are low material flow, avoiding internal stress which induces e.g. scattering centers infavorable for optical applications, and low flow rates, so more delicate structures can be fabricated, such as free standing thin columns or narrow oblong walls. The development of modular molding equipment, orientated on industrial standards has opened the door to the fabrication of plastic microcomponents in great numbers (for example LIGA-UV/VIS-spectrometers). Hot embossing has the potential of increasing production rates and therefore decreasing production costs by the enlargement of the molding surface and automatization of the molding process.

290 citations

Journal ArticleDOI
TL;DR: In this article, a comprehensive analytical model is proposed to provide a relationship between local roughness and contact angle, which is used to develop roughness distribution and to create biomimetic superhydrophobic surfaces.
Abstract: For non-wetting liquids the contact angle with a rough surface is greater than with a flat surface and may approach 180°, as reported for leaves of water-repellent plants, such as lotus. Roughness affects the contact angle due to the increased area of solid–liquid interface and due to the effect of sharp edges of rough surfaces. High roughness may lead to composite solid–liquid–air interface, which may be either stable or unstable. A comprehensive analytical model is proposed to provide a relationship between local roughness and contact angle, which is used to develop roughness distribution and to create biomimetic superhydrophobic surfaces. Various roughness distributions are considered, including periodic and surfaces with rectangular, hemispherically topped cylindrical, conical and pyramidal asperities and the random Gaussian height distribution. Verification of the model is conducted using experimental data for the contact angle of water droplet on a lotus leaf surface. For two solid bodies in contact, for wetting liquids, wetting leads to the meniscus force, which affects friction. Dependence of the meniscus force on roughness, previously ignored, is considered in the paper and it is found that with increasing roughness meniscus force can grow due to scale effect.

283 citations

Journal ArticleDOI
TL;DR: In this article, a review of various additive manufacturing methods is presented and selected features are compared, and some examples requiring features on the micron-scale are presented, including 3D printing.
Abstract: Additive manufacturing or 3D printing is a rapidly developing technology that has revolutionized the manufacturing sector. In this paper, a review of various manufacturing methods is presented and selected features are compared. Some examples requiring features on the micron-scale are presented.

212 citations

Journal ArticleDOI
TL;DR: In this article, a method has been developed to control the pull-in voltage of the fixed-fixed and cantilever MEM actuators and measure the residual stress in the fixed fixed model using of the piezoelectric layers that have been located on the upper and lower surfaces of actuator.
Abstract: In this paper, a novel method has been developed to control the pull-in voltage of the fixed-fixed and cantilever MEM actuators and measure the residual stress in the fixed-fixed model using of the piezoelectric layers that have been located on the upper and lower surfaces of actuator. In the developed model, the tensile or compressive residual stresses, fringing-field and axial stress effects in the fixed-fixed end type micro-electro-mechanical systems actuator have been considered. The non-linear governing differential equations of the MEM actuators have been derived by considering the piezoelectric layers and mentioned effects. The results show that due to different applied voltage to the piezoelectric layers, the pull-in voltage can be controlled and in the fixed-fixed type the unknown value of the residual stress can be obtained.

191 citations

Performance
Metrics
No. of papers from the Journal in previous years
YearPapers
202362
202255
2021405
2020391
2019496
2018513