Showing papers in "Sensors and Actuators in 1983"

TL;DR: The surface plasmon resonance (SPR) is a new optical technique in the field of chemical sensing as discussed by the authors, which can be used for gas detection, together with results from exploratory experiments with relevance to biosensing.

TL;DR: In this paper, the effects of additives of various metals and metal oxides on SnO2 and ZnO sensors are examined, and two types of sensitization mechanism, chemical and electronic, are proposed.

TL;DR: In this article, the fundamental aspects of ceramic humidity sensors in relation to humidity sensitivity, pore size distribution and effect of CO 2 and other gases are discussed with the experimental results of several fabricated sensors.

TL;DR: In this article, a multi-species microprobe structure for potentiometric measurements and the appropriate patterning techniques of the chemically-sensitive membranes is described, which allows successive patterning of both vacuum-deposited inorganics and spin coated polymers and gels.

TL;DR: In this paper, a sputtered piezoelectric ZnO layer transforms the mechanical deflection of a thin etched Si diaphragm into a pi-lectric charge, which is directly connected to the gate of an MOS buffer amplifier through buried contacts.

TL;DR: In this article, an enzyme optode is constructed using oxidases as enzymes for glucose, lactate and alcohol, and the reproductibility and precision of the measurements show that in the laboratory membrane-protected indicators (optodes) can serve as reliable sensors.

TL;DR: In this article, an integrated piezoresistive pressure sensor with both voltage and frequency outputs has been developed, having a size of 3 × 3.8 mm 2, was realized by the use of a standard bipolar IC process, and the output voltage span is 1 to 4 V for a pressure range of 0 to 750 mmHg.

TL;DR: In this article, a sterilizable optical oxygen sensor is described, which is based on the principle of fluorescence quenching of organic compounds by molecular oxygen, and the design of oxygen-sensing elements according to the theoretical background and the sensor design is described.

TL;DR: In this paper, a new type of resistive resistive TiO 2 oxygen sensor that can be used for monitoring and control of combustion processes such as the combustion in an engine is described.

TL;DR: In this paper, the design, fabrication process and measured performance of a novel silicon micromechanical capacitive accelerometer are described, which consists of a plate, used as both inertial mass and capacitor, attached to the support by two torsion bars.

TL;DR: In this paper, the effects of specific annealing procedure on the maximum freestanding lenghts of cantilever and doubly supporter micromechanical beams fabricated from polycrystalline and amorphous silicon are investigated.

TL;DR: In this article, the main characteristics at room temperature, high temperature and after aging of a polymer-based capacitive hygrometer are presented, focusing on the hysteresis phenomenon which limits the range of application of a first generation of transducers, now commercially available.

TL;DR: In this article, the effects of air and gas pressure on the vibration of miniature quartz tuning forks are investigated, and it is shown that the resonant frequency appears to vary quite linearly with the gas pressure.

TL;DR: In this paper, a vanadium compound in the galssy phase is present on spinel grains and water vapour adsorbs or desorbs on this vanadium compounds.

TL;DR: In this article, the authors described the preparation and characterization of monolayer and multilayer films and reviewed many of their potential applications, placing particular emphasis on their use in microelectronics and as transducers.

TL;DR: In this article, the SAW piezoelectric gas (SAWPG) detector consists of twin SAW delay lines fabricated on a single PEG substrate and each connected in an oscillator configuration.

TL;DR: In this article, a novel humidity-sensitive film composed of networks of crosslinked polymers has been developed using typical photo-polymerization techniques, which is made from a mixed aqueous solution of styrene-sulfonate monomers, crosslinking agents and vinyl polymers.

TL;DR: In this article, the influence of various gases on the electrical conductivity of an n-type metal oxide is investigated and a zero-order model is introduced to explain the basic mechanism.

TL;DR: The use of polymeric membrane-based ISFETs in solution requires a method of encapsulating the package while leaving the gates of the chip open for a subsequent membrane deposition as mentioned in this paper.

TL;DR: In this article, a silicon piezoresistive integrated pressure sensor (IPS) containing sensing, temperature compensation and amplification circuits has been developed for automotive and industrial applications, and the chip of the IPS is bonded on a silicon support 2 mm thick, using an electrostatic bonding technique for reducing unwanted thermal stress from the support and package.

TL;DR: In this paper, a correction method for ionic strength-independent pH measurements was developed based on a double pH fluorescence indicator system which, simultaneously, allows a continuous determination of ionic strengths.

TL;DR: In this paper, a dual-collector version of the lateral bipolar magnetotransistor is presented to enhance the injection modulation mechanism by means of low emitter efficiency and confinement of base current by a diffusion ring.

TL;DR: In this paper, data on the crystal orientation dependence, the dependence on boron dopant concentration and the temperature behaviour of the etch rate for KOH-based and ethylenediamine-based solutions are presented and compared, providing assistance in selecting the appropriate etchant for a specific application.

TL;DR: In this paper, a fundamental attempt has been made to split up the common mode (fault) signal and the differential flow signal by integrating two equal Wheatstone bridges on one silicon chip and connecting both bridges in opposite ways with respect to each other.

TL;DR: In this paper, it is shown that ISFETs are closely related to conventional ion selective electrodes and the possibility of their use as direct charge sensors is critically evaluated, and the time response characteristics of these devices are examined in detail.

TL;DR: In this article, it was shown that electrodes prepared by d.c. reactive sputtering of iridum oxide on to alumina substrates have utility for pH sensing in high temperature/corrosive aqueous environments.

TL;DR: In this paper, the SAW voltage sensor versus voltage is experimentally evaluated for YZ, YX LiNbO 3 and (001) (110) Bi 12 GeO 20 substrates.

TL;DR: In this paper, an integrated version of a square resonant diaphragm pressure guage by selective etching of (1 0 0) planes with ethylenediamine was presented.

TL;DR: In this article, thin films of SnO 2 were prepared by the radio frequency sputtering technique and the sheet resistivity of the layer and the thermoelectric power change were measured with a Keithley electrometer and the change in surface work function was measured by a vibrating capacitor probe.

TL;DR: In this article, the maximum output voltage of the circular diaphragm is 2 4 times as large as that of the square diaphramm and it is shown that the output voltage depends only on shear stress.