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Showing papers in "Thin Solid Films in 1977"


Journal ArticleDOI
A.G. Dirks1, H.J. Leamy1
TL;DR: The columnar microstructures commonly observed in crystalline and amorphous thin films possess many morphological features in common, such as a low density or void network that surrounds an array of parallel uniform-sized rods of higher density as discussed by the authors.

709 citations


Journal ArticleDOI
TL;DR: In this paper, the authors show that the importance of any stoichiometric deviation in relation to the production of conductive layers is discussed; the minimum value ϱ min of the resistivity is about 5 × 10 -3 ohms cm.

367 citations


Journal ArticleDOI
TL;DR: In this paper, fine-grained monoclinic HfO 2 films were characterized by using transmission electron microscopy, X-ray diffraction, electron microprobe analysis and measurements of dielectric and optical properties.

351 citations


Journal ArticleDOI
TL;DR: In this paper, the effects of deposition rate, working pressure and nature of the working gas on the internal stresses found in wafers of chromium sputtered onto glass using a magnetron-type post-cathode sputtering apparatus were investigated.

196 citations


Journal ArticleDOI
TL;DR: The performance characteristics of Li/CuS, Li/V 2 O 5, Li/Ag 2 CrO 4, Li/(CF x ) n, Li-SO 2 and Li/SOCl 2 high energy density primary battery systems are reviewed in this paper.

184 citations


Journal ArticleDOI
TL;DR: In this article, Hoffman et al. investigated the internal stresses in thin sputtered films of Al, V, Zr, Nb and W and found that the electrical conductivity and optical reflectance of the sputtered metal films exhibit abrupt changes in behavior near the transition pressure for compressive stresses.

182 citations


Journal ArticleDOI
TL;DR: In this article, the influence of ion bombardment on the initial stages of silver deposition onto amorphous substrates was investigated and the possibility of applying ion bombardment for surface decoration was qualitatively investigated and discussed.

164 citations


Journal ArticleDOI
TL;DR: In this paper, the effects of texture on reflectivity and transmission through an exact calculation of a boundary layer whose complex dielectric constant is an appropriate average of the material and air was obtained.

158 citations


Journal ArticleDOI
TL;DR: The most popular theory to date is that of tunnelling between islands with an electrostatic activation energy associated with single island charging as discussed by the authors, which has not yet been fully and satisfactorily explained.

157 citations


Journal ArticleDOI
TL;DR: In this paper, the authors examined the film strain and misfit dislocation density by means of X-ray diffraction and transmission electron microscopy, respectively, and showed that the films are in state of compression and the misfit dislocations depend strongly on the film thickness.

153 citations


Journal ArticleDOI
TL;DR: The morphologies of SiC deposited by the thermal decomposition of CH 3 SiCl 3 are presented in this paper, which are non-fluid bed deposits prepared in an induction-heated reactor.


Journal ArticleDOI
TL;DR: In this paper, fine-grained nearly stoichiometric monoclinic ZrO2 films were characterized by transmission electron microscopy, X-ray diffraction and electron microprobe analysis and by measuring their dielectric and optical properties.

Journal ArticleDOI
G. Wahl1
TL;DR: In this paper, a CVD process with a two-component gas mixture A-B is solved numerically for an axisymmetric stagnation flow geometry assuming the mass function of B on the deposition surface to have a fixed value YBd.

Journal ArticleDOI
TL;DR: In this paper, the absorption coefficient for sputtered InAs films was determined in the region of the absorption edge by the analysis of transmission and reflection spectra, assuming that the sample material can be described by a model of microcrystallites immersed in an amorphous matrix.

Journal ArticleDOI
TL;DR: In this paper, a multilayer sandwich structure composed of alternate layers of Ni and Cr (ten layers 370 A thick and twenty layers 115 A thick respectively) with initial surface roughness of not greater than 100 A and approximately 1 μm were obtained by sputtering with 1 keV argon ions and simultaneous Auger electron spectroscopy.

Journal ArticleDOI
TL;DR: The first compound to nucleate in binary reaction couples at subeutectic temperatures can be predicted by a rule proposed by Walser and Bene as discussed by the authors, and the first compound formed agree with the rule.

Journal ArticleDOI
TL;DR: In this article, the performance of a Ni-Cr-Mo steel SNCM-8 rod at a feed rate of 0.4 mm rev-1, with a depth of cut of 1.5 mm and at a machining speed of 234-158 m min-1.

Journal ArticleDOI
TL;DR: In this article, the surface on which the particles impinge is shown to play a decisive role with respect to the orientation of the grains within each particle and the position of the particle within the coating.

Journal ArticleDOI
TL;DR: Fluorocarbon films were prepared on glass slides by (i) the r.f. sputtering of PTFE in glow discharges operated in the target emission alone and with argon added and (ii) the plasma polymerization of CF4 gas on substrates at floating or near plasma potential as mentioned in this paper.

Journal ArticleDOI
TL;DR: Gold-coloured hard coatings of TiN have been obtained on carbon steel, stainless steel and stellite substrates by ion plating titanium in an atmosphere of nitrogen as mentioned in this paper.

Journal ArticleDOI
TL;DR: In this paper, the photoconductivity response spectra for I-III-VI2 ternary semiconductors are reported and the temperature dependences of the spectra are utilized to determine the bandgap energies as functions of temperature.

Journal ArticleDOI
TL;DR: In this paper, the influence of bias sputtering on open boundary formation in thick (60-100 μm) OFHC copper coatings was examined on tubular substrates mounted on the axis of a hollow cathode sputtering apparatus.

Journal ArticleDOI
TL;DR: In this paper, it was found that fully glassy alloys were synthesized in the composition range Nb-30 to 85 at.f. % Ni, which is 2.5 times larger than that reported for splat-quenched alloys.

Journal ArticleDOI
S. Nakahara1
TL;DR: In this article, an electron microscope was used to study the origin of microscopic voids (pores) in crystalline and non-crystalline films prepared by evaporation, sputtering and electrodeposition.

Journal ArticleDOI
TL;DR: By starting from the Mayadas-Shatzkes model an effective mean free path l g is defined to describe electronic conduction in thin polycrystalline metallic films; the Fuchs-Sondheimer model can then be used to calculate the film resistivity and its temperature coefficient.

Journal ArticleDOI
S. Kim1, J. Henderson1, P. Chaudhari1
TL;DR: In this article, the simulation of the structural anisotropy of amorphous thin films is modified to increase the density while preserving the anisotropic columnar growth in the simulated film.

Journal ArticleDOI
TL;DR: A two-level metallization scheme (Al/insulator/Al) and its application are presented in this paper, which is suited to all the device processing steps beginning with contact sintering, device packaging, testing and also the operating conditions.

Journal ArticleDOI
TL;DR: In this article, the dielectric constants of MgO and WMgO were investigated and the photothermal conversion efficiency of these materials was estimated and compared with other selective solar absorbers.

Journal ArticleDOI
TL;DR: In this article, a pack cementation method is described for forming a hard dense boride coating on ferrous materials, which is characterized by metallography, X-ray diffraction and electron microprobe analysis.