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Showing papers in "Thin Solid Films in 1989"


Journal ArticleDOI
TL;DR: In this paper, the fundamental nature of the internal stresses that are found in both evaporated and sputtered coatings is reviewed from the point of view of decorative coating applications, which indicate that apparatus geometry is particularly important in determining the state of stress that forms in deposits.

1,096 citations


Journal ArticleDOI
TL;DR: In this article, cross-sectional transmission electron microscopy has been used to investigate the effects of low energy (400 eV or less) ion irradiation during the growth of reactively sputtered TiN at temperatures between 300 and 900 °C.

285 citations


Journal ArticleDOI
TL;DR: In this paper, a broad and brief review of the question of intrinsic stresses in films deposited via evaporation and sputtering is provided, with a sufficient number of references, and some attention is paid to a third model where compressive stresses could result from impurity adsorption not at the top surface of the growing films, but one monolayer below.

271 citations


Journal ArticleDOI
TL;DR: In this article, a simple model of the conduction mechanism, with the assumption of a non-parabolic conduction band, has been applied to wide band gap, degenerate thin oxide films.

167 citations


Journal ArticleDOI
TL;DR: In this article, a method was described by which an SnS thin film can be deposited on a glass surface, from aqueous solutions of SnCl 2 and Na 2 S or (NH 4 ) 2 S. The SnS film is of p-type conductivity, with carrier concentration dependent on the alkalinity.

158 citations


Journal ArticleDOI
TL;DR: A stable monolayer of water-soluble enzyme (glucose oxidase (GOD)) could be prepared by spreading an organic solution of lipid-coated GOD on a water subphase as mentioned in this paper.

127 citations


Journal ArticleDOI
TL;DR: In this article, the effect of energetic particle bombardment on growing film properties is investigated. But, in many experiments, particularly those using ion beam sputtering, the magnitude of the energetic bombardment by neutrals is ignored or underestimated, which can have a significant effect on the properties of evaporated and sputterdeposited films.

115 citations


Journal ArticleDOI
TL;DR: In this paper, the structural, electrical and optical properties of d.c.-magnetron-sputtered lead zirconate titanate (Pb(Zr, Ti)O3) thin films have been investigated by scanning electron microscopy.

108 citations


Journal ArticleDOI
TL;DR: In this paper, the preparation of hydrogen-terminated silicon surfaces for use as starting substrates for low-temperature MBE growth is examined in detail, and the critical steps and the chemical basis for these steps are examined using X-ray photoelectron spectroscopy.

103 citations


Journal ArticleDOI
Hans Kuhn1
TL;DR: In this paper, a number of recent examples are discussed that illustrate the possibilities of constructing purposely designed monolayers and monolayer assemblies, as well as a matrix-controlled chemistry (specific reactions driven by the superstructure of interlocking molecules).

102 citations


Journal ArticleDOI
TL;DR: In this paper, the intrinsic band gap of indium tin oxide (ITO) films was analyzed by taking into consideration the band gap narrowing due to electron-electron and electron-impurity scatterings within the random phase approximation.

Journal ArticleDOI
TL;DR: In this paper, the surface roughness of TiO2 thin layers has been investigated by electron microscopy by two different and complementary methods: direct imaging and carbon-platinum replica observation.


Journal ArticleDOI
TL;DR: In this paper, the effect of heat treatments in hydrogen gas and glow discharge and electron cyclotron resonance (ECR) hydrogen plasmas on indium tin oxide, tin oxide (TO), and aluminum-doped zinc oxide (AZO) has been studied.

Journal ArticleDOI
TL;DR: In this paper, the near surface structure and nitrogen concentration of the low-temperature low-pressure ion-nitrided stainless steels (SS) were studied by using X-ray diffraction (XRD), transmission electron microscopy (TEM), nuclear resonance broadening (NRB) and microhardness techniques.

Journal ArticleDOI
TL;DR: In this paper, a correction function for the measured diagonal length is introduced, and a simple geometrical model of the deformation of the material around the impression is connected with the diagonal correction.

Journal ArticleDOI
TL;DR: In this paper, the authors examined the various means of fabricating ultralow friction (ULF) films with particular emphasis being placed on the technique of sputtering and compared the results of three different processes, namely r.f., d.c. triode and magnetron sputtering, and discussed the tribological behaviour of such films and the manner in which their properties change with contact stress, sliding speed, environment and materials to which they are applied.

Journal ArticleDOI
TL;DR: Vanadium oxide films with the approximate composition V 2 O 5 were amorphous when deposited at room temperature and had a reversible color change when lithium was electrochemically injected.

Journal ArticleDOI
TL;DR: In this article, an electron-gun evaporation and proper annealing in ambient oxygen gas was used to produce an SnO 2 thin film with fine particles and good structure, thus providing a sensor with high sensitivity and selectivity in detecting ethanol gas.

Journal ArticleDOI
TL;DR: Correlation with the known three-dimensional crystal structure of streptavidin indicates that two of strePTavidin's four biotin binding sites are free for further derivatization to create multilayered organized protein molecular devices.

Journal ArticleDOI
M.D. Thouless1
TL;DR: A review of the failure mechanisms associated with thin films is presented in this paper, where a discussion of the decohesion of tensile films from a brittle substrate is also discussed, as well as some model experiments.

Journal ArticleDOI
TL;DR: In this article, thin films of perovskite-type BaTiO 3 and SrTiO3 oriented along the c-axis were deposited by r.f. magnetron sputtering.

Journal ArticleDOI
TL;DR: In this paper, the effects of spinodal decomposition on the structure and characteristics of the hard material films are investigated. But the results are limited to the case of sputtered thin films.

Journal ArticleDOI
TL;DR: In this paper, three types of method for the preparation of conducting polymer Langmuir-Blodgett (LB) films with high conductive anisotropy are demonstrated.

PatentDOI
TL;DR: In this article, a transparent thin film thermocouple and a method of manufacturing comprig a positive element of indium tin oxide (ITO) and a negative element of Indium oxide (In 2 O 3 ) formed on a surface by reactive sputtering with the elements being electrically joined to form a hot junction for conversion of heat into electricity.

Journal ArticleDOI
TL;DR: In this paper, structural and optical properties of tin oxide were investigated in relation to the oxygen content in the sputtering gas and the deviation from stoichiometry strongly affects the optical transmittance of the films and also changes the values of their refractive indices.

Journal ArticleDOI
TL;DR: In this paper, a detailed investigation has been made on the influence of substrate temperature and post-deposition heat treatment in air on the optical properties of $TiO_2$ films deposited by electron beam evaporation of TiO in neutral oxygen atmosphere.

Journal ArticleDOI
Kurt A. Rubin1, Martin Chen1
TL;DR: In this paper, a discussion of the recorded signal strength, sources of media noise, and resulting signal-to-noise ratio is presented, as well as methods to reduce the effect of the media noise.

Journal ArticleDOI
TL;DR: In this paper, the authors measured the partial pressures of the argon and nitrogen gases measured through the target show an apparent drop as power is applied to the titanium target, which is actually a density reduction of the gases in front of the target due to gas rarefaction and heating.

Journal ArticleDOI
TL;DR: In this article, the Langmuir-Blodgett (LB) technique was used to obtain stable polyarylenevinylene precursor-anionic amphiphile complex monolayers.