Showing papers in "Thin Solid Films in 1997"
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TL;DR: In this paper, a review is given of anodic alumina film formation on aluminium, with barrier and porous films developed by anodic polarization in an appropriate electrolyte, and means for characterising the developed films are presented as well as applications of the porous, amorphous film material.
733 citations
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TL;DR: In this article, a homogeneous and stable solution was prepared by dissolving the zinc acetate in a solution of 2methoxyethanol and monoethanolamine, which was obtained by preheating the dip-coating films at temperatures from 200° − 500°C for 10 min after each coating and postheating at temperatures between 500° − 800°c for 1 h.
583 citations
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TL;DR: In this article, Al2O3 films with precisely controlled thicknesses and excellent conformality were grown on Si(100) at low temperatures of 350-650 K using sequential surface chemical reactions.
535 citations
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TL;DR: In this paper, an analytical model was developed to predict the residual stress distributions in progressively deposited coatings, such as those produced by thermal spraying, based on the concept of a misfit strain, caused by either the deposition stress (e.g. due to quenching of splats in thermal spraying) or by differential thermal contraction between substrate and coating during cooling.
378 citations
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TL;DR: In this article, the authors present a historic review of aerogels while bringing the reader up-to-date on the latest technological developments, including the latest advances in aerogel technology.
361 citations
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TL;DR: In this article, the physical properties of al-doped zinc oxide (AZO) films are investigated in terms of the preparation conditions, such as Al2O3 content in the target, RF power (PRF), substrate temperature (Ts), and working pressure (Pw).
320 citations
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TL;DR: In this article, the relation between surface diffusion and film structure is discussed in detail and found to be consistent with measurements published in the literature, including the influence of substrate temperature, rate and contamination with residual gasses.
319 citations
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TL;DR: In this paper, phase transitions between adhesive metal, load supporting carbide, and wear-resistant diamond-like carbon (DLC) surfaces were investigated on the Ti-C system prepared by a hybrid of magnetron sputtering and pulsed laser deposition.
300 citations
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TL;DR: In this article, the behaviour of TiN, ZrN and CrN is compared, concentrating on the mechanism of their oxidation, and the sequence of the processes included in the electrochemical and thermal oxidation was followed by X-ray photoelectron spectroscopy.
291 citations
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TL;DR: In this paper, the effect of ppm level H2 on the d.c. resistance of a planar resistor with SnO2 particle size variation (∼ 20 to 50 nm) is reported.
284 citations
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TL;DR: In this article, the dependence of optical characteristics on the structure of atomic layer-deposited titania (TiO 2 ) thin films has been studied and the formation of preferentially oriented crystal (anatase) structure contributes to this increase of refractive index most significantly.
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TL;DR: In this paper, the influence of post-deposition annealing between 300 and 1100 °C on the structural and optical properties and surface morphology of titanium oxide has been investigated.
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TL;DR: In this article, a survey of the current state-of-the-art in the area of ohmic contact materials and properties to GaAs, InP, and GaN is presented along with critical issues pertaining to each semiconductor material.
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TL;DR: In this article, water repellent films were prepared using tetramethylsilane (TMS) and fluoro-alkyl silane (FAS) by microwave plasma enhanced CVD (PECVD).
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TL;DR: In this paper, a transparent conducting thin film of antimony-doped tin oxide has been deposited by the sol-gel dip-coating (SGDC) method, and its optical and electrical properties are analyzed.
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TL;DR: In this article, zinc oxide films were deposited by a rf magnetron sputtering using a zinc oxide target and characterized as a function of deposition temperature, pressure, argon-oxygen gas flow ratio, target-substrate distance.
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TL;DR: In this paper, the effect of polarizability, fluorine content, and free volume on dielectric constant was examined for several series of aromatic polyimides, and the results showed that minimizing polarization, maximizing free volume, and fluorination all lowered the polyimide dielectrics.
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TL;DR: In this article, the binding energies of the photoelectron peaks observed for the transition metal ions and the oxygenated ions were recorded, indicating that cobalt is present in both divalent and trivalent states.
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TL;DR: In this article, the electrical properties of reactively sputtered ZnO thin films used for chemical sensors are investigated in N2 and oxidizing atmosphere by Hall measurements, and it is shown that the increase of resistance in the presence of oxidizing atmospheres is due to the reduction of the electron concentration whereas the mobility remains unchanged.
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TL;DR: In this article, the technique of polycation/polyanion layer-by-layer adsorption was applied to fabrication of non-linear optical films and optical second-harmonic generation (SHG) was clearly observed from the films prepared by alternate adsorptions of polycations and an azobenzene-containing polyanion (PAZO) on quartz substrate modified with polyion precursor.
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TL;DR: In this article, the limits of feasible pore geometries and pore patterns and their dependence on formation conditions are discussed, including current density, etching time, HF concentration, temperature and bias.
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TL;DR: In this paper, the chemical composition and structural and optical properties of thin films of vanadium pentoxide (V2O5) were investigated employing spectroscopic techniques, viz. X-ray photo-electron spectroscopy (XPS), inductively coupled plasma atomic emission spectrographs (ICP-AES), infrared spectrograms (IR), Raman spectrometers (RS), and optical spectro-graphs (OS).
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TL;DR: In this paper, the absorption bands of the SiO2 sol-gel system have been studied with respect to the posttreatment temperature, and the origin and temperature dependence of these peaks are discussed.
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TL;DR: In this paper, the effect of process parameters on the properties of tin-doped indium oxide thin film, deposited by magnetron sputtering with simultaneous application of r.c.f.
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TL;DR: In this paper, a method of preparation of thin (1000 A) porous silicon layers by chemical etching of c-Si in HF:HNO 3 :H 2 O=1:3:5 solution is reported wherein a thin Al film is deposited by evaporation on the silicon surface prior to etching.
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TL;DR: In this article, the optimum thickness of each dielectric layer required to maximise the film luminous transmittance for a given metal layer thickness was established, and optical properties of the films designed were also predicted and the most suitable materials were identified.
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TL;DR: In this paper, the structure, electrochemical and optical properties of sol-gel-deposition vanadium pentoxide (V2O5) coatings were investigated by cyclic voltammetry, impedance analysis, optical spectroscopy and X-ray diffraction.
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TL;DR: In this paper, the effective dielectric function of PS was determined for different substrate doping levels as a function of the anodization current density by fitting reflectance spectra.
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TL;DR: In this article, the anti-oxidation properties of Ti-Al-N films were investigated at temperatures ranging from 500°C to 800°C in air, and it was found that an aluminum oxide layer was formed on the surface of TiAlN film due to outward diffusion of Al ions at the initial stage of oxidation.
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TL;DR: In this paper, the effect of Nb and Cr dopants on the electronic structure of rf-sputtered TiO 2 thin films and its subsequent influence on gas sensor performance is reported.