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Showing papers in "Thin Solid Films in 1998"


Journal ArticleDOI
TL;DR: In this article, the authors constructed a real structure zone model by considering the concentration of impurities (co-deposited additives) in the vapour beam as a new deposition parameter, and the fundamental structure forming phenomena.

645 citations


Journal ArticleDOI
TL;DR: In this paper, the structure, optical and electrical properties of ZnO films were investigated, and the c-axis lattice constants of the thin films and the band gap were shown to be a little larger than those of the crystal. But the differences between the thin film and crystal might be attributable to the grain boundaries and imperfections in thin films.

361 citations


Journal ArticleDOI
TL;DR: In this paper, a generalized procedure for calculating the elements of the Jones matrix for any number of layers, any one of which may or may not be uniaxial, is presented.

349 citations


Journal ArticleDOI
TL;DR: In this article, a polycrystalline zinc nitride (Zn3N2) thin film is prepared by reactive rf magnetron sputtering with different N2 concentrations in sputtering gases (N2-Ar mixtures).

343 citations


Journal ArticleDOI
TL;DR: In this article, the chemical reactions and physical processes which occur at the surface of hydrocarbon films during deposition from low-temperature hydrocarbon plasmas are reviewed and a framework for understanding film growth is presented.

334 citations


Journal ArticleDOI
TL;DR: In this article, a two-dimensional micron-sized honeycomb structure was formed when a chloroform solution of an amphiphilic polymer was cast on solid surfaces at high atmospheric humidity.

296 citations


Journal ArticleDOI
TL;DR: In this article, the authors applied the finite element technique to study the very complex stress-strain field of thin hard coatings subjected to a nano-indentation process, and the results showed that the ABAQUS finite element software package is capable of reproducing the loading-unloading behavior of a nano indentation test.

271 citations


Journal ArticleDOI
TL;DR: Several optical models for ITO have been presented in this paper, which include the graded microstructure of the material and work reasonably well in fitting spectroscopic ellipsometry data for itO film thickness, index grading, and optical constants.

263 citations


Journal ArticleDOI
TL;DR: In this paper, an optical constant library for Hg1−xCdxTe as a function of composition (x = 0-0.5) and temperature (T=0-250°C) is described.

232 citations


Journal ArticleDOI
TL;DR: In this article, a screen printed thick-film H2, CO and CH4 gas sensors were fabricated on an alumina substrate by mixing ZnO with lead borosilicate glass frits as a binder and Sb as a catalyst.

227 citations


Journal ArticleDOI
TL;DR: In this article, the optical properties of zinc oxynitride (ZnxOyNz) films are investigated by using a double beam spectrometer to measure the optical band gap.

Journal ArticleDOI
TL;DR: Titanium dioxide (TiO2) thin films have been prepared using the sol-gel method and subsequently doped with niobium oxide (Nb2O5) for use in oxygen sensing applications as discussed by the authors.

Journal ArticleDOI
TL;DR: In this article, the transmission and reflection of the multilayers were measured, as well as the film thickness and the sheet resistance, and the complex indices of refraction both of ITO and of AgCu were calculated from the measured data.

Journal ArticleDOI
TL;DR: In this article, a DC-magnetron reactive sputtering in an vertical Inline sputtering system was used to produce indium-tin-oxide (ITO) thin films.

Journal ArticleDOI
TL;DR: In this article, the search for superhard materials considered so far mainly metastable solids, such as diamond, c-BN and C3N4 and single and polycrystalline superlattices, has been studied.

Journal ArticleDOI
Tingting Yang1, Deheng Zhang1, Jun Ma1, H.L. Ma1, Yuguo Chen1 
TL;DR: In this paper, a transparent conducting ZnO:Al film with good adhesion and low resistivity has been prepared on organic substrates by r.f. magnetron-sputtering.

Journal ArticleDOI
TL;DR: In this paper, the optical properties of very thin sol-gel TiO2 films were analyzed within the Forouhi-Bloomer model, and it was found that the model describes satisfactorily the optical property of these films within the range of 200-2500 nm.

Journal ArticleDOI
TL;DR: In this article, the conical indenter gave an indentation fracture similar to that by the cube corner indenter, and the analysis of the energy release in cracking, the fracture toughness of the films was calculated.

Journal ArticleDOI
Masatou Ishihara1, Song Ji Li1, Hisami Yumoto1, Kazuo Akashi1, Y Ide 
TL;DR: In this article, the preferential orientation of (100) oriented AlN thin films was investigated and it was found that the (100)-oriented films were deposited by the reactive DC magnetron sputtering method at a long distance (L ) between the Al target and substrate (above 120 mm) and at high sputtering pressures (above 0.6 Pa).

Journal ArticleDOI
TL;DR: In this paper, the influence of the growth parameters such as the deposition temperature, the carrier gas (nitrogen) flow rate and the presence of an additional oxygen flow on the characteristics of the titanium dioxide films has been studied.

Journal ArticleDOI
TL;DR: The electrical and optical properties of indium tin oxide (ITO) thin films deposited by plasma ion-assisted evaporation are reported in this article, where the complex index of refraction is determined using a dispersion model suitable for explaining the particular properties of ITO in the visible and near infrared spectral range.

Journal ArticleDOI
TL;DR: In this paper, the thermomechanical properties of thin DLC films on steel substrates have been measured and related to their structure, and the modulus and thermal expansion coefficient have been determined from beam curvature measurements conducted on Si and steel substrate.

Journal ArticleDOI
TL;DR: In this paper, the authors reviewed the historical development of spectroscopic ellipsometry from the very early stages to the present and showed that the full spectra of the ellipsometric parameters Δ and Ψ as a function of wavelength from UV to IR can now be determined with a high degree of precision and accuracy in a few seconds.

Journal ArticleDOI
TL;DR: The structural, optical and electrical properties of ITO films have been characterized by X-ray diffraction, scanning electron microscopy, optical transmittance and reflectance, sheet resistance and electrical resistivity measurements.

Journal ArticleDOI
TL;DR: In this paper, the ion exchange between Ag and Ca2+ in HAp was carried out using ion beam assisted deposition (IBAD) to produce a dense ultra-adherent and pinhole-free hydroxyapatite (HAp) layer on alumina substrates.

Journal ArticleDOI
TL;DR: In this paper, a chemical-mechanical polishing of copper was conducted in two acidic (pH 1.3 and 3.8) slurries and one alkaline pH (10∼12) slurry with alumina particles as the abrasives.

Journal ArticleDOI
TL;DR: In this article, thin films of tin monosulfide (SnS) have been prepared by spray pyrolysis on Corning 7059 glass substrates with the substrate temperatures in the range 300-350°C, keeping the other deposition parameters constant.

Journal ArticleDOI
TL;DR: In this paper, the phase, texture and lattice parameter were determined by X-ray diffraction analysis of chromium-based ternary transition metal nitrides Cr12xMexNy (CrMoN), CrTiN, CrWN and CrNbN).

Journal ArticleDOI
TL;DR: In this article, high-energy (1.0 MeV) ion beam implantation and thermal annealing for the first time was performed by high energy ion beam in VO 2 polycrystalline film sputterdeposited on Si.

Journal ArticleDOI
TL;DR: In this paper, the authors identify a new Raman peak which occurs between the commonly found G and D bands of carbon nitride films and identify this new peak as being due to nitrogen-nitrogen bonding.