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Showing papers in "Vacuum in 1977"


Journal ArticleDOI
01 Jan 1977-Vacuum
TL;DR: In this article, it was shown that vacuum flashover is due to a thermal breakdown in the thin pre-surface layer of dielectric and a streamer discharge in the desorbed gas cloud.

64 citations


Journal ArticleDOI
01 Jan 1977-Vacuum
TL;DR: In this paper, an investigation of the thermionic emission decay due to chemical interaction between lanthanum hexaboride and the residual gases in a vacuum system was conducted, and the results of the analysis were in good agreement with the experimental data on poisoning.

36 citations


Journal ArticleDOI
01 Jan 1977-Vacuum
TL;DR: In this article, it was shown that in situations where large epoxy surfaces are unavoidable, some means of reducing the outgassing rate would be desirable, such as an aquadag coating (by a factor of 5), by a vacuum evaporated aluminium coating, or by cladding with aluminium or stainless steel foils.

32 citations


Journal ArticleDOI
01 Jun 1977-Vacuum
TL;DR: In this article, the co-sputtering of two dielectric materials with indices of refraction as widely different as possible with the aim of obtaining both homogeneous films with any intermediate index of refractive index and inhomogeneous films having predetermined profiles was investigated.

28 citations


Journal ArticleDOI
01 Jan 1977-Vacuum
TL;DR: In this paper, the Schottky junction of n-type silicon was investigated and the authors found that the sputtering process introduced damage to the surface, causing charged centres to appear at the surface of the crystal.

28 citations


Journal ArticleDOI
01 Jan 1977-Vacuum
TL;DR: In this paper, the ion beam sputtering technique offers several advantages over conventional sputtering systems, such as lower pressure and substrate temperature, and the ability to vary the grain size and the angle of deposition.

24 citations


Journal ArticleDOI
01 Jan 1977-Vacuum
TL;DR: In this article, the effects caused by the incident ion-or electron beam have to be considered besides the general problem of quantitative AES, which depend on the type of material investigated.

19 citations


Journal ArticleDOI
01 Jun 1977-Vacuum
TL;DR: The mechanical properties of thin films are influenced by their structures, stability, internal stresses and thickness which makes the understanding of the mechanical behavior a complex problem as discussed by the authors, and much work remains to be done for this very important class of materials.

18 citations


Journal ArticleDOI
A Rizk1, L Holland1
01 Jan 1977-Vacuum
TL;DR: In this article, the etch rates of colloidal carbon were determined as a function of input power at 10 − 1 torr in discharges in dry Ar and a 50% Ar + 50% O 2 mixture.

17 citations


Journal ArticleDOI
01 Jun 1977-Vacuum
TL;DR: In this article, the authors discuss the difficulty of achieving absolute accuracy and hence high yield in single coating runs, while for a series of identical runs the eventual accuracy and repeatability are amazingly good.

16 citations


Journal ArticleDOI
F. d'Heurle1, C. Alliota1, J. Angilello1, V. Brusic1, J. J. Dempsey1, D. Irmischer1 
01 Jun 1977-Vacuum
TL;DR: In this paper, the expected compositions of the films were calculated from the vapor pressures of the pure elements and thermodynamic data for liquid Cu-Al alloys at 1373 K. The agreement between the calculated values and the experimentally observed compositions is good only for alloys with low Al concentrations: less than 20 at.% Al in the source material.

Journal ArticleDOI
01 Jan 1977-Vacuum
TL;DR: In this article, the advances made in vacuum-oriented elastomer performance during the development of the latest UHV compatible elastomers (Kalrez ) are briefly reviewed by correlating their chemical character with the physical characteristics of relevance to UHCV technology.

Journal ArticleDOI
J Visser1, B Symersky1, Ajm Geraerts1
01 Jan 1977-Vacuum
TL;DR: In this paper, the authors describe the vacuum performance of a 10 W cold capacity with a recently introduced cryogenerator for industrial thin-film coaters, assuming that hydrogen gas is distributed uniformly over an adsorbent glued on a 20 K panel, and the grain size of the adsorbents is about one millimetre.

Journal ArticleDOI
01 Jun 1977-Vacuum
TL;DR: Quartz crystal monitoring in the production of dielectric multilayer stacks is compared to optical monitoring in this paper, which yields optical thicknesses of the layers differing from multiples of a quarter of the wavelength.

Journal ArticleDOI
01 Jan 1977-Vacuum
TL;DR: In this paper, the authors discuss the origins of this type of contamination, surveys methods used to prevent and control it and shows that it is possible to produce a clean vacuum using such pumps.

Journal ArticleDOI
01 Jun 1977-Vacuum
TL;DR: In this article, a full component (dielectric and Cu/Ni constantan alloy) was elaborated and studied in the form of thin film for use as a strain gauge on the strainable member of a pressure transducer.

Journal ArticleDOI
01 Jun 1977-Vacuum
TL;DR: In this paper, a comparison of the properties of the layers on flat and rough metal surfaces was made, where sinusoidal, metal covered gratings with different periods were used as rough absorber surfaces.

Journal ArticleDOI
01 Jun 1977-Vacuum
TL;DR: In this article, a discussion on which type of statistical distribution function can be expected for electrical breakdown in thin insulating films is given, and it is shown that the first selfhealing breakdown has its origin at weak spots randomly distributed over the capacitor area.

Journal ArticleDOI
01 Jun 1977-Vacuum
TL;DR: In this article, the absorption coefficient α has been calculated from the data for crystalline films obtained at substrate temperature Ts = 440 K and also for amorphous films obtained on substrates at Ts = 300−393 K.

Journal ArticleDOI
01 Jan 1977-Vacuum
TL;DR: In this paper, the effect of permanent trapping on the surface evolution rate of gas released from a semi-infinite solid is examined for the case of a linear tempering schedule, and analytical expressions are obtained for the rate maximum, the temperature at which the maximum occurs and the temperature width of the evolution rate transient for gas initially located in a specific plane below the surface.

Journal ArticleDOI
01 Jan 1977-Vacuum
TL;DR: In this paper, the composition profile of chromium fils and the interface between films and nickel and aluminum substrates was determined using an Auger electron spectrocopy (AES) combined with ion etching technique.

Journal ArticleDOI
01 Jun 1977-Vacuum
TL;DR: In this paper, an automized pilot line production for CdS layers, which are evaporated under high vacuum conditions, and their subsequent treatment to get an encapsulated thin film solar cell, is described.

Journal ArticleDOI
01 Jan 1977-Vacuum
TL;DR: In this article, a microprocessor controlled inline sputtering system has been designed that is capable of providing a high order of process repeatability, which is desirable for planar magnetron sputtering.

Journal ArticleDOI
01 Jan 1977-Vacuum
TL;DR: In this paper, a compact stainless-steel ultra-high vacuum system is designed, constructed and tested which enables any vacuum gauge to be calibrated absolutely, quickly and reliably over the pressure range 10 torr to 10 −8 torr.

Journal ArticleDOI
01 Jan 1977-Vacuum
TL;DR: In this paper, the performance of evaporated amorphous Ge films (thickness ∼-500 A ) contacts to etched n-and p-type silicon crystals of different resistivities are discussed.

Journal ArticleDOI
M Khorossany1, RK Fitch1
01 Jan 1977-Vacuum
TL;DR: In this article, a retarding field energy analyser has been used to measure the energy distribution of the ions produced by two forms of the saddle field ion source for argon, nitrogen and helium.

Journal ArticleDOI
01 Jun 1977-Vacuum
TL;DR: In this article, a model is proposed for the structure of the copper sulphide layer, in which the copper deficient phases are the result of excess sulphur on the CdS surfaces and vary in thickness according to the degree of non-stoichiometry of the surfaces.

Journal ArticleDOI
01 Jun 1977-Vacuum
TL;DR: In this article, thin gold films are investigated in the thickness interval 10-160 A. The films are deposited in UHV on to glass substrates at room temperature and with an electric field in the substrate plane.

Journal ArticleDOI
01 Jun 1977-Vacuum
TL;DR: In this paper, it was shown that hydrogen in the ambient atmosphere changes the flatband voltage of palladium gate MOS-structures and the physical mechanisms behind this phenomenon were discussed.

Journal ArticleDOI
01 Jun 1977-Vacuum
TL;DR: In this article, the Glow Discharge Polymerization (GDP) process was used to make thin polymer silicone films, which are used as gate insulation in field effect devices.