Showing papers in "Vacuum in 1981"

TL;DR: In this paper, a microwave plasma etching system is described, which comprises a vacuum chamber for providing a discharge space and provided with an inlet for introducing a discharge gas containing a fluorine-containing gas, magnetic field forming means (7) for forming a magnetic field in the discharge space, microwave electric field forming (3), and substrate holding means (11) for holding substrates to be processed in the vacuum chamber.

TL;DR: Fluorocarbon films were prepared by rf sputtering of PTFE at 6.65 Pa in glow discharges operated in the target emission alone and with argon or nitrogen added as mentioned in this paper.

TL;DR: In this article, the adhesion and deformation properties of metal contacts were studied in a magnetic scanning electron microscope, incorporating an Auger facility for surface characterization, and it was shown that the loading-unloading cycle is highly irreversible, the junction finally separating in a ductile manner.

TL;DR: In this paper, angle-resolved thermal desorption spectra from adsorbates on metal single crystal planes were obtained as a function of polar angle of desorptions along a fixed azimuth.

TL;DR: In this paper, it was found that molecules with low free energies of formation will undergo ion-induced dissociation, but attempted correlation with thermochemical data has met with only limited success.

TL;DR: In this paper, the interaction of thiophene with a Cu(111) surface, at room temperature, is investigated by angle-resolved photoemission, where adsorbate induced features appear only after relatively large exposures, ca 10 −2 torr s and appear to correspond to associatively adsorbed Thiophene.

TL;DR: In this paper, it was shown that the accuracy of quantifying the energy E and frequency factor v from a measured 1st order desorption peak is ultimately limited by shot noise in the mass spectrometer.

TL;DR: In this article, the effect of attractive lateral interactions on flash-desorption spectra for molecular and dissociatively adsorbed species was discussed and the authors showed that attractive interactions lead to characteristic coverage dependent variations in the shape and in the temperature maximum of desorption peaks.

TL;DR: In this paper, a novel analysis instrument has been constructed, and preliminary data acquired, for a sample excited by a pulse laser, and the ions produced are analysed with a "folded time of flight" mass spectrometer.

TL;DR: The physics of low energy ion scattering (LEIS) and its application as a surface analytical technique are reviewed in this article, where compositional and short-range structural information can be obtained by choosing experimental conditions which optimize the contributions of single and double (or multiple) collisions, respectively.

TL;DR: In this article, the results of water adsorption in ultra-high vacuum, both on clean metal surfaces and in the presence of a coadsorbate, are compared with classical models of the electric double layer at a metal-electrolyte interface.

TL;DR: In this paper, the authors proposed a 2 × 2-surface structure for Ni{100-scale halogen adsorption, which is consistent with both the LEED and surface coverage data, and compared it with other halogen adorption systems.

TL;DR: In this article, the main considerations affecting the design of the sample, its heating equipment, the ion gun and the partial pressure detector to meet the requirements of quantitative thermal desorption spectrometry were discussed.

TL;DR: In this paper, the adsorption of mercury on Fe(100) has been studied by Auger Electron Spectroscopy, LEED and thermal desorption measurements, and good agreement was found using a repulsive pairwise interaction potential of 5.4±0.5 kJmol−1.

TL;DR: In this article, a planar system was used with an aluminium target in an arc discharge operated from dc and rf supplies, and the forward and reflected power output measured with two instruments.

TL;DR: In this paper, repeated measurements of the sensitivity of both triode and Bayard-Alpert types of ionization gauge have been made as a function of the number of operating hours of the gauges.

TL;DR: In this paper, it was suggested that surface states at the Fermi energy might be responsible for the instability of the ideal surface, the displacements opening up an energy gap on the fermi line.

TL;DR: In this paper, a comparison of static SIMS with surface coverage data from the literature revealed a linear relationship between CO coverage and the sum of the secondary ion peak intensity ratios (MCO+/M+ + M2CO+ /M2+) in the coverage region below the onset of compression.

TL;DR: In this paper, it was shown that a sufficiently clean metal-metal interface is generally stronger under tension than at least one of the bulk metals, in which case the practical significance of y disappears except that plastic deformation can occur even at zero applied load, as an indirect consequence of surface forces.

TL;DR: In this article, the symmetry of the clean surface of W{001} was confirmed as a function of hydrogen coverage, using a photographic method to monitor the intensity of LEED beams.

TL;DR: In this article, the intrinsic bending force of LiF and ZnS was determined from the instantaneous substrate deformation accompanying film deposition, and involved detailed consideration of both thermal and momentum induced bending forces.

TL;DR: In this paper, a phase map plotted as a function of Ts showed a very narrow transition region between metastable single phase alloys and equilibrium two phase structures, where the calculated free energy difference between the single phase metastable and equilibrium states is ~ 18 MeV atom−1, the measured activation barrier for the transformation is ~ 3 eV.

TL;DR: Auger Electron Spectroscopy (AES) has been used to detect elements present in the solid surfaces for over a decade as mentioned in this paper, and it has been continually improved and refined to the point now when scanning Auger microprobes are commercially available.

TL;DR: In this article, a method for the determination of the optical constants of absorbing films supported on a transparent substrate using measured normal incidence R/T and R/Ts values is presented.

TL;DR: Inelastic electron tunnelling (IET) spectra are reported for 2-hydroxycycloheptatrienone (tropolone), 8-hydroxquinoline (oxine), 1,2-diaminoethane, 1, 2-dihydroxyethane and 1-amino-2-hydrocyclohexane adsorbed from the vapour on to plasma-grown aluminium oxide as discussed by the authors.

TL;DR: In this paper, a new technique was used to measure incidence-angle-averaged sticking probabilities, 〈 s 〉, for N 2, H 2 and D 2 on W{001}.

TL;DR: A review of the literature of vacuum aspects of space science and technology during the last decade has focused on the vacuum environment of spacecraft in orbit and under test and materials for structures, instrumentation and mechanisms of spacecraft.

TL;DR: In this article, a conventional horizontal rf heated reactor maintained at low pressure was used for the preparation of Si, SiO2, and Si3N4 films by plasma reactions of silane or another appropriate Si-compound diluted in an inert gas.

TL;DR: A review of the application of the technique to a variety of these technologically important surface investigations can be found in this article, where the authors illustrate the way in which ion scattering has developed as the understanding of the underlying physics has improved.

TL;DR: A variety of techniques, including LEED, AES, thermal desorption (for surface characterization and comparison with previous work), high resolution electron energy loss spectroscopy (HREELS), and angle-resolved ultraviolet photoelectron spectroscopic (ARUPS) have been used to study CO on Pt {110 as mentioned in this paper.