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Showing papers in "Vacuum in 1984"


Journal ArticleDOI
01 Jan 1984-Vacuum
TL;DR: In this paper, the broadening effects encountered in sputter depth profiling are reviewed in some detail, focusing on cases where beam-induced microtopographical changes are of negligible importance.

151 citations


Journal ArticleDOI
01 Aug 1984-Vacuum
TL;DR: In this paper, a simple model of the quartz oscillator is proposed and the equations of fluid mechanics are analytically solved based on this model, the results calculated show good agreement with the experimental data.

93 citations


PatentDOI
25 Jul 1984-Vacuum
TL;DR: In this paper, a pair of alternatively used carbon bed adsorbers are used to remove hydrocarbon vapors from the mixture and which are desorbed of hydrocarbons by subjecting the beds alternatively to vacuum regeneration using a vacuum pump the output of which is passed through an absorber using liquid gasoline as the absorbent liquid.

80 citations


Journal ArticleDOI
01 Jan 1984-Vacuum
TL;DR: In this article, a new multipole/reflex discharge ion source CORDIS was constructed, based on the same discharge principle, and the diameter of the discharge chamber was doubled, thus allowing enlarged extraction areas.

76 citations


Journal ArticleDOI
01 Mar 1984-Vacuum
TL;DR: In this paper, the physical bases of Auger electron spectroscopy and X-ray photoelectron spectroscopic analysis are briefly presented in order that their practical applicability and limitations may be understood.

75 citations


Journal ArticleDOI
01 Dec 1984-Vacuum
TL;DR: In this paper, an overview of the current state-of-the-art in the field of model catalysis can be found, including catalysts preparation, sintering mechanisms for metals and alloys, separation of initial and final state effects for supported clusters, and the influence of particle and/or support morphologies.

67 citations


Journal ArticleDOI
01 Jan 1984-Vacuum
TL;DR: Oxygen depth distributions in silicon on insulator (SOI) structures formed by implantation of 200 keV oxygen ions into (100) silicon wafers have been determined in this paper.

59 citations


Journal ArticleDOI
01 Oct 1984-Vacuum
TL;DR: In this paper, an approach is suggested for calculating compositions of implanted layers that incorporates both the physical processes now included in many models and the metallurgical phases observed experimentally. But the approach is not suitable for high-flux conditions.

52 citations


Journal ArticleDOI
01 May 1984-Vacuum
TL;DR: In this article, a Monte-Carlo calculation was carried out to obtain the energy distribution of ions and neutrals at the cathode of a glow discharge, assuming charge exchange collisions in different fields.

51 citations


Journal ArticleDOI
01 Jan 1984-Vacuum
TL;DR: The epitaxial synthesis of diamond using low-energy carbon ions is reported in this paper, and it has been established that crystalline growth up to 10 ωm in thickness and several mm 2 in area can be produced reproducibility on both natural and polished diamond substrates.

49 citations


Journal ArticleDOI
M. J. Southon1, MC Witt1, A. Harris1, ER Wallach1, J Myatt 
01 Oct 1984-Vacuum
TL;DR: In this paper, the principle, design and performance of a new and versatile laser-probe microanalyser, LIMA, are outlined, and its potential range of applications is illustrated by reference to microanalysis of boride particles in nickel-based superalloys.

Journal ArticleDOI
01 Jan 1984-Vacuum
TL;DR: In this article, the effects of 5.5 keV ion bombardment on clean well-characterized surfaces of some important electronic materials (Si(100), Cr-doped semi-insulating GaAs(100) and Fe doped InP(100)) are reported using O22 and Cs+ primary ion species.

Journal ArticleDOI
01 Dec 1984-Vacuum
TL;DR: In this paper, the authors review the present understanding of both types of spectra and consider the circumstances under which they may be useful for determination of surface properties or surface composition, and propose a method to obtain the spectral features for surface properties and surface composition.

Journal ArticleDOI
01 Jan 1984-Vacuum
TL;DR: In this article, saddle field sources provide a convenient means of producing energetic neutral beams of inert and reactive gases (which may be dissociated into radicals) and a mechanism of internal neutralization is proposed.

Journal ArticleDOI
01 Oct 1984-Vacuum
TL;DR: In this article, the energy distribution of the energetic atoms as they are progressively thermalized is presented; in our previous calculation, we considered only an average of the scattering cross-sections of the sputtered atoms.

Journal ArticleDOI
Alfred J. Van Roosmalen1
01 Mar 1984-Vacuum
TL;DR: In this paper, a review of recent developments in anisotropic, selective dry etching of silicon oxide over silicon is presented, together with a concise treatment on current mechanisms for etching in freon plasmas.

Journal ArticleDOI
01 Mar 1984-Vacuum
TL;DR: The CAMECA IMS 300 instrument as discussed by the authors uses a primary beam of oxygen, argon or nitrogen ions to give secondary ion emission from the sample surface, which can be identified by mass spectrometry and selectively transmitted to form images of their distribution in the surface of the specimen, or to provide measures of the elemental composition.

Journal ArticleDOI
M.D. Gill1
01 Mar 1984-Vacuum
TL;DR: In this article, the sustaining mechanism in parallel plate rf plasmas at pressures above 10 Pa was investigated and a simple model was formulated by equating generation rate to charge outflow plus recombination rate.

Journal ArticleDOI
01 Jul 1984-Vacuum
TL;DR: In this article, the authors present an original apparatus based on a feedback loop, using the Kelvin probe, which permits us to work at a constant probe sample distance and therefore with a constant accuracy.

Journal ArticleDOI
01 Dec 1984-Vacuum
TL;DR: The role of ion irradiation on the reactivity of surfaces is reviewed with special attention to those experiments that make use of ultrahigh vacuum surface techniques in this article, where the difficulties involved in directly probing surface defects are documented and a discussion of several techniques offering good prospects in this defect characterization is presented.

Journal ArticleDOI
01 Jun 1984-Vacuum
TL;DR: The surface characterization of Type 6063 aluminum alloy was performed with the use of various surface analysis techniques, such as Auger electron spectroscopy, scanning electron microscopy, optical microscopy and surface roughness factor as discussed by the authors.

Journal ArticleDOI
01 Jan 1984-Vacuum
TL;DR: In this article, the experimental evidence for atomic emission was reviewed and it was concluded that neutrals are emitted in two ways: metal vapour and metal atoms from liquid point anodes.

Journal ArticleDOI
01 Oct 1984-Vacuum
TL;DR: In this paper, a model of liquid metal ion source (LMIS) operation was developed to give a consistent picture of three different aspects of LMI sources: (i) the shape and size of the ion emitting region; (ii) the mechanism of ion formation; and (iii) properties of ion beam such as angular intensity and energy spread.

Journal ArticleDOI
01 Mar 1984-Vacuum
TL;DR: In this article, the incorporation of metals, with special attention to gold, into fluorocarbon type polymer films has been investigated, and an rf (20 MHz) diode system was employed with a planar magnetron to excite the discharge in CF 4 monomer.


Journal ArticleDOI
01 Jan 1984-Vacuum
TL;DR: In this article, it was found that reactive rf bias ion plating using electron beam evaporated titanium metal could give films of refractive index of close to 2.5 and equivalent to those made by conventional reactive evaporation onto substrates at elevated temperatures.


Journal ArticleDOI
01 Oct 1984-Vacuum
TL;DR: In this article, a FORTRAN code has been written to simulate the energy spectrum of particles emitted during ion beam bombardment of a given target, provided that the relevant reaction cross-section data is availabl.

Journal ArticleDOI
01 May 1984-Vacuum
TL;DR: In this paper, the effect of analysis energy on the size and shape of the field of view of a concentric hemispherical analyser was investigated using a procedure which employs the imaging facilities of a scanning Auger electron microscope.

Journal ArticleDOI
01 Jan 1984-Vacuum
TL;DR: In this article, a gallium liquid metal ion source has been successfully incorporated in a commercial ion-probe system (V G SIMSLAB) fitted to an electrostatic ion-optical column with two einzel lenses, scan rods and quadrupole stigmators.