Showing papers in "Vacuum in 1987"

TL;DR: In this article, three methods of measuring thin film adhesion have been developed and evaluated: scratch test, pull test, and scratch test using a hemispherical diamond stylus, loaded tangentially to the plane of the surface.

TL;DR: A review of quadrupole gas analysers is given in this paper, where basic equations governing their operation are presented and the design of the mass filter, ion source and detector is discussed.

TL;DR: The basic principles, essential features and capabilities of Rutherford backscattering spectroscopy (RBS) are briefly described, and examples are given which illustrate the possibilities of RBS in various domains related to thin film analysis as mentioned in this paper.

TL;DR: Physical properties of organosilicon, halocarbon, hydrocarbon and composite (metal-doped) plasma polymer films are concisely reviewed and proposed applications of these films in optics and electronics are presented as discussed by the authors.

TL;DR: In this paper, a detailed analysis of the mutual dependences of the flow rates and partial pressures of inert and reactive gases inside a deposition chamber showed that the hysteresis effect occuring during reactive sputtering of thin films can be overcome if the pumping speed of the pumping system is greater than the critical pumping speed.

TL;DR: In this article, the basic principles that regulate vacuum evaporation and the physical processes involved in thin film formation are discussed, and the principal methods of heating the evaporant are detailed and the means of measuring and controlling the film thickness are elucidated.

TL;DR: In this paper, the influence of the magnetic field strength and distribution on the operating characteristics of a planar magnetron has been investigated with permanent and electro-magnet units and it is shown that suitable magnetic fields parallel to the target surface can give uniform target erosion at low operating pressures with efficient line of sight and high energy transfer of material to the substrate.

TL;DR: In this article, the effect of the dc bias on the etch anisotropy of a parallel plate dry etcher was studied for the etching of polyimide in oxygen.

TL;DR: In this article, the capacitance and dielectric loss factor characteristics of Yb2O3 thin films were studied in the frequency range from 10−5 (10−1 Hz) to 107 Hz.

TL;DR: The characteristics of the quadrupole mass filter designed for use as a residual gas analyser (RGA) in vacuum systems are described in detail in this article, where the essential requirements for this general purpose instrument are that it should be small, inexpensive and simple to operate, making it an ideal replacement for the hot cathode ionization gauge.

TL;DR: In this paper, an original technique is proposed to widen the principal potentialities of the LEED method and minimize experimental errors, and a way is found to correctly account for the background under reflex so that it has become possible to separate the intensity of the reflex from that of the underlying background.

TL;DR: In this article, the influence of gas pressure on the characteristics of the cathode fall region, the damage of the target, and the extraction, transport and deposition of the sputtered material is analyzed.

TL;DR: In this paper, the limitations of the small quadropole mass spectrometer when used routine measurements in relatively good vacuum systems are discussed and the authors suggest that careful calibration procedures should be incorporated into any experimental programme if quantitative results are required.

TL;DR: In this article, the authors discussed the factors which determine the smallest detectable leak rate and showed that this frequently overrated specification not only depends on the lowest measurable partial tracer gas pressure, but also on the highest detectable tracer concentration, the effective volume flow rate at the inlet of the tracer detector, and above all other factors on the total gas flow from the test object to the pump.

TL;DR: In this article, the authors present the capabilities of IABG's space simulation facility and the main performance data of other European thermal testing facilities, as well as recent test results for communication and scientific satellites and antenna subsystems.

TL;DR: In this article, the authors reviewed the requirements and design constraints for different machines using, as examples, the intersecting storage rings (ISR) for protons, the large electron positron (LEP) machine for electrons and the ‘cold-bore’ large hadron collider (LHC) was discussed.

TL;DR: In this paper, the measurement of pressure in high vacuum is considered in relation to other physical quantities over the whole range from near atmospheric to free molecule flow, and calibration procedures based on direct comparison with absolute gauges are reviewed; a bibliography covering recent publications is included.

TL;DR: A survey of crystal materials accessible to step decoration as well as future areas of application is given in this paper, where a combination of coarse and fine decoration can be localized with respect to the step level.

TL;DR: In this article, a method of calculating the desorption energy distribution from temperature programmed data based on an interaction process is proposed, checked by model calculations, and applied to H2O desoruption spectra from silicate glass surfaces.

TL;DR: In this article, the freeze-drying of a frozen liquid in a phial, a very common practice in the production of antibiotics and other pharmaceuticals, has been described in accordance with a spherical-geometry model for the continuously decreasing frozen nucleus.

TL;DR: The dispersion curves of the refractive index and the absorption coefficient have been determined in the 0.5-2.5 μm wavelength range from transmittance and reflectance measurements at different angles as mentioned in this paper.

TL;DR: A review of the main materials used in vacuum system construction and fluids for pumping is presented in this paper, where the authors also present the main components used in the construction of a vacuum system.

TL;DR: In this article, single probes and grid probes were used to study the density and the energy of the slow and secondary electron groups in the negative glow plasma of a dc diode sputtering system.

TL;DR: In this paper, a brief discussion of the principal mechanisms of cryopumping is followed by a review of cryogenic cooling methods and the main design features and performance parameters of the cryopumps.

TL;DR: In this paper, the nitrogen content of the near surface region of an Fe(111) sample was increased by N 2 + -implantation (energy 5 keV, current density 100μA/cm 2 ). After recrystallization the surface showed a p(1×1)-N superstructure.

TL;DR: In this article, the angular distribution of elastically backscattered electrons is taken into consideration, and the authors used the Thomas-Fermi-Dirac approach to determine the IMFP of electrons.

TL;DR: In this article, the authors deal with cleaning of materials and components for use in vacuum cleaners and discuss preliminary requirements in design, material selection, adsorbed and absorbed gases and the various processes available for cleaning.

TL;DR: In this article, a new model to explain the pumping mechanism of a single stage turbomolecular pump was proposed under the condition that the blade-to-molecule velocity ratio is a constant.