Showing papers in "Vacuum in 1990"

TL;DR: In this paper, the authors measured the stress of thin metal films in situ under normal conditions with a bending beam apparatus and showed that the different types of stress curves can be correlated with different growth modes (e.g. columnar grain growth or island growth) caused by differences in the material mobility.

TL;DR: In this paper, a critical review of the present status of the magnetron ion sputter plating of thin TiN films is presented, where different possibilities of extracting high ion current ls from the magnetic discharge to substrates located not only at standard target to substrate distance dS-T of about 50 mm but also at larger distances dST of approximately 200 mm and even at high pressures p = 5 Pa.

TL;DR: In this article, the authors investigated insulating materials of current interest for ULSI microelectronics (SiO2, Si3N4, SiOxNy) with XPS/AES and XANES/EXAFS in the electron yield mode.

TL;DR: A stigmatic imaging Time-of-Flight secondary ion microscope has been developed in this paper to demonstrate analytical capabilities for ion imaging, exact mass determination, and minor element detection, which has demonstrated mass resolutions of m Δm = 3100 (fwhm at mass 28) and image resolutions of up to approximately 1 μm.

TL;DR: In this paper, the effect of fiber-matrix adhesion on composite properties has been reviewed and a new formalism based on a fibermatrix interphase is proposed, where the complexity of the area where the fiber and matrix come in contact is considered.

TL;DR: A direct substitute for atomic hydrogen has not been found although potential substitutes have also been used to increase diamond growth rates as mentioned in this paper, which can also be used indirectly to develop new methods of CVD diamond growth.

TL;DR: In this article, high Tc superconducting YBa2Cu3O7−x (YBCO) films 100-200 nm thick have been grown in situ by ion beam sputter co-deposition using four Kaufman ion beam sources.

TL;DR: In this paper, diamond coatings have been applied on carbide tool inserts with a variation of substrate chemical composition and surface pre-treatment, and they have been characterized with respect to nucleation density, crystallinity, non-diamond material content and residual stresses.

TL;DR: In this article, high-resolution transmission electron microscopy (HRTEM) was used to study the TiO 2 microcrystals obtained by flame hydrolysis of TiCl 4 and showed that the adsorbed layer possesses a high degree of bidimensional order.

TL;DR: In this article, an effective heat of formation rule is formulated for predicting the sequence in which silicide phases form in metal-silicon binary systems, and the results show that in the presence of very small amounts of Au at the Si-Co interface, CoSi 2 is the first phase to form instead of Co 2 Si.

TL;DR: The surface composition of RuO2+IrO2 mixed oxide layers (1-2 μm thick) deposited on titanium by thermal degradation of the corresponding chlorides in aqueous or isopropanol solutions has been investigated as discussed by the authors.

TL;DR: In this article, the effects of bombardment of energetic electrons or ions on the growth of diamond crystals were investigated by applying dc electric fields to the substrate during diamond growth by microwave plasma CVD.

TL;DR: In this article, an X-ray reflectometer for studying polymer thin films and interfaces is described, which can be used to determine film thickness, average film density or density profile perpendicular to an interface, and microroughness at corresponding interfaces.

TL;DR: By switching from pure magnetic plasma confinement to a mixture of magnetic plus electrostatic plasma confinement, a new sputter magnetron source was developed which combined the advantages of sputter deposition (good adherence and structure) with the productivity of e-gun evaporators as discussed by the authors.

TL;DR: In this article, lead sulfide thin films on different substrates by the Atomic Layer Epitaxy process have been studied and the growth experiments were carried out at 300-350°C and the film thickness varied between 0.1 and 1 μm.

TL;DR: In this paper, the structure of the clean, (001) oriented single crystal surface of a platinum alloy containing 20 % at of cobalt (Pt 80 Co 20 ) was studied.

TL;DR: In this article, the authors investigated the uncertainties of series expansion for measuring the initial pressure in the range 10−7 to 10 mbar and found that the 1σ-uncertainty of the generated pressure amounts to 0.05% at a pressure of 10−6 mbar, and this uncertainty is smaller than the stability of currently available transfer gauges in the corresponding medium and high vacuum range.

TL;DR: In this paper, the use of vibrational spectroscopy to study adsorbates on single crystal surfaces is discussed, with emphasis on Reflection-Absorption Infrared Spectroscopy (RAIRS) and (to a lesser extent) Electron Energy Loss Spectrography (EELS).

TL;DR: In this article, the authors studied CO adsorption and desorption on clean Co(0001) and on polycrystalline Co using X-ray photoemission spectroscopy, Auger Electron Spectroscopy and Low Energy Electron Diffraction.

TL;DR: In this paper, diffusion processes and stabilities of impurities and the most important dopant Pd both, under oxidizing and reducing conditions at various temperatures by means of XPS, UPS, and ISS.

TL;DR: In this paper, all thin film solar cells were prepared and investigated by using n-CdSe in conjunction with p-ZnTe, and both the layers were deposited by hot wall vacuum evaporation technique.

TL;DR: In this article, a new empirical tight-binding model of Si is proposed for theoretical studies of surfaces, where hopping integrals are assumed to depend on the interatomic distance r as as η· r −v · S(d) where v = 4, 3 and 2 for ss, sp and pp interactions, respectively, and S(r) = 1/(1 + exp[μ( r − R c )].

TL;DR: The tribological properties of the Langmuir-Blodgett films of cadmium arachidate deposited on silicon wafers have been studied as a model boundary lubricant as discussed by the authors.

TL;DR: In this paper, the authors measured the curvature of a strip-shaped substrate throughout the process of deposition and found that the tensile stress due to deposit build-up is always tensile, whose magnitude mainly depends on powder material, not on substrate material.

TL;DR: In this paper, the adsorption and desorption kinetics of SO 2 on Ag(111) and Ag(110) surfaces have been studied at sample temperatures down to 70 K using Temperature Programmed Desorption (TPD) and Molecular Beam BackScattering experiments (MBBS) assisted by ΔΦ, LEED and AES measurements.

TL;DR: The HCA is a good adaptable plasma source for the performance of plasma activated deposition as mentioned in this paper, and the plasma conditions near the substrate are characterized by the isotropic part of the plasma.

TL;DR: The surface oxide layer plays an important role for stable and low-outgassing condition of stainless steels as discussed by the authors, and the oxide layer appears to determine the desorption behavior of CO and H 2 from the stainless steel surfaces which, in turn, determines the outgassing rate of the steel.

TL;DR: In this paper, the structural parameters for this model were refined considering a buckling of the first and second copper layers, and it was confirmed that the missing row model proposed by Zeng et al gives the best agreement with the experimental data.

TL;DR: In this article, phase sensitive detection of an overtone instead of the usually used fundamental frequency results in a very effective suppression of these effects when measuring ΔΦ with the Kelvin method, stray capacities can cause considerable error.

TL;DR: In this article, the authors present CO2 adsorption studies on a Pd(111) surface as a function of Na precoverage using high resolution electron energy loss spectroscopy.