Showing papers in "Vacuum in 1996"

TL;DR: In this paper, the main sealed-off vacuum devices are reviewed, together with the analyses of the most appropriate and updated getter solutions, and a good understanding and appropriate measurements are essential to reduce excessive gas release in the devices during their lifetime and to correctly select and measure the getter needed to cope with the total gas load foreseen.

TL;DR: In this article, the dependence of the dielectric constant ϵ rr, chemical composition and crystalline structure of thin titanium oxide films, deposited onto Si substrates, on reactive sputtering conditions has been studied using an RF magnetron operated under different conditions of substrate temperature and O 2 + Ar gas composition.

TL;DR: In this article, the authors proposed to use methods for conditioning the construction materials and transfer energy to the adsorbed gases to break their bonds, which can be used with some applications such as accelerators, or fusion devices.

TL;DR: The most relevant achievements in this field are reviewed and discussed in this paper, where the authors present a review of the most relevant work in the field of chemical pumping in the last two decades.

TL;DR: In this paper, three magnetrons with diameters 100-160 mm have been measured at pressures below 0.1 Pa. At low and medium discharge power density ≤ 10W/cm 2, stable discharge has been achieved down to the Ar pressure range (1.1-2) × 10 −2 Pa.

TL;DR: In this article, surface changes in an outgassing measurement system were investigated using X-ray photoelectron spectroscopy (XPS) from the system's fabrication through evacuation cycles following oxidation in air.

TL;DR: In this article, the effect of nitrogen content on the structural and mechanical properties of the TiNχ films was studied and it was found that the film microhardness was found to have a maximum at χ ≈ 0.9.

TL;DR: In this paper, the temperature dependence of deuterium permeation was measured for differently surface-treated type 316L stainless steel specimens in the temperature range of 473-623 K. The analysis showed that this reduction is achieved by the reduction of the diffusion coefficient.

TL;DR: In this paper, a method of switching between two pumping paths (SPP) was developed to measure a low outgassing rate accurately by subtracting the outgasings of all the elemental parts of a measurement system.

TL;DR: In this paper, the structure of fully three-dimensional dc magnetron discharge is clarified by the use of the PIC/MC method, where magnets are placed in the form of a racetrack with the practical dimensions of industrial sputtering apparatus.

TL;DR: In this article, small-scale laboratory experiments on wall conditioning by thin lithium layer deposition are carried out and strong gettering effects of clean lithium surfaces on oxygen and hydrogen atoms are found, supporting recent findings in fusion devices.

TL;DR: In this article, thin films of tin oxide (SnO2) have been deposited by means of RF sputtering from a pure SnO2 target onto alumina substrates in an Ar O 2 mixture, in order to achieve the best thin films properties for CO detection.

TL;DR: In this article, the influence of 6 keV Ar+ ion bombardment on the LaPO4 surface composition has been studied by XPS and it was shown that the composition of the altered layer can be described by the mechanism of post-collisional interaction of ion-induced decomposed species and can be presented as: LaPO 4 → μ1LaPO4 + μ2LaPxOy + μ3La2O3, where n1 = concentrations of different components.

TL;DR: In this paper, the authors investigated the switching phenomenon in amorphous ln2Te3 films and found that it is typical for a memory switch and that the switching voltage activation energy (ϵ) calculated from the temperature dependence of V th is about 0.51 eV.

TL;DR: Ion beams play a vital role in materials in different ways, e.g. the growth of thin films, modification of materials and the analysis of materials as mentioned in this paper. But, the application of ion beams is the doping of diamond film for devices and doping of fullerene films with K for superconducting properties.

TL;DR: In this article, the vacuum pressures in the packaged cavities of these devices were well controlled and a two-dimensional electromagnetic optical scanner was also developed, which was used to measure the vacuum pressure in the cavity.

TL;DR: In this paper, the authors present some methods of controlling FIBM and FIBD processes for nanofabrication purposes and discuss their limitations, as well as the limitations of these methods.

TL;DR: In this article, the results of real-time optical monitoring of epitaxial growth processes by p-polarized reflectance spectroscopy (PRS) using a single wavelength application under pulsed chemical beam epitaxy (PCBE) condition are described.

TL;DR: In this paper, the development of residual stress of arc-deposition Ti films as a function of the energy of deposited atoms was investigated, and a comparison with the momentum transfer model for Ti films deposited under substrate bias indicated that the films are in a region characterised by momentum values of 50-150 amu 1 2 eV 1 2.

TL;DR: In this paper, the effects of surface roughness on the conductance of passages composed of two flat plates are studied experimentally and theoretically, and the Monte Carlo method is used for calculation.

TL;DR: In this paper, the basic aspects of microwave discharges and properties of the plasma important for thin film processing are discussed, and the best solution is to introduce the plasma produced by whistler wave into the plasma chamber from the side of high magnetic field B ⪢ Bce, where Bce is B which corresponds to ECR.

TL;DR: In this article, the change of surface structure, interface of adhesion joint and adhesion of polyethylene after N+ ion beam treatment were studied, and the increase of the adhesion strength was observed.

TL;DR: In this paper, the peak and shoulders observed in the photoconductivity spectra are attributed to transitions from valence sub-bands to the conduction band, and from the room temperature spectra, the band gap energies, spin-orbit and crystal field parameters are determined.

TL;DR: In this article, a boron nitride-coated stainless steel was used for vacuum vessel materials, with low adsorption rate of oxygen and carbonates in extremely high vacuum, of a range 10−10 Pa, the main component of the residual gas is hydrogen.

TL;DR: In this paper, a SnO2 film was used as a gas sensing element for detecting the presence of ammonia in the ambient, and the mass of the adsorbed substance was calculated as a function of the ammonia concentration c.

TL;DR: In this article, the authors used TPD, angle-resolved TPD and work function measurements and LEED to study the desorption and coadsorption of H 2 (D 2 ) and potassium on the single crystal silver surfaces.

TL;DR: In this paper, a composite Ag C:H films were deposited using an electromagnetron with Ag target operated in the dc unbalanced mode in a working gas mixture of n-hexane/Ar. Structure, basic optical and dc electrical properties are described with the main emphasis on the ageing processes.