Showing papers in "Vacuum in 2002"
••
TL;DR: In this paper, the influence of the dopant elements and concentration on the properties of ZnO thin film deposited by spray pyrolysis was studied and the results showed that the doping affects the thin films properties mainly the electrical ones, function of dopant concentration and nature.
359 citations
••
TL;DR: The application of high power pulses with peak voltage of -2 kV and peak power density of 3 kWcm-2 to magnetron plasma sources is a new development in sputtering technology as discussed by the authors.
290 citations
••
TL;DR: In this paper, an experimental study of the effects of thin thermal barrier coatings on the performance of a diesel engine was conducted and the results obtained from the engine with thermally insulated pistons were compared with the baseline engine data.
212 citations
••
TL;DR: In this paper, the effect of annealing in the structure and morphology of vacuum deposited thin nickel films are reported, and the authors show that the phase transformation of Ni to NiO is controlled by the diffusion of Ni ions through the grain boundaries.
178 citations
••
TL;DR: In this paper, the recent advancement of transparent conductive oxide thin films is reviewed using a strategy, focusing on the lowest resistive indium tin oxide films, deep-ultraviolet (deep-UV) TCO thin film, p-n homo-junction based on bipolar CuInO2, and UV-light emitting diode based on p−n heterojunction.
164 citations
••
TL;DR: In this paper, three types of processes on the materials can be activated: (1) Destruction of toxic/harmful materials; (2) Superficial modification of existing materials; and (3) Creation of new materials.
132 citations
••
TL;DR: In this paper, (0, 0, 2)-oriented transparent conductive ZnO thin films are prepared by DC planar magnetron sputtering deposition on a glass sheet substrate.
127 citations
••
TL;DR: In this article, the effect of the deposition parameters on the properties of the films were studied with the aim to determine the most suitable deposition conditions to obtain ZnO-Al thin films with a low resistivity and high transmittance, characteristics required for applications on optoelectronic devices.
122 citations
••
TL;DR: In this paper, the lattice constants of the Cu3N lattice constant have been determined and the optical band gap of the films have been compared with the nitrogen flow rate, and the nonstoichiometry, the mean crystal size, the direction of preferred orientation and the surface morphology of the film have been correlated.
121 citations
••
TL;DR: In this paper, the main point of confusion in computer modeling of vacuum systems is discussed. But the authors focus on the distribution that results from the most common misinterpretation of the cosine law, which is illustrated by quantifying the effect on the modelled conductance for circular cylinders.
••
TL;DR: In this article, the role of residual stress on the mechanical integrity of PVD protective coatings is discussed and a numerical model of the residual stress distribution within a layered metal-ceramic composite coating is presented.
••
TL;DR: In this article, a comparative study of the tribological properties of the most employed hard coatings like TiN, TiCN, TiAlN, CrN and ZrN is presented.
••
TL;DR: In this article, the authors focus on the production, properties, and use of filtered cathodic arc plasmas and discuss the possibilities of tuning film properties such as density, stress, adhesion, surface roughness, hardness, elastic modulus, and optical constants via the energy of film-forming ions.
••
TL;DR: The concept of superhard nanocomposites is based on a thermodynamically driven spinodal segregation in binary (and ternary or quaternary) systems which leads to a spontaneous self-organization of a stable nanostructure.
••
TL;DR: In this paper, the properties of superlattice structured PVD coatings dedicated to high-temperature performance are described and some technological details from the production process of the super-laminate coatings in large scale are given and results from the performance of these novel PVD coating in various industrial applications are presented.
••
TL;DR: In this paper, a cylindrical bar of AISI 316L stainless steel with a diameter of 2mm and a length of 10mm using slurry salt bath consisting of borax, boric acid and ferro-silicon was used for heat treatment.
••
TL;DR: In this paper, the authors present the hot corrosion test results of the 50%Ni-50%Cr alloy spray coated boiler tubes at the actual refuse incineration plant and the coated tubes are expected to have longer life.
••
TL;DR: In this article, high conductive and transparent tin-doped indium oxide (ITO) films have been prepared by RF sputtering processes on polymer substrates, polyethylene terepthalate (PET) and polyimide (Kapton KJ®), and onto glass as reference.
••
TL;DR: In this paper, the phase change and electrical properties of the ZnO-In oxide films were investigated over a wide range of ratio of Zn to In. Impurities of Al and Sn were intentionally added to the films in order to investigate the influence of these impurities on the above properties.
••
TL;DR: In this paper, a comparative analysis of three configurations of the magnetron sputtering system has been made and the following parameters, which serve as criteria for the estimation of unbalanced magnetron parameters have been developed: the unbalance coefficient (K ) and the coefficient of geometrical unbalance (K G ), which characterise the field configuration at the front of a target.
••
TL;DR: In this paper, X-ray diffraction (XRD) measurements of sintered SnO 2 :Nb specimen and the Rietvelt analysis of the XRD pattern were also carried out in order to find the doping effect of Nb to SnO2.
••
TL;DR: In this paper, transparent and colorless TiO2 thin films were deposited onto microscope glass slides by means of a JGP-350C r.f. magnetron reactive sputtering system using Ar and O2 as working gases.
••
TL;DR: In this paper, a study of thermal behavior of Ti(dpm)2(OPri)2 used as a source compound to obtain TiO2 films was carried out and data on vapour composition, thermal stability and decomposition products of the compound in vacuo were obtained.
••
TL;DR: In this paper, the authors reviewed the results obtained over the 5 years at the Institute for Superhard Materials of the National Academy of Sciences of Ukraine in the field of investigation of surface properties of carbon films (diamond, diamond-like) by different experimental methods (XAES, XPS, AFM, RS-, ESR-, and IR-spectroscopies and wetting).
••
TL;DR: In this paper, the mass and energy spectra of the positive and negative ions at a substrate were measured in a pulsed magnetron (20-100 kHz) operated in argon, argon/oxygen and argon-helium mixtures.
••
TL;DR: In this article, the process of erosion and redeposition and their impact on plasma facing materials in devices for magnetically confined fusion are discussed. And detailed analysis shows that erosion and deposition can coexist on otherwise erosion-dominated surfaces due to local inhomogenities.
••
TL;DR: Hardening mask etching as discussed by the authors was applied for tunneling magneto-resistive (TMR) multi-layers that uses magnetic random access memory with a Ta mask.
••
TL;DR: The effect of tin oxide dispersion condition on the nodule formation in the ITO sputtering target was investigated in this article, where the tin oxide condition was improved by using finer raw powder and by modifying mixing process.
••
TL;DR: In this paper, the deposition of stoichiometric TiO 2 films for V 2 O 5 /TiO 2 anatase catalysts was investigated. DC magnetron sputtering from ceramic oxide targets in an argon/oxygen atmosphere was chosen as deposition technique and the target behaviour upon sputtering was followed by means of the target voltage.