Proceedings ArticleDOI
1D and 2D wide acoustic bandgap Phononic Crystal structures for performance improvement of AlN-on-Si resonators operating in GHz range
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In this article, a new PnC unit cell topology is designed, which has a very wide ABG of 138 MHz with center frequency around 1 GHz and minimum feature size of 0.6 μm.Abstract:
Design and simulation of Phononic Crystals (PnCs) with a wide Acoustic Band Gap (ABG) around 1 GHz is presented. A new PnC unit cell topology is designed, which has a very wide ABG of 138 MHz with center frequency around 1 GHz and minimum feature size of 0.6 μm. Wider ABG allows better enhancement of the Quality factor (Q) by reducing the anchor loss. Effect of geometrical variation and the periodicity of PnC are discussed. ABG for 1D and 2D periodicity is simulated and geometrical dimensions to obtain similar ABG in both cases are compared.read more
Citations
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Journal ArticleDOI
Cement sensors with acoustic bandgaps using carbon nanotubes
TL;DR: In this article, the authors developed and reported the first cementitious sensors capable of exhibiting high frequency acoustic bandgaps (ABGs) using carbon nanotubes (CNTs).
Journal ArticleDOI
Design, Modeling and Fabrication of TPoS MEMS Resonators With Improved Performance at 1 GHz
TL;DR: In this paper, the effects of physical dimensions such as length, width and thickness as well as the mode of vibration and the number of anchors on the performance of longitudinal thin film piezoelectric on silicon (TPoS) MEMS resonators have been studied.
Journal ArticleDOI
Anchor quality factor improvement of a piezoelectrically-excited MEMS resonator using window-like phononic crystal strip
Proceedings ArticleDOI
Effect of Undercut due to Isotropic Etch while Releasing on the Performance of TPoS Resonators
TL;DR: In this paper , the effect of additional loss due to the isotropic etch used to release the extensional mode thin piezoelectric on silicon (TPoS) resonators is reported and validated.
Proceedings ArticleDOI
Application of Phononic Crystal Structure for Side Leakage Suppression in A 1 -Mode Lamb Wave Resonators
Keyuan Gong,Zhaohui Wu,Yu-Po Wong,Jiacheng Liu,Qi Liang,Yawei Li,Jingfu Bao,Ken-ya Hashimoto +7 more
TL;DR: In this paper, the applicability of two dimensional phononic crystals (PnC) structure for suppression of energy side leakage in the A 1 mode Lamb wave resonator with the broadband piston mode structure employing rotated Y-cut LiNbO 3 thin plate was discussed.
References
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Elastic and acoustic wave band structure
TL;DR: In this article, a periodic structure consisting of identical spheres placed periodically within a host homogeneous material is investigated, and the structure is shown to have a similar structure to the one described in this paper.
Journal ArticleDOI
Theory of acoustic band structure of periodic elastic composites.
TL;DR: The band structures for the transverse modes of nickel alloy cylinders in an aluminum alloy host, and vice versa are computed, finding band gaps which extend throughout the Brillouin zone.
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Thin-film piezoelectric-on-silicon resonators for high-frequency reference oscillator applications
TL;DR: This paper studies the application of lateral bulk acoustic thin-film piezoelectric-on-substrate (TPoS) resonators in high-frequency reference oscillators, designed and fabricated in 2 classes--high-order and coupled-array and the performance characteristics of the oscillators are measured and discussed.
Journal ArticleDOI
Experimental evidence for the existence of absolute acoustic band gaps in two-dimensional periodic composite media
Jérôme Olivier Vasseur,Pierre A. Deymier,George N. Frantziskonis,G Hong,Bahram Djafari-Rouhani,Leonard Dobrzynski +5 more
TL;DR: In this article, the experimental transmission spectrum and theoretical band structure of two periodic arrays of cylinders organized on a square lattice and on a centred rectangular network are reported, and the measured transmission is observed to drop to noise level throughout frequency intervals in reasonable agreement with the calculated forbidden frequency bands.
Journal ArticleDOI
In-plane acoustic reflectors for reducing effective anchor loss in lateral?extensional MEMS resonators
TL;DR: In this paper, in-plane acoustic reflectors are proposed to enhance the quality factor (Q) in lateral-mode micromachined resonators, which can reduce the overall anchor loss with minimum modification in the resonator design.
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