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Fig. 1. a. Schematic of the 3DSP microprobe with stylus, and b. illustration of a SP deflected in its soft axis (z) direction.1
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Journal Article
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DOI
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3-D Isotropic Tactile Microprobe Based on a Silicon Parallelogram Kinematic: From Concept to Fabrication
[...]
David Metz
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,
Andreas Dietzel
1
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Institutions (1)
Braunschweig University of Technology
1
01 Feb 2019
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IEEE\/ASME Journal of Microelectromechanical Systems