Search or ask a question
Pricing
Login
Sign up
Home
Notebook
BETA
Literature Review
Copilot
Citation generator
Paraphraser
AI Detector
Chrome Extension
Talk with us
Use on ChatGPT
View figures gallery
Fig. 5. a.-c. Deflection of a 3DSP in -, -, and -direction and d. deflection of a SP in -direction as obtained by simulations for a force of 50 mN.
...read more
Content maybe subject to copyright
Journal Article
•
DOI
•
3-D Isotropic Tactile Microprobe Based on a Silicon Parallelogram Kinematic: From Concept to Fabrication
[...]
David Metz
1
,
Andreas Dietzel
1
•
Institutions (1)
Braunschweig University of Technology
1
01 Feb 2019
-
IEEE\/ASME Journal of Microelectromechanical Systems