FIG. 6. (Color online) Oxidation rates for Si and SiGe vs the oxide thickness as measured by ellipsometry. Data from the present work is presented along with simulation results. The simulations used the Massoud (Ref. 7) model and published model parameters (Refs. 6 and 7) with the exception of the linear rate constant, B/A, which was determined from the data from the present work.
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