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Table 1 Measured crystallization parameters for HWCVD and PECVD films annealed at 600 °C
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Journal Article
•
DOI
•
A comparison of grain nucleation and grain growth during crystallization of HWCVD and PECVD a-Si:H films
[...]
A. H. Mahan
1
,
S. P. Ahrenkiel
1
,
Ruud E. I. Schropp
2
,
H. B. T. Li
2
,
D. S. Ginley
1
- Show less
+1 more
•
Institutions (2)
National Renewable Energy Laboratory
1
,
Utrecht University
2
15 Jan 2008
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Thin Solid Films