Journal ArticleDOI
A Comprehensive Survey on Microgrippers Design: Operational Strategy
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This article is published in Journal of Mechanical Design.The article was published on 2017-07-01. It has received 66 citations till now.read more
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A Comprehensive Survey on Microgrippers Design: Mechanical Structure
Journal ArticleDOI
Review of Electrothermal Actuators and Applications
Alissa Potekhina,Changhai Wang +1 more
TL;DR: A review of electrothermal micro-actuators and applications is presented in this paper, where the three main configurations of electro-thermal actuators are discussed: hot-and-cold-arm, chevron, and bimorph.
Journal ArticleDOI
Survey on Recent Designs of Compliant Micro-/Nano-Positioning Stages
Zeyi Wu,Qingsong Xu +1 more
TL;DR: This paper is concentrated on reviewing the state-of-the-art research on complaint micro-/nano-positioning stage design in recent years and involves the major processes and components for designing a compliant positioning stage, e.g., actuator selection, stroke amplifier design, connecting scheme of the multi-DOF stage and structure optimization.
Journal ArticleDOI
Operational characterization of CSFH MEMS Technology based hinges
TL;DR: A CSFH has been analyzed with both theoretical and finite element methods, in order to obtain the relation between voltage and generated torque, and showed that CSFH performs better than linear flexure hinges in terms of larger rotations and less stress for given applied voltage.
Journal ArticleDOI
Recent design and development of piezoelectric-actuated compliant microgrippers: A review
Zekui Lyu,Qingsong Xu +1 more
TL;DR: In this article, the authors reviewed the recent advances on performance indices, classification, structural composition, optimization and modeling method, and control of PEACM and provided a guideline on further development of the micro gripper.
References
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Journal ArticleDOI
Piezoelectric Tweezer-Type End Effector With Force- and Displacement-Sensing Capability
TL;DR: In this article, a robotic tweezers with a force and displacement-sensing capability driven by piezoelectric stack actuators is presented, in which one of the serially connected actuators nested in the end effector is used as a force sensor.
Journal ArticleDOI
Automated Guiding Task of a Flexible Micropart Using a Two-Sensing-Finger Microgripper
TL;DR: This paper studies automated tasks based on hybrid force/position control of a flexible object at the microscale by a two-sensing-finger microgripper and proposes a specific control strategy based on grasp stability taking into account the pull off forces.
Journal ArticleDOI
Simultaneous Capacitive and Electrothermal Position Sensing in a Micromachined Nanopositioner
TL;DR: In this article, a micromachined nanopositioner with capacitive actuation together with electrothermal sensing on a single chip is reported. But, the performance of the electrostatic actuator is not as good as the capacitive sensor.
Journal ArticleDOI
MOEMS variable optical attenuators using rotary comb drive actuators
TL;DR: In this paper, the authors proposed a novel design of variable optical attenuator using electrostatic rotary comb actuator, which results in large dynamic range of 57 dB attenuation, low driving voltage of 3.6 dc V for 30dB attenuation and excellent optical transient stability with no mechanical overshoot.
Journal ArticleDOI
Design and analysis of a polymeric photo-thermal microactuator
TL;DR: In this paper, a photo-thermally actuated bent-beam microactuator is presented, based on the thermal expansion of the bent-beams that absorb the required heat by laser illumination.