Journal ArticleDOI
A Comprehensive Survey on Microgrippers Design: Operational Strategy
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This article is published in Journal of Mechanical Design.The article was published on 2017-07-01. It has received 66 citations till now.read more
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Journal ArticleDOI
A Comprehensive Survey on Microgrippers Design: Mechanical Structure
Journal ArticleDOI
Review of Electrothermal Actuators and Applications
Alissa Potekhina,Changhai Wang +1 more
TL;DR: A review of electrothermal micro-actuators and applications is presented in this paper, where the three main configurations of electro-thermal actuators are discussed: hot-and-cold-arm, chevron, and bimorph.
Journal ArticleDOI
Survey on Recent Designs of Compliant Micro-/Nano-Positioning Stages
Zeyi Wu,Qingsong Xu +1 more
TL;DR: This paper is concentrated on reviewing the state-of-the-art research on complaint micro-/nano-positioning stage design in recent years and involves the major processes and components for designing a compliant positioning stage, e.g., actuator selection, stroke amplifier design, connecting scheme of the multi-DOF stage and structure optimization.
Journal ArticleDOI
Operational characterization of CSFH MEMS Technology based hinges
TL;DR: A CSFH has been analyzed with both theoretical and finite element methods, in order to obtain the relation between voltage and generated torque, and showed that CSFH performs better than linear flexure hinges in terms of larger rotations and less stress for given applied voltage.
Journal ArticleDOI
Recent design and development of piezoelectric-actuated compliant microgrippers: A review
Zekui Lyu,Qingsong Xu +1 more
TL;DR: In this article, the authors reviewed the recent advances on performance indices, classification, structural composition, optimization and modeling method, and control of PEACM and provided a guideline on further development of the micro gripper.
References
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Journal Article
Robust actuation of silicon MEMS using SMA wires integrated at wafer-level by nickel electroplating
Donato Clausi,Henrik Gradin,Stefan Braun,Jan Peirs,Göran Stemme,Dominiek Reynaerts,Wouter van der Wijngaart +6 more
TL;DR: In this article, the wafer-level fixation and electrical connection of pre-strained SMA wires to silicon MEMS using electroplating was reported, and the fabrication of the first Joule-heated Shape memory alloy (SMA) wire actuators on silicon.
Journal ArticleDOI
Atomic Resolution Disk Resonant Force and Displacement Sensors for Measurements in Liquid
TL;DR: In this article, the same principle has been applied to rotational mode disk resonators that are capable of maintaining relatively high quality factors in liquid, and the results indicate about tenfold improvement in combined displacement-force resolution figure-of-merit compared with typ- ical piezoresistive cantilevers when operating in liquid.
Journal ArticleDOI
Modelling and experimental verification of heat dissipation mechanisms in an SU-8 electrothermal microgripper
TL;DR: In this article, a micro gripper based on a hot-cold arm principle was tested to give a greater understanding of the associated heat dissipation methods, and experiments were conducted in air at atmospheric and sub-atmospheric pressure.
Proceedings ArticleDOI
Design, modeling, and characterization of a MEMS micro-gripper with an integrated electrothermal force sensor
TL;DR: The experiment shows that the micro-gripper is able to handle a wide range of micro-sample sizes with biocompatibility and gentle handling forces.
Journal ArticleDOI
Electro-thermally driven microgrippers for micro-electro-mechanical systems applications
TL;DR: In this paper, an innovative, laser machined structure to act as a micro-gripper is presented, which consists of a pair of identical, cascaded actuation structures oriented in a face-to-face direction, to perform micro-tweezers.