Journal ArticleDOI
A Comprehensive Survey on Microgrippers Design: Operational Strategy
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This article is published in Journal of Mechanical Design.The article was published on 2017-07-01. It has received 66 citations till now.read more
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Journal ArticleDOI
A Comprehensive Survey on Microgrippers Design: Mechanical Structure
Journal ArticleDOI
Review of Electrothermal Actuators and Applications
Alissa Potekhina,Changhai Wang +1 more
TL;DR: A review of electrothermal micro-actuators and applications is presented in this paper, where the three main configurations of electro-thermal actuators are discussed: hot-and-cold-arm, chevron, and bimorph.
Journal ArticleDOI
Survey on Recent Designs of Compliant Micro-/Nano-Positioning Stages
Zeyi Wu,Qingsong Xu +1 more
TL;DR: This paper is concentrated on reviewing the state-of-the-art research on complaint micro-/nano-positioning stage design in recent years and involves the major processes and components for designing a compliant positioning stage, e.g., actuator selection, stroke amplifier design, connecting scheme of the multi-DOF stage and structure optimization.
Journal ArticleDOI
Operational characterization of CSFH MEMS Technology based hinges
TL;DR: A CSFH has been analyzed with both theoretical and finite element methods, in order to obtain the relation between voltage and generated torque, and showed that CSFH performs better than linear flexure hinges in terms of larger rotations and less stress for given applied voltage.
Journal ArticleDOI
Recent design and development of piezoelectric-actuated compliant microgrippers: A review
Zekui Lyu,Qingsong Xu +1 more
TL;DR: In this article, the authors reviewed the recent advances on performance indices, classification, structural composition, optimization and modeling method, and control of PEACM and provided a guideline on further development of the micro gripper.
References
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Journal ArticleDOI
Silicon-processed overhanging microgripper
TL;DR: In this article, a silicon-processed micro gripper for mounting on a micropositioner was designed and fabricated by combining surface and bulk micromachining, which is electrostatically driven by flexible, interdigitated comb pairs.
Journal ArticleDOI
Micro-motion devices technology: The state of arts review
TL;DR: In this article, the authors reviewed the world-wide study on micro-motion systems both from an academic and an industrial perspective and concluded that the PZT actuation element integrated with the compliant mechanism is the most promising technology which can achieve high accuracy (sub-nanometer) of all four kinds of motion ranges.
Journal ArticleDOI
Motion Control of Piezoelectric Positioning Stages: Modeling, Controller Design, and Experimental Evaluation
TL;DR: In this paper, a general skeleton on modeling, controller design, and applications of the piezoelectric positioning stages is presented, and a robust adaptive controller is developed based on a reduced dynamic model under both unknown hysteresis nonlinearities and parameter uncertainties.
Journal ArticleDOI
A microgripper using piezoelectric actuation for micro-object manipulation
S.K. Nah,Zhaowei Zhong +1 more
TL;DR: In this paper, a monolithic compliant-flexure-based micro gripper with piezoelectric actuation was designed and tested using a finite element analysis (FEA).
Book
MEMS and Microsystems: Design, Manufacture, and Nanoscale Engineering
TL;DR: In this article, the authors present an overview of the basic principles of micro-systems design and manufacturing, as well as some of the problems encountered in the design of microstructured systems.