FIG. 3. Diffuse transmittance for a rectangular Si grating on an infinite Si substrate with L=650 nm calculated with RCWA. The lines show the maxima predicted with modal analysis, including contributions from interference between the zeroth and second grating modes solid lines , FabryPérot interference of the zeroth grating mode with itself dash-dot lines , and interference between zeroth and fourth grating modes dashed lines .
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