FIG. 4. a . The x dependence of the electric field of the three grating modes for L=650 nm and =1000 nm. The gray regions are the Si and the white is air. b A schematic visualization of the meaning of the overlap integral, calculated for the overlap between the zeroth grating mode and first diffracted order for L=650 nm and =1000 nm. The solid line shows the x dependence of the zeroth grating mode while the dashed line is the x dependence of the first diffracted order.
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