# A free-space measurement of complex permittivity of doped silicon wafers using transmission coefficient at microwave frequencies

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### Cites background or methods from "A free-space measurement of complex..."

...If εq* and dq are the complex permittivity and thickness of the Teflon plate, the ABCD matrix for the Teflon plate is given by [3]:...

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...Recently, characterization of silicon wafers for p-type and n-type had been reported extensively by these authors [1-4]....

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##### References

1,614 citations

### "A free-space measurement of complex..." refers methods in this paper

...Teflon had been measured around the same frequencies by Von Hippel [7] using the short-circuited-line....

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743 citations

### "A free-space measurement of complex..." refers methods in this paper

...If the ABCD matrix of the assembly is denoted as [A], the sample [A] and the teflon [A], then following relationship is obtained [6]...

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...PVC had also been measured around the same frequencies by Ghodgaonkar [6] using free-space technique....

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...21, we refer to Ghodgaonkar et al [6]....

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...In deriving the equations for calculating complex permittivity, ( ) using the transmission coefficient, S j* 21, we refer to Ghodgaonkar et al [6]....

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47 citations

### "A free-space measurement of complex..." refers background in this paper

...To date, various versions of the microwave measurement techniques are reported for the characterization of semiconductors [1-5] but none have used free-space method which is contactless and nondestructive....

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46 citations

### "A free-space measurement of complex..." refers background in this paper

...79% of the original value and is determined from the following equation [8],...

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17 citations