Journal ArticleDOI
A low voltage actuated micromachined microwave switch using torsion springs and leverage
Dooyoung Hah,Euisik Yoon,Songcheol Hong +2 more
- Vol. 48, Iss: 12, pp 2540-2545
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In this article, a push-pull type microwave switch is proposed, which utilizes torsion springs and leverage for lowvoltage operation, and the actuation voltage is /spl sim/5 V.Abstract:
In this paper, a push-pull type microwave switch is proposed, which utilizes torsion springs and leverage for low-voltage operation. The switching operation up to 4 GHz is demonstrated. The actuation voltage is /spl sim/5 V. The insertion loss of /spl sim/1 dB and the isolation as high as /spl sim/40 dB at 1 GHz are achieved by the push-pull operation.read more
Citations
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Patent
Construction structures and manufacturing processes for integrated circuit wafer probe card assemblies
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Patent
Systems for testing and packaging integrated circuits
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References
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Journal ArticleDOI
Performance of low-loss RF MEMS capacitive switches
TL;DR: In this paper, the construction and performance of metal membrane radio frequency MEMS switches at microwave and millimeter-wave frequencies was described. But the authors focused on the performance of the switches in terms of on-off capacitance ratio.
Proceedings ArticleDOI
A Surface Micromachined Miniature Switch For Telecommunications Applications With Signal Frequencies From DC Up To 4 Ghz
J.J. Yao,M.F. Chang +1 more
TL;DR: In this paper, a surface micromachined miniature switch has been made on a semi-insulating GaAs substrate using a suspended silicon dioxide micro-beam as the cantilevered arm, a platinum-to-gold electrical contact, and electrostatic actuation as the switching mechanism.
Proceedings ArticleDOI
Characteristics of micromachined switches at microwave frequencies
C.L. Goldsmith,John N. Randall,S. Eshelman,Tsen-Hwang Lin,David Denniston,S. Chen,B. Norvell +6 more
TL;DR: In this paper, the fundamental characteristics of micromechanical membrane switches operating at microwave frequencies are discussed and the construction and theory of operation of capacitive membrane switches is reviewed. And the inherent advantages of these switches relative to semiconductor switches are discussed.
Proceedings ArticleDOI
Micromachined microwave actuator (MIMAC) technology-a new tuning approach for microwave integrated circuits
TL;DR: In this paper, the authors describe an approach to the realization of tunable/variable III-V planar microwave integrated circuits, which uses micromachined electrostatically controlled actuator technology.
Proceedings ArticleDOI
Micromechanical electrostatic K-band switches
TL;DR: In this paper, two novel designs of micromechanical capacitive switches using serpentine and cantilever springs for low actuation voltage applications are reported, which also incorporate an electrode situated above the switching structure in order to provide system stability.