Journal ArticleDOI
A MEMS-based projection display
P. F. Van Kessel,L.J. Hornbeck,R.E. Meier,M.R. Douglass +3 more
- Vol. 86, Iss: 8, pp 1687-1704
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TLDR
The digital display engine (DDE) as discussed by the authors is based on a single DMD device having array dimensions of 800/spl times/600 elements, illuminated by a metal halide arc lamp through a compact optics train.Abstract:
A period of rapid growth and change in the display industry has recently given rise to many new display technologies. One such technology, the Digital Micromirror Device/sup TM/ (DMD), developed at Texas Instruments, represents a unique application of microelectromechanical systems to the area of projection displays. In this paper, we describe a representative example of a DMD-based projection display engine, the digital display engine (DDE). The DDE is based on a single-DMD device having array dimensions of 800/spl times/600 elements, illuminated by a metal halide arc lamp through a compact optics train. The engine is designed for portable and fixed conference-room graphics and video display applications, and many design decisions were made to tailor the engine for its intended venue. The design of the projection engine optics and electronics is discussed, along with the basic operation, manufacture, and reliability of the DMD itself.read more
Citations
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Book
An Introduction to Microelectromechanical Systems Engineering
TL;DR: The main aim is to provide an introduction to MEMS by describing the processes and materials available and by using examples of commercially available devices, and the concept of using MEMS devices as key elements within complex systems (or even microsystems!) is explored.
Journal ArticleDOI
Lab-on-chip technologies: making a microfluidic network and coupling it into a complete microsystem : a review
Patrick Abgrall,Anne-Marie Gué +1 more
TL;DR: The use of various materials, such as silicon, glass and polymers, and their related technologies for the manufacturing of simple microchannels and complex systems is discussed in this paper.
Journal ArticleDOI
The role of van der Waals forces in adhesion of micromachined surfaces
Frank W. DelRio,Frank W. DelRio,Maarten P. de Boer,James Arthur Knapp,E. David Reedy,Peggy J. Clews,Martin L. Dunn +6 more
TL;DR: It is demonstrated that the adhesion of micromachined surfaces is in a regime not considered by standard rough surface adhesion models and suggested that topographic correlations between the upper and lower surfaces must be considered to understand adhesion completely.
Journal ArticleDOI
Hard and soft micromachining for BioMEMS: review of techniques and examples of applications in microfluidics and drug delivery.
TL;DR: This paper presents a tutorial review of both classical "hard" and more recent "soft" micromachining techniques, and provides examples where these techniques are combined to produce hydrogel-based microfluidic control systems.
Journal ArticleDOI
High-resolution aliasing-free optical beam steering
David N. Hutchison,Jie Sun,Jonathan K. Doylend,Ranjeet Kumar,John Heck,Woosung Kim,Christopher T. Phare,Avi Feshali,Haisheng Rong +8 more
TL;DR: In this paper, a two-axis steerable optical phased array with over 500 resolvable spots and 80° steering in the phased array axis (measurement limited) and a record small divergence in both axes (0.14°).
References
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Proceedings ArticleDOI
Digital Light Processing for high-brightness, high-resolution applications
TL;DR: In this article, the authors describe the design, operation, performance, and advantages of DLP-based projection systems for high-brightness, high-resolution, and high resolution applications.
Proceedings ArticleDOI
Lifetime estimates and unique failure mechanisms of the Digital Micromirror Device (DMD)
TL;DR: The Digital Micromirror Device/sup TM/ (DMD/supTM/) has made great strides in terms of both performance and reliability as discussed by the authors. But, the performance of the DMD has not yet reached the state-of-the-art.
Proceedings ArticleDOI
Grating Light Valve: revolutionizing display technology
TL;DR: The grating light valve (GLV) technology as discussed by the authors is a micromechanical phase grating, which can produce bright or dark pixels in a display system by providing controlled diffraction of incident light.
Digital light processing and MEMS : timely convergence for a bright future
TL;DR: DLP technology enables digital, high-resolution, color projection displays that have high contrast, are bright, are seamless, and have the accuracy of color and gray scale that only digital control can achieve.
Proceedings ArticleDOI
Digital Light Processing and MEMS: reflecting the digital display needs of the networked society
TL;DR: An overview of DLP technology along with the architecture, projection operation, manufacture, and reliability of the DMD is presented, and features of DMD technology that distinguish it from conventional MEMS technology are explored.