Journal ArticleDOI
A resonant accelerometer with two-stage microleverage mechanisms fabricated by SOI-MEMS technology
Reads0
Chats0
TLDR
In this article, a push-pull differential resonant accelerometer with double-ended-tuning-fork (DETF) as the inertial force sensor was designed and tested.Abstract:
We present the design, fabrication, and testing of a push-pull differential resonant accelerometer with double-ended-tuning-fork (DETF) as the inertial force sensor. The accelerometer is fabricated with the silicon-on-insulator microelectromechanical systems (MEMS) technology that bridges surface micromachining and bulk micromachining by integrating the 50-/spl mu/m-thick high-aspect ratio MEMS structure with the standard circuit foundry process. Two DETF resonators serve as the force sensor measuring the acceleration through a frequency shift caused by the inertial force acting as axial loading. Two-stage microleverage mechanisms with an amplification factor of 80 are designed for force amplification to increase the overall sensitivity to 160 Hz/g, which is confirmed by the experimental value of 158 Hz/g. Trans-resistance amplifiers are designed and integrated on the same chip for output signal amplification and processing. The 50-/spl mu/m thickness of the high-aspect ratio MEMS structure has no effect on the amplification factor of the mechanism but contributes to a greater capacitance force; therefore, the resonator can be actuated by a much lower ac voltage comparing to the 2-/spl mu/m-thick DETF resonators. The testing results agree with the designed sensitivity for static acceleration.read more
Citations
More filters
Journal ArticleDOI
A review on coupled MEMS resonators for sensing applications utilizing mode localization
Chun Zhao,Chun Zhao,Mohammad H. Montaseri,Graham S. Wood,Suan Hui Pu,Ashwin A. Seshia,Michael Kraft +6 more
TL;DR: In this article, the authors review a recent technology development based on coupled MEMS resonators that has the potential of fundamentally transforming MEMS Resonant sensors, including the mode localization effect.
Journal ArticleDOI
An Acceleration Sensing Method Based on the Mode Localization of Weakly Coupled Resonators
TL;DR: In this paper, an acceleration sensing method based on two weakly coupled resonators (WCRs) using the phenomenon of mode localization was reported. But the proposed mode localization with the differential perturbation method leads to a sensitivity enhancement of a factor of 2 than the common single perturbations method.
Journal ArticleDOI
A Resonant Microaccelerometer With High Sensitivity Operating in an Oscillating Circuit
Claudia Comi,Alberto Corigliano,Giacomo Langfelder,Antonio Francesco Longoni,Alessandro Tocchio,Barbara Simoni +5 more
TL;DR: In this article, a micromachined uniaxial silicon resonant accelerometer characterized by a high sensitivity and very small dimensions is presented, which is based on the frequency variations of two resonating beams coupled to a proof mass.
Inertial Navigation Sensors
TL;DR: In this paper, the authors describe the development of the MEMS sensor design and performance with a specific emphasis on the performance drivers and predictions of the future applications of the various sensor technologies.
Journal ArticleDOI
A microelectromechanically controlled cavity optomechanical sensing system
TL;DR: In this article, a cavity optomechanical structure was integrated into an actuated MEMS sensing platform to achieve high-quality-factor interferometric readout, electrical tuning of the optOMEchanical coupling by two orders of magnitude and a mechanical transfer function adjustable via feedback, achieving a displacement sensitivity of 4.6fmHz 1/2 with only 250nW optical power launched into the sensor.
References
More filters
Journal ArticleDOI
Laterally Driven Polysilicon Resonant Microstructures
TL;DR: In this article, a 2 μm-thick phosphorus-doped low-pressure chemical-vapor-deposited (LPCVD) polysilicon film was used for exciting the resonance.
Proceedings ArticleDOI
Laterally driven polysilicon resonant microstructures
TL;DR: In this article, interdigitated finger structures are used for electrostatically exciting the resonance of polysilicon microstructures parallel to the plane of the substrate, with frequencies ranging from 18 kHz to 80 kHz and quality factors from 20 to 130.
Journal ArticleDOI
Electrostatic-comb drive of lateral polysilicon resonators
TL;DR: In this paper, the authors investigate the effect of the finger gap on the capacitance of a capacitated capacitor (electrostatic comb) and find that it has a more pronounced effect on comb characteristics than finger width or length.
Journal ArticleDOI
A vacuum packaged surface micromachined resonant accelerometer
Ashwin A. Seshia,M. Palaniapan,T.A. Roessig,Roger T. Howe,R.W. Gooch,T.R. Schimert,S. Montague +6 more
TL;DR: In this paper, the authors describe the operation of a vacuum packaged resonant accelerometer subjected to static and dynamic acceleration testing and show that it exhibits a noise floor of 40 /spl mu/g/g//spl radic/(Hz) for an input acceleration frequency of 300 Hz.
Proceedings ArticleDOI
Capacitance Based Tunable Micromechanical Resonators
TL;DR: In this article, actuators were used to tune the resonant frequency of micromechanical oscillators, and the results showed that resonant oscillations from 7.7% to 146% of the original frequency can be achieved.