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A review on coupled MEMS resonators for sensing applications utilizing mode localization

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TLDR
In this article, the authors review a recent technology development based on coupled MEMS resonators that has the potential of fundamentally transforming MEMS Resonant sensors, including the mode localization effect.
Abstract
In this paper, we review a recent technology development based on coupled MEMS resonators that has the potential of fundamentally transforming MEMS resonant sensors. Conventionally MEMS resonant sensors use only a single resonator as the sensing element, and the output of the sensor is typically a frequency shift caused by the external stimulus altering the mechanical properties, i.e. the mass or stiffness, of the resonator. Recently, transduction techniques utilizing additional coupled resonators have emerged. The mode-localized resonant sensor is one example of such a technique. If the mode localization effect is utilized, the vibrational amplitude pattern of the resonators changes as a function of the quantity to be measured. Compared to using frequency shift as an output signal, the sensitivity can be improved by several orders of magnitude. Another feature of the mode-localized sensors is the common mode rejection abilities due to the differential structure. These advantages have opened doors for new sensors with unprecedented sensitivity.

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Supramolecular Luminescent Sensors

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Linear and nonlinear dynamics of micro and nano-resonators: Review of recent advances

TL;DR: An overview is presented of the various used dynamical approaches to enhance the sensitivity of resonators for sensing applications and analytical approaches that have been developed to better understand and investigate the dynamical behavior of M/NEMS resonators on the multiple time scales.
Journal ArticleDOI

A Closed-Loop Accelerometer Based on Three Degree-of-Freedom Weakly Coupled Resonator With Self-Elimination of Feedthrough Signal

TL;DR: In this paper, a closed-loop accelerometer based on three degree-of-freedom weakly coupled resonator (WCR) is reported, where the acceleration acts on the proof masses, the stiffness perturbation between the two outer resonators will incur the mode localization and cause the shift of amplitude ratio.
Journal ArticleDOI

Nonlinear couplings and energy transfers in micro- and nano-mechanical resonators: intermodal coupling, internal resonance and synchronization.

TL;DR: Recent research efforts to investigate the nonlinear coupling and energy transfers between multiple modes in micro/nano-mechanical resonators, focusing especially on intermodal coupling, internal resonance and synchronization are reviewed.
Journal ArticleDOI

Mass sensor using mode localization in two weakly coupled MEMS cantilevers with different lengths: Design and experimental model validation

TL;DR: In this article, a sensor using the mode localization phenomenon to detect a mass perturbation is presented, which is composed of two cantilevers with different lengths and connected by a coupling beam.
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