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Proceedings ArticleDOI

A versatile MEMS bimorph actuator with large vertical displacement and high resolution: Design and fabrication process

TL;DR: In this paper, the authors present design, simulation results and envisaged fabrication process for a versatile MEMS bimorph actuator with large out-of-plane displacement and high resolution.
Abstract: This paper presents design, simulation results and envisaged fabrication process for a versatile MEMS bimorph actuator with large out of plane displacement and high resolution. A comparative study of mechanical, thermal and electrical response of the micro-actuator is presented by using two well-known MEMS simulation tools. The bimorph structure measuring 700 × 1280 mm2 is fully integrable with CMOS fabrication process. It is indented for tunable filter applications where the precise vertical motion of the payload, the top metallic electrode anchored rigidly to bimorph ‘springs’ spans the vertical range of 250-300 microns with submicron resolution. Each bimorph spring resembles a hair pin structure and is composed of materials with large difference in thermal expansion coefficients e.g. electroplated gold and polysilicon for optimal out-of-the plane deflection. The novel structure can also be configured for analog micro-mirror based optical and IR spectroscopy applications by controlling the actuation bias and top electrode surface parameters.
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Proceedings ArticleDOI
15 Jun 2020
TL;DR: In this article, a 3D-complex MEMS-based micropositioning system with electrostatic comb drives with a converting mechanism is presented. But, the design of the system is limited to fabricating a 3-dimensional complex device.
Abstract: Micropositioning systems are widely used in many applications, for example, optical industry, medical devices, and micro-assembly applications. Commonly, MEMS-based micropositioning systems use conventional fabrication techniques such as lithography, etching, and thin-film processes. However, a typical microfabrication process by using the masking and etching operations is limited to fabricate a 3-dimensional complex device. This research presents a novel design of a 3D micropositioning system with electrostatic comb drives with a converting mechanism. The device can convert the in-plane motion to the out-of-plane displacement. The proposed model is possible by using FEMTOPRINT®, machine which combines material modification by femtosecond laser-beam and chemical wet etching. The results from the simulation shown that the 3Dcomplex micropositioning system can achieve a wide range of workspace up to 1$,212.79 \mu \mathrm{m}^{2}$. In X-axis and Z-axis, it can translate up to a maximum displacement of $33.34 \mu \mathrm{m}$ and $75.14 \mu \mathrm{m}$ respectively, while the footprint of the device is $1.65 \times 1.10$ mm2. This device can be a new prototype of MEMS based-micropositioning system named “glassy MEMS” that is suitable for a 3D-complex mechanism and can be used in many applications.

2 citations


Cites background from "A versatile MEMS bimorph actuator w..."

  • ...Nevertheless, the thermal actuator, especially bi-morph type, is also commonly used in the micropositioning that requires out-of-plane motion [9-10]....

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References
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Journal ArticleDOI
06 Jun 2004
TL;DR: In this paper, a unique concept for RF MEMS waveguide switches is introduced, which employs a ridge waveguide integrated with MEMS actuators and promises to be useful in high frequency applications 100-200 GHz.
Abstract: In this paper, a unique concept for RF MEMS waveguide switches is introduced. The proposed structure employs a ridge waveguide integrated with MEMS actuators. The switch combines the advantages of MEMS technology with the high power handling capability of waveguide technology. It also promises to be useful in high frequency applications 100-200 GHz. In order to demonstrate the concept, a Ku-band waveguide switch employing a thermally plastic deformable MEMS actuators has been fabricated and tested. The achievable measured results are very encouraging, demonstrating the potential of such novel type of MEMS switches.

24 citations

Proceedings ArticleDOI
17 Jun 2005
TL;DR: In this article, a novel approach for discrete frequency tuning of dielectric resonators based on electromechanical actuators such as MEMS is presented. But this approach is not suitable for high frequency applications.
Abstract: We present a novel approach for discrete frequency tuning of dielectric resonators based on electromechanical actuators such as MEMS. The concept is based on the intermodal coupling between the TE 01δ mode of a cylindrical dielectric resonator and radially arranged planar slotline resonators. The resonance frequency of the dielectric resonator is changed by switching a resistive load at the open end of each quarter wave slotline resonator leading to a variation of the coupling between the slotline resonator mode and the TE 01δ mode of the dielectric resonator. As the consequence the resonance frequency of the TE 01δ mode changes. Based on this novel tuning concept discrete tuning by 5 MHz in 0.25 MHz frequency steps was demonstrated for a test resonator at 2 GHz. The unloaded quality factor is about 10.000 and the measured switching time is about one millisecond.

6 citations