Active isolation of electronic micro-components with piezoelectrically transduced silicon MEMS devices
TL;DR: In this article, an active suspension system is developed between the support and the sensitive element to isolate the electronic card, either at the case level or at the card level or sensitive element level.
Abstract: Thin PZT films have a major interest for active control of mechanical structures. Precisely, it is an open field for the isolation of micro-components sensitive to dynamic effects. Indeed, the electronic components used, for example, in aircraft endure intense vibrations due to acceleration. These vibrations have some disturbing effects on the frequency stability and on the usable life of the electronic elements. The isolation of these elements becomes crucial to protect them from the vibrating environment. In order to manage this problem, it is advisable to isolate the electronic card either at the case level or at the card level or at the sensitive element level. The latter solution was chosen. Thus, we have direct access to the control electronics and the energy sources and the control energy is lower. An active suspension system is developed between the support and the sensitive element to be isolated. An original active suspension system is designed. Some modeling difficulties arise due to the existence of the inevitable bottom electrode common to the actuating layers and to the sensing layer.
Citations
More filters
TL;DR: In this article, the authors give an overview of the field, highlighting recent achievements, introduce operation principles, and describe some applications, including RF filters in mobile phones working on the principle of standing thickness waves in AlN films.
Abstract: Piezoelectric materials play a crucial role in a large number of devices and applications modern society would not like to miss. Mobile phones and ultrasonic imaging are just the most prominent ones. Since two decades, miniaturization of mechanical devices in silicon technology is a major research direction in engineering known under name of MEMS, which stands for micro-electro-mechanical systems. Piezoelectricity fits very well into this concept and was expected right from the beginning to play its role in MEMS. The breakthrough was made with RF filters in mobile phones working on the principle of standing thickness waves in AlN films. What counts here is acoustic quality and stability. The force champion among piezoelectric thin film materials, Pb(Zr,Ti)O3 gave more problems in processing, and requires more patience to meet requirements and needs for a mass applications. It seems, however, that the breakthrough is imminent. This article attempts to give an overview of the field, highlighting recent achievements, introduce operation principles, and describe some applications.
285 citations
TL;DR: In this article, the impact of composition, orientation, and microstructure on the piezoelectric properties of perovskite thin films such as PbZr1−xTixO3 (PZT) is reviewed.
Abstract: Piezoelectric microelectromechanical systems (MEMS) offer the opportunity for high-sensitivity sensors and large displacement, low-voltage actuators. In particular, recent advances in the deposition of perovskite thin films point to a generation of MEMS devices capable of large displacements at complementary metal oxide semiconductor-compatible voltage levels. Moreover, if the devices are mounted in mechanically noisy environments, they also can be used for energy harvesting. Key to all of these applications is the ability to obtain high piezoelectric coefficients and retain these coefficients throughout the microfabrication process. This article will review the impact of composition, orientation, and microstructure on the piezoelectric properties of perovskite thin films such as PbZr1−xTixO3 (PZT). Superior piezoelectric coefficients (e31, f of −18 C/m2) are achieved in {001}-oriented PbZr0.52Ti0.48O3 films with improved compositional homogeneity on Si substrates. The advent of such high piezoelectric responses in films opens up a wide variety of possible applications. A few examples of these, including low-voltage radio frequency MEMS switches and resonators, actuators for millimeter-scale robotics, droplet ejectors, energy scavengers for unattended sensors, and medical imaging transducers, will be discussed.
282 citations
Abstract: This article proposes a new, simple, and efficient strategy, allowing one to optimize the diffusion operator between a passive beam coupled to a like beam equipped with a periodically distributed network of shunted piezoelectric patch actuators. A multimodal wave dispersion model is used to compute the diffusion operator and analyze the stability properties of the combined system. Based on this mathematical tool, specific optimization procedures are introduced to allow maximization or minimization of the wave transmissibility between the passive and the active distributed beam. A specific example is used to demonstrate the capability of the shunted piezoelectric system to induce total reflection through the total absorption of incoming propagating flexural waves while guaranteeing the stability, robustness, and realizability of such a system.
73 citations
Cites background from "Active isolation of electronic micr..."
...We know today that the mechanical integration of active smart materials, electronics, chip sets, and power supply systems is possible for the next generation of smart ‘composite’ structures (Collet et al., 2003, 2004; Varadan et al., 2004; Meyer et al., 2007)....
[...]
Dissertation•
01 Jan 2009
TL;DR: Yoon et al. as mentioned in this paper developed generic technologies that protect micro-systems against external mechanical disturbances including vibration and shock using nonlinear springs and soft coatings, which can be integrated with nonlinear spring (silicon) stops and soft coating (Parylene) stops.
Abstract: External mechanical disturbances including vibration and shock have profound impact on the performance and reliability of MEMS devices. This project seeks to develop generic technologies that protect microsystems against them. Vibration produces undesirable outputs that cannot be corrected with electronics. Tuning fork gyroscopes (TFG), which are known to be relatively immune to linear vibrations, cannot completely eliminate linear vibrations in several special situations. Simulations were conducted using two commonly used TFG designs. Both designs have decoupled sense and drive masses; however, one is anchored at its sense mass (Type-A), whereas the other is anchored at its drive mass (Type-B). The results demonstrate that both designs are affected by linear vibrations. However, Type-B design is more resistant to vibration-induced errors than Type-A (>99% reduction). Shock permanently damages MEMS devices and hard shock stops have been conventionally used to limit the damage. However, hard stops can generate subsequent impacts, which should also be minimized. This goal can be achieved by two novel shock protection technologies using nonlinear springs and soft coatings. Devices integrated with nonlinear spring (silicon) stops and soft coating (Parylene) stops were fabricated and tested together with hard-stop devices. Test results show that both stops provide superior shock protection. The device survival rates of nonlinear spring stops (87%) and soft coating stops (94%) are more than 10x better than hard stops (4%). This project is supported by the Defense Advanced Research Projects Agency HERMIT program under contract number W31P4Q-04-1-R001. Sang Won Yoon, Sangwoo Lee, Noel C. Perkins, and Khalil Najafi
46 citations
TL;DR: In this article, a simple and efficient approach is proposed to reduce and construct piezoelectric super elements guaranteeing an accurate representation of the electrical impedance without the need for static correction.
Abstract: This article proposes a new, simple and efficient approach, allowing one to reduce and construct piezoelectric super elements guaranteeing an accurate representation of the electrical impedance without the need for static correction. This allows the electronic coupling to be fully addressed in the optimization of passive shunted piezoelectric transducers, energy harvesting piezoelectric systems or dense distributed transducers. The model obtained through this approach is also versatile, of small size, and is therefore quite tractable for use in intensive computation algorithms. Two example systems are used to demonstrate the numerical accuracy and convergence properties of the proposed approach.
30 citations
Cites background from "Active isolation of electronic micr..."
...The growing attention to smart distributed structures (Vidoli, 2001) and MEMS piezoelectric systems (Collet and Delobelle, 2004; Meyer and Verdot, 2007) requires new modeling approaches guaranteeing robust representation of electromechanical coupling, especially for piezoelectricity....
[...]
References
More filters
TL;DR: In this paper, a piezoelectric laminate theory that uses the piezelectric phenomenon to effect distributed control and sensing of bending, torsion, shearing, shrinking, and stretching of a flexible plate has been developed.
Abstract: A piezoelectric laminate theory that uses the piezoelectric phenomenon to effect distributed control and sensing of bending, torsion, shearing, shrinking, and stretching of a flexible plate has been developed. This newly developed theory is capable of modeling the electromechanical (actuating) and mechanoelectrical (sensing) behavior of a laminate. Emphasis is on the rigorous formulation of distributed piezoelectric sensors and actuators. The reciprocal relationship of the piezoelectric sensors and actuators is also unveiled. Generalized functions are introduced to disclose the physical concept of these piezoelectric sensors and actuators. It is found that the reciprocal relationship is a generic feature of all piezoelectric laminates.
654 citations
Book•
14 Mar 2014
TL;DR: In this article, the authors present a detailed analysis of the structural dynamics of an active versus passive control system in a single-input, single-output (SISO) spacecraft.
Abstract: Preface to the third edition- Preface to the second edition- Preface to the first edition- 1 Introduction- 11 Active versus passive- 12 Vibration suppression- 13 Smart materials and structures- 14 Control strategies- 141 Feedback- 142 Feedforward- 15 The various steps of the design- 16 Plant description, error and control budget- 17 Readership and Organization of the book- 18 References- 19 Problems- 2 Some concepts in structural dynamics- 21 Introduction- 22 Equation of motion of a discrete system- 23 Vibration modes- 24 Modal decomposition- 241 Structure without rigid body modes- 242 Dynamic flexibility matrix- 243 Structure with rigid body modes- 244 Example- 25 Collocated control system- 251 Transmission zeros and constrained system- 26 Continuous structures- 27 Guyan reduction- 28 Craig-Bampton reduction- 29 References- 210 Problems- 3 Electromagnetic and piezoelectric transducers- 31 Introduction- 32 Voice coil transducer- 321 Proof-mass actuator- 322 Geophone- 33 General electromechanical transducer- 331 Constitutive equations- 332 Self-sensing- 34 Reaction wheels and gyrostabilizers- 35 Smart materials- 36 Piezoelectric transducer- 361 Constitutive relations of a discrete transducer- 362 Interpretation of k2- 363 Admittance of the piezoelectric transducer- 37 References- 38 Problems- 4 Piezoelectric beam, plate and truss- 41 Piezoelectric material- 411 Constitutive relations- 412 Coenergy density function- 42 Hamilton's principle- 43 Piezoelectric beam actuator- 431 Hamilton's principle- 432 Piezoelectric loads- 44 Laminar sensor- 441 Current and charge amplifiers- 442 Distributed sensor output- 443 Charge amplifier dynamics- 45 Spatial modalfilters- 451 Modal actuator- 452 Modal sensor- 46 Active beam with collocated actuator-sensor- 461 Frequency response function- 462 Pole-zero pattern- 463 Modal truncation- 47 Admittance of a beam with a piezoelectric patch- 48 Piezoelectric laminate- 481 Two dimensional constitutive equations- 482 Kirchhoff theory- 483 Stiffness matrix of a multi-layer elastic laminate- 484 Multi-layer laminate with a piezoelectric layer- 485 Equivalent piezoelectric loads- 486 Sensor output- 487 Beam model vs plate model- 488 Additional remarks- 49 Active truss- 491 Open-loop transfer function- 492 Admittance function- 410 Finite element formulation- 411 References- 412 Problems- 5 Passive damping with piezoelectric transducers- 51 Introduction- 52 Resistive shunting- 53 Inductive shunting- 54 Switched shunt- 541 Equivalent damping ratio- 55 References- 56 Problems- 6 Collocated versus non-collocated control- 61 Introduction- 62 Pole-zero flipping- 63 The two-mass problem- 631 Collocated control- 632 Non-collocated control- 64 Notch filter- 65 Effect of pole-zero flipping on the Bode plots- 66 Nearly collocated control system- 67 Non-collocated control systems- 68 The role of damping- 69 References- 610 Problems - 7 Active damping with collocated system- 71 Introduction- 72 Lead control- 73 Direct velocity feedback (DVF)- 74 Positive Position Feedback (PPF)- 75 Integral Force Feedback(IFF)- 76 Duality between the Lead and the IFF controllers- 761 Root-locus of a single mode- 762 Open-loop poles and zeros- 77 Actuator and sensor dynamics- 78 Decentralized control with collocated pairs- 781 Cross talk- 782 Force actuator and displacement sensor- 783 Displacement actuator and force sensor- 79 References- 710 Problems- 8 Vibration isolation- 81 Introduction- 82 Relaxation isolator- 821 Electromagnetic realization- 83 Active isolation- 831 Sky-hook damper- 832 Integral Force Feedback- 84 Flexible body- 841 Free-free beam with isolator- 85 Payload isolation in spacecraft- 851 Interaction isolator/attitude control- 852 Gough-Stewart platform- 86 Six-axis isolator- 861 Relaxation isolator- 862 Integral Force Feedback- 863 Spherical joints, modal spread- 87 Active vs passive- 88 Car suspension- 89 References- 810 Problems- 9 State space approach- 91 Introduction- 92 State space description- 921 Single degree of freedom oscillator- 922 Flexible structure- 923 Inverted pendulum- 93 System transfer function- 931 Poles and zeros- 94 Pole placement by state feedback- 941 Example: oscillator- 95 Linear Quadratic Regulator- 951 Symmetric root locus- 952 Inverted pendulum- 96 Observer design- 97 Kalman Filter- 971 Inverted pendulum- 98 Reduced order observer- 981 Oscillator- 982 Inverted pendulum- 99 Separation principle- 910 Transfer function of the compensator- 9101 The two-mass problem- 911 References- 912 Problems- 10 Analysis and synthesis in the frequency domain- 101 Gain and phase margins- 102 Nyquist criterion- 1021 Cauchy's principle- 1022 Nyquist stability criterion- 103 Nichols chart- 104 Feedback specification for SISO systems- 1041 Sensitivity- 1042 Tracking error- 1043 Performance specification- 1044 Unstructured uncertainty- 1045 Robust performance and robust stability- 105 Bode gain-phase relationships- 106 The Bode Ideal Cutoff- 107 Non-minimum phase systems- 108 Usual compensators- 1081 System type- 1082 Lead compensator- 1083 PI compensator- 1084 Lag compensator- 1085 PID compensator- 109 Multivariable systems- 1091 Performance specification- 1092 Small gain theorem- 1093 Stability robustness tests- 1094 Residual dynamics- 1010References- 1011Problems- 11 Optimal control- 111 Introduction- 112 Quadratic integral- 113 Deterministic LQR- 114 Stochastic response to a white noise- 1141 Remark- 115 Stochastic LQR- 116 Asymptotic behavior of the closed-loop- 117 Prescribed degree of stability- 118 Gain and phase margins of the LQR- 119 Full state observer- 1191 Covariance of the reconstruction error- 1110Kalman-Bucy Filter (KBF)- 1111Linear Quadratic Gaussian (LQG)- 1112Duality- 1113Spillover- 11131Spillover reduction- 1114Loop Transfer Recovery (LTR)- 1115Integral control with state feedback- 1116Frequency shaping- 11161Frequency-shaped cost functionals- 11162Noise model - 1117References- 1118Problems- 12 Controllability and Observability- 121 Introduction- 1211 Definitions- 122 Controllability and observability matrices- 123 Examples- 1231 Cart with two inverted pendulums- 1232 Double inverted pendulum- 1233 Two dof oscillator- 124 State transformation- 1241 Control canonical form- 1242 Left and right eigenvectors- 1243 Diagonal form- 125 PBH test- 126 Residues- 127 Example- 128 Sensitivity- 129 Controllability and observability Gramians- 1210Internally balanced coordinates- 1211Model reduction- 12111Transfer equivalent realization- 12112Internally balanced realization- 12113Example- 1212References- 1213Problems- 13 Stability- 131 Introduction- 1311 Phase portrait- 132 Linear systems- 1321 Routh-Hurwitz criterion- 133 Lyapunov's direct method- 1331 Introductory example- 1332 Stability theorem- 1333 Asymptotic stability theorem- 1334 Lasalle's theorem- 1335 Geometric interpretation- 1336 Instability theorem- 134 Lyapunov functions for linear systems- 135 Lyapunov's indirect method - 136 An application to controller design- 137 Energy absorbing controls- 138 References- 139 Problems- 14 Applications- 141 Digital implementation- 1411 Sampling, aliasing and prefiltering- 1412 Zero-order hold, computational delay- 1413 Quantization- 1414 Discretization of a continuous controller- 142 Active damping of a truss structure- 1421 Actuator placement- 1422 Implementation, experimental results- 143 Active damping generic interface- 1431 Active damping- 1432 Experiment- 1433 Pointing and position control- 144 Active damping of a plate- 1441 Control design- 145 Active damping of a stiff beam- 1451 System design- 146 The HAC/LAC strategy- 1461 Wide-band position control- 1462 Compensator design- 1463 Results- 147 Vibroacoustics: Volume displacement sensors- 1471 QWSIS sensor- 1472 Discrete array sensor- 1473 Spatial aliasing- 1474 Distributed sensor- 148 References- 149 Problems- 5 Tendon Control of Cable Structures- 151 Introduction- 152 Tendon control of strings and cables- 153 Active damping strategy- 154 Basic Experiment- 155 Linear theory of decentralized active damping- 156 Guyed truss experiment- 157 Micro Precision Interferometer testbed- 158 Free floating truss experiment- 159 Application to cable-stayed bridges- 1510Laboratory experiment- 1511Control of parametric resonance- 1512Large scale experiment- 1513 References- 16 Active Control of Large Telescopes- 161 Introduction- 162 Adaptive optics- 163 Active optics- 1631 Monolithic primary mirror- 1632 Segmented primary mirror- 164 SVD controller- 1641 Loop shaping of the SVD controller- 165 Dynamics of a segmented mirror- 166 Control-structure interaction- 1661 Multiplicative uncertainty- 1662 Additive uncertainty- 1663 Discussion- 167 References- 17 Semi-active control- 171 Introduction- 172 Magneto-rheological fluids- 173 MR devices- 174 Semi-active suspension- 1741 Semi-active devices- 175 Narrow-band disturbance- 1751 Quarter-car semi-active suspension- 176 References- 177 Problems- Bibliography- Index
647 citations
Book•
01 Jan 1996
TL;DR: In this article, the authors present a survey of the well-posedness of Abstract Structural Models, including Shells, Plates and Beams, and their application in smart materials technology and control applications.
Abstract: Smart Materials Technology and Control Applications. Modeling Aspects of Shells, Plates and Beams. Patch Contributions to Structural Equations. Well-Posedness of Abstract Structural Models. Estimation of Parameters and Inverse Problems. Damage Detection in Smart Material Structures. Infinite Dimensional Control and Galerkin Approximation. Implementation of Finite-Dimensional Compensators. Modeling and Control in Coupled Systems. Bibliography. Notation. Index.
391 citations
TL;DR: In this paper, the effective transverse piezoelectric coefficient e(31,f) of sol-gel processed films was investigated as a function of composition, film texture and film thickness.
Abstract: Pb(Zr-x, Ti1-x)O-3 (PZT) piezoelectric thin films are of major interest in MEMS technology for their ability to provide electro-mechanical coupling. In this work, the effective transverse piezoelectric coefficient e(31,f) of sol-gel processed films was investigated as a function of composition, film texture and film thickness. Dense, textured and crack-free PZT films have been obtained on silicon substrates up to a thickness of 4 mum. Crystallization anneals have been performed for every 0.25 mum. Nucleation on the previous perovskite layer combined with directional growth leads to a gradient of the compositional parameter x of +/-20% (at x = 0.53 average composition). Best properties have been achieved with {100}-textured film of x = 0.53 composition. Large remanent e(31,f) values of -11 to -12 C/m(2) have been obtained in the whole thickness range of 1-4 mum. These values are superior to values of undoped bulk ceramics, but smaller than in current, optimized (doped) bulk PZT. (C) 2003 Elsevier Science B.V. All rights reserved.
370 citations
TL;DR: In this article, a set of piezopolymer devices based on a composite laminate theory for piezoelectric polymer materials was developed, which exhibited both bending and torsion deformation under an applied electric field.
Abstract: A set of piezopolymer devices has been developed based on a composite laminate theory for piezoelectric polymer materials. By using different combinations of ply angles and electrode patterns, a piezopolymer/metal shim plate structure was built that exhibited both bending and torsion deformation under an applied electric field. A set of torsion‐beam sensor structures was also built that could distinguish between bending and torsion or between different vibration modes. These devices were based on a general theory of piezoelectric laminates. The experimental results agreed quite closely with the theoretical predictions. These integrated sensor–actuator devices may find application in the control of microactuators or may be used for modal control of larger continuous structures.
206 citations