scispace - formally typeset
Search or ask a question
Journal ArticleDOI

An updated roadmap for the integration of metal–organic frameworks with electronic devices and chemical sensors

TL;DR: This review highlights the research aimed at the implementation of MOFs as an integral part of solid-state microelectronics and discusses the fundamental and applied aspects of this two-pronged approach.
Abstract: Metal-organic frameworks (MOFs) are typically highlighted for their potential application in gas storage, separations and catalysis. In contrast, the unique prospects these porous and crystalline materials offer for application in electronic devices, although actively developed, are often underexposed. This review highlights the research aimed at the implementation of MOFs as an integral part of solid-state microelectronics. Manufacturing these devices will critically depend on the compatibility of MOFs with existing fabrication protocols and predominant standards. Therefore, it is important to focus in parallel on a fundamental understanding of the distinguishing properties of MOFs and eliminating fabrication-related obstacles for integration. The latter implies a shift from the microcrystalline powder synthesis in chemistry labs, towards film deposition and processing in a cleanroom environment. Both the fundamental and applied aspects of this two-pronged approach are discussed. Critical directions for future research are proposed in an updated high-level roadmap to stimulate the next steps towards MOF-based microelectronics within the community.

Summary (7 min read)

1. Introduction

  • The structure and dynamics of matter at the nanometer scale form the basis for both natural processes and technological applications.
  • His research interests include solvent-free and gas-phase synthesis of metal– organic frameworks, host–guest properties and fabrication of functional nanoporous structures such as thin films, patterns and devices.
  • The enormous success of electronic devices has mainly been enabled by low-cost production through scalable ‘‘CMOS’’ microfabrication (CMOS = complementary metal-oxide–semiconductor).
  • Therefore, it is important that research efforts focus in parallel on a fundamental understanding of the distinguishing properties of MOFs and eliminating fabrication-related obstacles for integration.

2. Fundamental MOF properties

  • A crucial requirement for designing and fabricating electronic devices incorporating MOFs is knowledge of their basic charge transport, photonic, and magnetic properties.
  • Compared to established materials such as silicon and organic semiconductors, little is known about MOFs.
  • The authors intention here is not to exhaustively cover the same ground, but rather to discuss recent milestones that highlight progress and to identify opportunities and critical needs for advancing the field.
  • Relevant review articles for further reading will be cited where applicable.
  • Following the structure of the first-generation roadmap, in this section the authors update the status of charge transport, optical, and light generation.

2.1 Electronic conductivity

  • The ability to conduct electrical charge is perhaps the most important and also least explored property of MOFs to developing them as active materials in electronic devices.
  • These issues are reviewed elsewhere,8,26 but it suffices to say that control of morphology is essential and that versatile synthetic approaches are needed to fully understand intrinsic vs. defect- or grain boundary-controlled conductivity of MOFs.
  • The conductivity displays a temperature dependence with a relatively large activation energy of 0.49 eV, suggesting a weak hopping mechanism in a material with relatively little band dispersion.
  • 54,55 Nevertheless, as will be discussed below, the number of MOFs for which the band structure has been predicted has grown considerably.
  • 68 As discussed above, Foster et al. proposed a different strategy to achieve semiconducting behavior in this structure, substituting Cr(III) ions for Ni(II) and inserting pillar ligands between the two dimensional sheets.

2.2 Ionic conductivity

  • Ion conduction is a critical aspect in many energy storage and -conversion devices, for instance Li(I) and proton transport in Li-ion batteries and many fuel cell types, respectively.
  • Cointegration of power functions directly on microelectronic chips is currently attracting a lot of interest for application in self-powered electronics such as portables, wearables and implants.
  • Either type of mechanism can be dominant in the different proton introduction strategies.
  • While most of the proton-conducting frameworks require hydration, several promising strategies have been developed for anhydrous proton transport in MOFs.
  • 88 Conduction of larger and/or multivalent metal ions imposes more challenging requirements on the development of solid electrolytes, for instance in charge compensation along the conduction path.

2.3 Energy harvesting and emission

  • The hybrid organic–inorganic structure of MOFs provides numerous opportunities for light harvesting and tuning energy transport.
  • Long hopping distances have been reported in porphyrin- and BODIPY-based MOFs as well,108,109 suggesting that the ordered crystalline structure of MOFs is a key advantage.
  • Besides PV applications, the designer nature of MOFs offers opportunities in light emission as well.
  • A low density of electrically active defects and high charge mobility are also essential for an efficient LED so that injected holes and electrons can penetrate the emitting layer(s) and recombine to form excitons with minimal non-radiative recombination.

2.4 Magnetic properties

  • The presence of open-shell metal centers can impart magnetic properties in MOFs.
  • Several reviews discussed such structure– property relationships and the magnetic changes that occur in response to different chemical and physical stimuli.
  • While initial spin crossover studies focused primarily on small, polar molecules, the range of guest species targeted now spans an array of solvent and gas molecules, including halogens and aromatic species.
  • Molecular modeling is playing an increasingly important role in elucidating the underlying principles governing the spin crossover response, with recent studies of the Fe[Pt(CN)4] framework providing valuable insight into the origin of its guestmodulated behavior.

2.5 Dielectric properties

  • The charge carriers of nonconductive materials, by definition, cannot move freely along the direction of electric fields.
  • Currently, a few cases have been reported that can be considered particularly promising.
  • The gate dielectric of a downsized microprocessor FET needs to be high-k, particularly when fast switching and low leakage is required.

3. Microfabrication and current state of MOF processing

  • The practical application of functional materials in devices requires synthesis methods that provide control over properties and morphology.
  • In addition to performance, durability and cost as criteria to assess a material, processability and compatibility with all fabrication steps is key.
  • The latter includes thin film deposition and patterning, templating uses of MOFs and mechanical thin film behavior to illustrate the importance of implementation-related engineering and its relation with fundamental materials properties.
  • Note that a generalized description of microfabrication is inevitably an oversimplification, and that production routes different from the example of CMOS technology are utilized in specific areas such as large-area electronics, low-cost devices on plastics, etc.

3.1 Microfabrication: key characteristics and processing steps

  • CMOS production of integrated circuits (ICs, chips) is an excellent example of cost-effective industrial microfabrication as its persistent progress enabled modern information technology.
  • Among a wide range of film growth techniques, vapor phase depositions are typically the process of choice, particularly for inorganics.
  • Basically, in this fabrication step the computer-assisted design of the device is transferred to the physical reality.
  • After selective removal of the photoresist, the functional material is patterned through etching.

3.2 Depositing and patterning MOF thin films

  • The first step toward the fabrication of devices requires the deposition of MOF films, with control over composition, homogeneity, thickness, roughness and ideally crystal orientation.
  • Highlighting the most relevant progress and the conceptual differences.
  • As the contact between ligand and inorganic is required, the process is limited by the diffusion of precursors through the MOF film.
  • When solvothermally converting patterned precursors, particular care should be taken to match dissolution and MOF crystallization.
  • This method most clearly offers opportunities for the deposition of relatively thick films (e.g. 20 mm ZIF-8 films).

3.3 Other fabrication uses of MOFs

  • The authors review other types of templating, shown schematically in Fig. 14.
  • Alternatively, a pre-synthesized nanostructure can be encapsulated by assembling the MOF around it (Fig. 14b).
  • It has been demonstrated that the MOF structure and geometry can be used to control the size and orientation of nanoparticles or nanowires over a range inaccessible via traditional templating.
  • One advantage of this approach over the infiltration-reaction route is that it is a simple one-pot procedure.
  • By pyrolysis of a suitable transition metal MOF (e.g. ZIF-67), it is therefore possible to generate a porous carbon matrix with embedded metal oxide particles (e.g. Co3O4) with the same composition as used in batteries.

3.4 Mechanical properties of MOF thin films

  • The measurement, understanding and alteration of mechanical properties of functional materials is of critical importance in the context of miniaturized devices as mechanical loading (e.g. bending, torsion, compression) is practically unavoidable, during microfabrication, back-end processing or real-world operation.
  • MOFs often exhibit ‘‘anomalous’’ mechanical behavior related to their structural flexibility and the diverse chemical interactions that can take place within the pores.
  • Wöll and co-workers observed an elastic modulus (9.3 GPa) and hardness (0.23 GPa) for {100} oriented LPE HKUST-1 thin films,309 which closely matched with computed values.
  • This large CTE mismatch between a MOF thin film and its substrate could lead to film cracking or delamination.

4. Case studies of MOFs in electronic devices

  • Following publication of the first roadmap in 2011, several milestones in MOF-based devices have been realized, as well as important progress in this direction.
  • MOF-enabled sensing continues to be a particularly active area of research and has been thoroughly reviewed,335 most recently in 2014.93.
  • In contrast to previous overviews of this area, recent progress allows us to adhere more strictly to the definition of an electronic device, which shifts the focus from chemistry- to more engineering-focused.
  • Such as changes in color or luminescence upon uptake of chemical species, the authors do not consider these devices.
  • The case studies the authors picked serve to highlight the diversity of roles MOFs can play in electronic devices, a versatility that stems directly from the range of properties discussed in Section 2.

4.1 Digital circuits

  • Digital circuits are broad group of devices for processing and storage of logic signals (signal/ground voltage = ON/OFF).
  • The thin films were transferred to a prefabricated device structure to form BG–BC FETs.
  • The observed mobility is competitive with state-of-the-art solution-processed organic and inorganic semiconductors, a remarkable feature for a material that consists for a significant part of empty pore space.
  • When characterized as memristors at moderate voltages ( 1–2.5 V), the cells showed a relatively large sample-tosample distribution of the high and low resistance states, but consistently with a very large ON/OFF ratio of 107.
  • The mechanism of resistance switching relies on the reversible formation of silver ions at the silver electrode.

4.2 Chemical sensors

  • Chemical sensors are devices that respond to changes in analyte concentration and transduce this information as electrical signals.
  • Improvements in terms of performance, size and cost would open up a range of new opportunities for chemical sensors.
  • Note that actual sensor performance can be highly dependent upon additional factors such as the substrate thickness, sensor exposure conditions, and physical properties (thickness, uniformity, adhesion) of the thin film Device Operating frequency (MHz) Mass detection limit (ng) Microcantilever B0.02–5 B0.01 Microcantilever strain gauge N/A 10 6 Quartz crystal microbalance B5–30 B1 Surface acoustic wave sensor B20–500 B0.1 analyte.
  • Chemical sensors operating through analyte-induced electrical conductance variation are often analyzed through monitoring of the direct current (DC) that flow through the element at a constant biasing voltage (i.e. conductometry).
  • Much improved responses may be expected for MOFs that can maintain their crystallinity and porosity upon exposure to the analyte.

5. Challenges and perspectives: an updated roadmap

  • As stated in the introduction, the large and growing interest in MOF materials stems from a desire to better understand and design matter at the atomic scale.
  • At this level, where the boundaries between chemistry and materials science blur, the well-controlled and ordered environment offered by selfassembled crystalline solids enables a range of novel properties.
  • Such work is currently in a proof-ofconcept stage.
  • To further mature and pinpoint actual requirements, the developed concepts need to find their way into other scientific communities, ranging from solid-state physicists to electronic engineers and hardware specialists.
  • The purpose of the current update is to highlight the significant progress as well as remaining challenges, to stimulate reflection within the community and raise awareness within other fields.

MOF as electronic conductors

  • In the past few years, significant progress has been made in the synthesis of conductive MOFs.
  • In contrast to purely inorganic or organic conductors such as MoS2 or graphene, which do not easily lend themselves to chemical functionalization, the electronic properties of MOFs can be tuned by chemically altering the linker, metal ion or guest species adsorbed in the pore space.
  • 14,336 the potential offered by porous crystalline (semi)conductors is clear.
  • The increasing number of conductive MOFs also highlights the challenge of accurately determining their properties, especially for the more conductive ones.
  • Such data are available from single-crystal measurements, although care should be taken how to attach electrodes.

MOFs as ionic conductors

  • An intensive search for solid electrolytes is ongoing, mainly for energy storage and conversion devices, but as well for electrochemical sensors and ionic transistors.
  • As these species are small and relatively mobile, the risk for failure through evaporation or diffusion to and reaction at the electrodes is not completely eliminated.
  • Also in this case, rational design through the host– guest chemistry of MOFs can generate entirely solvent-free solid electrolyte materials, for instance through the inclusion of polymer chains from a melt or via in-pore polymerization.
  • Another approach that perhaps surprisingly has not yet been explored for metal ion conduction is the covalent anchoring of solvent-like moieties to the framework.
  • If this is not the case, the ionic mobility measured by impedance spectroscopy represents a combined cation and anion mobility.

Optoelectronics

  • Significant progress has been made in exploiting the hybrid organic–inorganic structure of MOFs for energy harvesting.
  • The crystalline organization of porphyrin entities in a Zn(II) framework resulted in the formation of what may be an indirect bad gap semiconductor with efficient photocarrier generation.
  • In addition to fine-tuning light absorption, the regular organization of dyes in the pores of the crystalline solid can create novel guest@MOF emission properties.

Dielectrics

  • Studies on the use of MOFs as both low- and high-k materials show clear potential but also indicate that a fundamental understanding of the factors contributing to the k and the chemical concepts for their tunability are largely unexplored.
  • From the limited data available, it is clear that to achieve a low-k MOF, ligands with fewer polar functional groups and less-polarized bonds can be introduced.
  • As empty space has the lowest possible dielectric constant, increasing the MOF pore size will further decrease the k value.
  • Importantly, very few papers report on the functional testing of integrated MOF dielectrics.
  • Organic–inorganic dielectric hybrids such as ceramic–polymer composites, are receiving a lot of attention e.g. for application in low-loss dielectric resonators for wireless communication.

Mechanical properties

  • In MOF-based electronic devices, mechanical properties will play a role at the level of both the MOF and the device characteristics.
  • The former aspect is considered more ‘‘fundamental’’ and received more attention.
  • As already highlighted in Section 4.2, these data will be crucial in interfacing MOFs with oscillating mass-sensitive devices, for which stiffer materials and tailorability is desirable.
  • This research trend is also reflected in the increasing attention for ‘‘molecular layer deposition’’ (MLD) processes, used in an analogous way to ALD to deposit hybrid coatings.
  • In addition, this approach could open up opportunities to modulate the electronic structure of MOFs through the introduction of mechanical stress and strain.

Property modeling

  • To design MOF-based electronics, in silico modeling will become an increasingly important tool, in the first place to understand and predict fundamental material properties.
  • Specific challenges are abound in each of the above sections.
  • The determination of the band gap and type (direct vs. indirect) has important implications for photovoltaics as well as the general use of MOFs as semiconductors.
  • Since machine-learning tools show an ability to offer insight beyond the ability of human chemical intuition, they could become valuable and widespread screening tools for the MOF community.
  • Previously, the ComputationReady Experimental MOF (CoRE MOF) database was already released by an independent group authors, comprising over 4700 MOF structures from the Cambridge Structural Database for which solvent molecules, partially occupied and disordered atoms were removed.

Thin films and fabrication

  • As is clear from the discussion in the previous sections, reliable methods to deposit uniform and defect-free MOF films will form the basis for microelectronic device fabrication.
  • Such single-crystalline domains would be a remarkable achievement with practical implications for device fabrication.
  • It is not unlikely that currently other properties and functions are obscured by sub-optimal thin film deposition methods.

Chemical sensors

  • As is clear from the case study in Section 4.2, chemical sensing is receiving a lot of research attention and might be the first discussed area to shift from the proof-of-concept to the development stage.
  • Currently, the main barrier to progress is finding the right combination of MOF material and transduction mechanism for a certain analyte.
  • Also in this case, highthroughput computational screening coupled to a detailed understanding of how host–guest interactions are transduced could be a valuable aid.
  • In mass-based sensing, QCM and SAW are the most developed acoustic wave sensors.
  • In chemical sensors, MOFs are ideally suitable to fulfil other roles than the active sensing layer as well.

Valorization perspectives

  • Practical applicability should not be the sole guidance of scientific explorations.
  • Examples include the applications highlighted herein, as well as other opportunities in the biomedical field, optical coatings, etc.
  • Any demonstration of commercial viability will lead to increased interest from different domains.
  • It is clear that many opportunities remain to bring the fascinating properties of MOFs stemming from their nanoscale organization into real-world applications.

General concepts

  • AC Alternating current ALD Atomic layer deposition BC–BG Bottom contact, bottom gate (FET geometry) BG–BC Bottom gate, bottom contact (FET geometry) BHJ Bulk heterojunction CB Conduction band CHEMFET.
  • Chemically sensitive field effect transistor CMOS Complementary metal-oxide–semiconductor (fabrication platform) CMP Chemical-mechanical planarization or polishing CPD Contact potential difference CTE Coefficient of thermal expansion CVD Chemical vapor deposition DBA Donor–bridge–acceptor DC Direct current DFT.
  • Density functional theory DSSC Dye-sensitized solar cell FET Field effect transistor FRET Fluorescence resonance energy transfer GGA Generalized gradient approximation HOMO.
  • Top gate, bottom contact (FET geometry) VB Valence band VOC Volatile organic compound.

Did you find this useful? Give us your feedback

Figures (33)

Content maybe subject to copyright    Report

An updated roadmap for the integration of metal–organic
frameworks with electronic devices and chemical sensors
Ivo Stassen,
ab
Nicholas Burtch,
c
Alec Talin,
c
Paolo Falcaro,
de
Mark Allendorf
c
and Rob Ameloot *
a
Metal–organic frameworks (MOFs) are typically highlighted for their potential application in gas storage, separations and catalysis. In
contrast, the unique prospects these porous and crystalline materials offer for application in electronic devices, although actively
developed, are often underexposed. This review highlights the research aimed at the implementation of MOFs as an integral
part of solid-state microelectronics. Manufacturing these devices will critically depend on the compatibility of MOFs with existing
fabrication protocols and predominant standards. Therefore, it is important to focus in parallel on a fundamental understanding of the
distinguishing properties of MOFs and eliminating fabrication-related obstacles for integration. The latter implies a shift from the
microcrystalline powder synthesis in chemistry labs, towards film deposition and processing in a cleanroom environment. Both
the fundamental and applied aspects of this two-pronged approach are discussed. Critical directions for future research are
proposed in an updated high-level roadmap to stimulate the next steps towards MOF-based microelectronics within the community.
1. Introduction
The structure and dynamics of matter at the nanometer scale
form the basis for both natural processes and technological
applications. For instance, ions moving across a lipid membrane
and in between electrodes are essential to living cells and
batteries, respectively. Similarly, our sense of smell and detectors
for hazardous substances are both based on the recognition of
a
Centre for Surface Chemistry and Catalysis, KU Leuven University of Leuven,
Celestijnenlaan 200F, B-3001 Leuven, Belgium. E-mail: rob.ameloot@ku leuven.be
b
Imec, Kapeldreef 75, B-3001 Leuven, Belgium
c
Sandia National Laboratories, Livermore, CA 94551-0969, USA
d
Institute of Physical and Theoretical Chemistry, Graz University of Technology,
Stremayrgasse 9, 8010 Graz, Austria
e
Department of Chemistry, The University of Adelaide, Adelaide, South Australia
5005, Australia
Ivo Stassen
Ivo Stassen is a Postdoctoral
Fellow of the Research
Foundation Flanders (FWO)
working at the University of Leu-
ven and Imec. He received his
MSc in Bioscience Engineering at
KU Leuven in 2012, followed by a
PhD in 2016. In 2014–2015, he
worked a as visiting scholar at
Kyoto University. His research
interests include solvent-free and
gas-phase synthesis of metal–
organic frameworks, host–guest
properties and fabrication of
functional nanoporous structures such as thin films, patterns and
devices.
Nicholas Burtch
Nicholas Burtch is a Harry S.
Truman Fellow at Sandia National
Laboratories in Livermore, CA. He
received his BSE from the University
of Michigan and PhD fro m the
Georgia Institute of Technology,
both in chemical engineering. His
research interests include the
experimental synthesis and
computational understanding of
crystalline, nanoporous materials
for materials science and
adsorption applications.

small molecules. To optimize interactions and processes at this
length scale, one would ideally be able to structure matter at the
(sub-)nanometer level. Indeed, in living organisms, precisely
tuned nano-environments are provided by ion channels and
dedicated receptors that are formed through self-assembly of
molecular building blocks. Man-made devices, on the other
hand, typically rely on much cruder fabrication tools: even
cutting-edge lithographic techniques fall at least an order of
magnitude short in resolution to structure matter at the desired
length scale.
Nevertheless, precisely controlled nano-environments do
exist in synthetic materials. Metal–organic frameworks (MOFs)
are crystalline nanoporous materials built out of metal-based
nodes and multitopic organic ligands (also called linkers)
connected by coordination bonds (Fig. 1a).
1
Over the last two
decades, MOFs have grown into promising materials for a wide
range of potential applications in industry and society. The
chemistry of these materials is characterized by the features of
their high-surface area crystal lattices: short and long range
ordering, intrinsic nanoporosity with pores of tunable size,
versatile host–guest chemistries (‘‘guest@MOF’’ properties)
and responsiveness to physical and chemical stimuli. What is
more, the synthetic chemistry that enables these features is
based on the spontaneous self-assembly of simple molecular
building units, which permits the ‘‘design’’ of MOF lattices
based on linkers and nodes with known geometries and
coordination environments. Hence, MOFs as a high-surface
area material platform, at the interface between hard and soft,
Alec Talin
Alec Talin has been a member of
the technical staff at Sandia
National Laboratories since 2002.
He is also an adjunct associate
professor of materials science and
engineering at the University of
Maryland. He received a BA
degree in chemistry from the
University of California, San
Diego in 1989, and a PhD
degree in materials science and
engineering from the University of
California, Los Angeles, in 1995.
Prior to joining Sandia, he spent
six years at Motorola Labs, and was a project leader at the Center
for Nanoscale Science and Technology at the National Institute of
Standards and Technology. His research focuses on areas of novel
electronic materials, energy storage and conversion, and national
security. He is a principal editor of the journal MRS Communications.
Paolo Falcaro
Paolo Falcaro is professor in
Biobased Materials and Techno-
logies at Graz University of
Technology (TU Graz Graz, Aus-
tria). He received his PhD in mate-
rials engineering in 2006 from
Bologna University, Italy. From
2005 to 2009 he worked at
Civen/Nanofab (Venice, Italy) as
manager of the sol–gel technology
for industrial applications. In
2009 he joined CSIRO (Mel-
bourne, Australia), extending the
expertise from sol–gel and device
fabrication to metal–organic frameworks. In 2011 he received the
ARC DECRA, progressing from group leader to team leader in 2014.
In 2016 he joined the Institute of Physical and Theoretical Chemistry
at TU Graz.
Mark Allendorf
Mark Allendorf is Director of
theHydrogenAdvancedMaterials
Research Consortium and a senior
scientist at Sandia National Labora-
tories. He received an AB degree
in chemistry from Washington
University in St. Louis and a PhD
degree in chemistry from Stanford
University. His research focuses on
the fundamental science and
applications of metal–organic fra-
meworks and related materials. He
has been published in more than
160 publications, including more
than 120 journal articles. He is President Emeritus and Fellow of The
Electrochemical Society and his awards include a 2014 R&D 100 Award
for a novel approach to radiation detection.
Rob Ameloot
Rob Ameloot obtained his PhD in
Bioscience Engineering/Catalytic
Technology at KU Leuven
(Belgium) in 2011. In 2012–
2013, he worked with Jeffrey Long
as a Fulbright postdoctoral fellow
at UC Berkeley (US). Currently,
he is a tenure-track research
professor at the KU Leuven
Centre for Surface Chemistry
and Catalysis. He was awarded
an ERC starting grant to work on
bringing metal–organic frame-
works from the chemistry lab into
the microelectronics fab by developing vapor phase thin film
deposition routes. In general, he is passionate about pushing the
envelope in porous materials and process technology, with a
healthy disregard for traditional subject boundaries.

inorganic and organic materials, offer a new window for fine-
tuning various structure–property relationships.
MOFs are typically obtained as microcrystalline powders
through solvothermal synthesis. Therefore, MOF research initially
focused on evaluating and optimizing the physical and chemical
properties in the context of bulk applications: gas storage and
chemical engineering operations (catalysis, separation).
2,3
These
fields build on the prior research and industrial implementation
of related materials, e.g. nanoporous silicates such as zeolites.
More recently, the unique properties of MOFs encouraged
research lines atypical for porous materials, often in areas
where the introduction of ordered porosity promises new
concepts entirely. In contrast to the proposed bulk applications
of MOFs, these more recent directions frequently target high-
value technological areas requiring very little material in
comparison. Examples include MOFs as functional materials
in chemical analytics, biomedical technology, solid-state
material physics and various other branches of nanoscience
and technology.
4
This review highlights the research aimed at the implemen-
tation of MOFs as an integral part of solid-state devices. In this
context, ‘‘integration’’ denotes that the MOF is an integral
component of the actual device structure and that the
fundamental aspects of device or circuit design are being taken
into account at least rudimentarily. We focus in particular on
electronic devices, which broadly defined are physical entities
that influence electrons when connected to an electrical circuit.
Examples of electronic devices include individual components
such as resistors, transistors and diodes, as well as assemblies
of such components such as amplifiers, sensors and micro-
controllers. Our everyday life increasingly relies on ever more
capable electronic devices including smartphones and computer
processors based on millions of miniaturized logic units, mem-
ory arrays and input/output interfaces such as physical sensors,
actuators and displays. The enormous success of electronic
devices has mainly been enabled by low-cost production through
scalable ‘‘CMOS’’ microfabrication (CMOS = complementary
metal-oxide–semiconductor). The renowned ‘‘Moore’s law’’ stat-
ing that the number of transistors in integrated circuits doubles
every two years, has been a self-imposed driving force for CMOS
research and downsizing in academia and industry since the
1970s. Importantly, this downsizing course has not only been
enabled by improved fabrication tools, but to an equal extent by
advances in materials science that ensure reliable performance
of ever tinier circuit elements. Industrial and academic research
efforts in this context have for long been harmonized by the
Fig. 1 Graphical representation of MOF, their structural and chemical versatility and some representative concepts related to device applications.
(a) MOFs are ordered frameworks built from interconnected organic ligands and metal-based nodes. The broad-scope recommended definition of a
MOF: ‘‘Coordination network with organic ligands containing potential voids; coordination network being a coordination compounds extending in at
least one dimension through repeating coordination entities’’.
6
(b) Some key properties of MOFs that may lead to applications in electronic devices.
(c) The burgeoning field of MOF devices visualized through the seminal example of chemical sensors. Shown is the evolution of the yearly publications
that combine the concepts ‘‘metal–organic framework’’ and ‘‘sensor’’ (source: SciFinder
s
). The earliest demonstrations of some general concepts, as
well as the 2011 roadmap article (no. 1), are positioned on the same timeline.

International Technology Roadmap for Semiconductors (ITRS).
These reports composed by semiconductor industry experts
specify research directions and targets in order to meet needed
material, fabrication and device specifications. In 2011, these
guidelines inspired some of us to stipulate a first roadmap for
exploratory research on MOFs in electronics.
5
Today, circa five
years of research later, this review provides an updated overview.
Analogous to the previous paper, progress in different areas of
interest is reviewed and perspectives and suggested focus points
are stipulated. Although arguably arbitrary, we strictly limit this
discussion to MOFs and exclude most of the larger family of
coordination polymers, most of which are nonporous.
6
One of the key trends in microelectronics is a gradual shift
from inorganic and silicon-centered, towards organic and
hybrid organic–inorganic devices. Depending on the applica-
tion scenario, this route is followed either to benefit from the
greater compositional complexity of organics, to reduce
production costs, or to push downsizing to the limit, down to
molecular dimensions. In the context of digital logic, such
approaches are referred to as ‘‘beyond CMOS’’, as CMOS-based
scaling in silicon technology will run into fundamental limita-
tions. Technologies based on new materials such as graphene
promise scaling beyond the limitations of silicon and are on the
verge of causing paradigm shifts in several areas.
7
Application
areas in which similar transitions are either impending or
already commercially implemented include photovoltaic cells
(cf. from silicon to perovskite or dye-sensitized solar cells) and
displays (cf. from indium tin oxide to polymers). This shift in
materials scope is accompanied by a rising interest in molecular
approaches and a rising acceptance and economic viability of
alternative manufacturing approaches such as inkjet printing
and roll-to-roll manufacturing. In our opinion, the continuous
exploration of new materials and properties combined with an
increasing attention for bottom-up strategies at a length scale
where chemistry and materials science merge could make elec-
tronic devices one of the most interesting proving grounds
for MOFs.
Directly related to their structure, MOFs offer properties
outside the existing materials scope in electronics: e.g. sensor
coatings with adsorption properties geared to specific analytes,
dielectric properties tunable at will, intrinsic porosity that
allows through-solid mass and ion transport, mechanical proper-
ties in between polymers and inorganics and electronic conduc-
tance tunable from practically zero to over a hundred S cm
2
(Fig. 1b). Within this range of potential applications, chemical
sensing seems to be the first to shift from proof of concept to the
development stage, arguably due to the directly transferable
adsorption studies available from researching bulk applications.
Nevertheless, recent milestones such as the design and synthesis
of a first generation of highly conductive MOFs (2014–2015) and
the fabrication of a field effect transistor, FET, (2016) highlight
the potential of MOFs in future electronic devices (Fig. 1c). The
primary prerequisite for realizing such MOF-based devices is a
radical performance increase over established technologies.
Moreover, manufacturing these devices will critically depend
on the compatibility of MOFs with existing fabrication protocols
and predominant standards. Therefore, it is important that
research efforts focus in parallel on a fundamental understand-
ing of the distinguishing properties of MOFs and eliminating
fabrication-related obstacles for integration. For MOFs, the latter
implies a shift from the microcrystalline powder synthesis in
chemistry labs, towards film deposition and processing in a
cleanroom environment. Moreover, it is important that the field
moves beyond the synthetic and structural aspects to engage
experts in other fields, such as materials science, physics, and
electrical engineering and to realize the use of MOFs in devices.
In this review, both aspects of the two-pronged approach
suggested above are highlighted. Progress in understanding
relevant fundamental physical properties of MOFs is discussed
first. Secondly, the general context of device microfabrication is
outlined and relevant MOF research is put in perspective.
Thirdly, case studies of MOF integration in electronic devices
are discussed for different application fields. Lastly, general
progress of the field, outstanding obstacles and perspectives
are outlined.
2. Fundamental MOF properties
A crucial requirement for designing and fabricating electronic
devices incorporating MOFs is knowledge of their basic charge
transport, photonic, and magnetic properties. Compared to
established materials such as silicon and organic semiconduc-
tors, little is known about MOFs. However, considerable pro-
gress has been made since the original 2011 roadmap,
5
providing ample reason to envision that MOFs could have a
prominent place in future electronic devices. Several review
articles already provide in-depth summaries of various aspects
of MOF research that are relevant to electronic applications.
Our intention here is not to exhaustively cover the same
ground, but rather to discuss recent milestones that highlight
progress and to identify opportunities and critical needs for
advancing the field. Relevant review articles for further reading
will be cited where applicable. Following the structure of the
first-generation roadmap, in this section we update the status
of charge transport, optical, and light generation. New sections
concerning magnetic properties and light harvesting are also
included.
2.1 Electronic conductivity
The ability to conduct electrical charge is perhaps the most
important and also least explored property of MOFs to devel-
oping them as active materials in electronic devices. Most
MOFs are electrical insulators, but in the last five years this
subcategory has expanded from merely two structures in 2011
to about two dozen materials with demonstrated conductivity
or charge mobility. This ten-fold increase motivated a recent
review article by Dinca
˘
and coworkers that identifies strategies
for designing electronically conducting MOFs.
8
These results,
although limited, are nevertheless highly encouraging. How-
ever, the best MOF conductivities obtained so far are still low by
comparison with other types of conducting materials (Table 1).

Although nonporous coordination polymers such as poly(Ni
1,1,2,2-ethenetetrathiolate), a rare example of a hybrid n-type
semiconductor, are certainly of interest, we confine the discus-
sion here to conducting MOFs that are clearly nanoporous. The
next two sections provide first a brief introduction to charge
transport from a solid-state physics point of view and its
connection with MOFs, then a summary of charge transport
mechanisms known to be operative in MOFs.
Fundamentals of charge transport. According to band theory,
solids can be classified as insulators, semiconductors, or metals
based on the magnitude of the energy gap, E
g
,separatingthe
valence band (VB) from the conduction band (CB): E
g
4 4eVare
insulators, 0 o E
g
o 3 eV are semiconductors, and E
g
o 0
(i.e. partially filled band) are metals.
9
The band model works well
for many solids in which strong electronic coupling between
neighboring atoms leads to large band dispersion (i.e. large DE
between bonding and antibonding orbitals) that makes it ener-
getically favorable to delocalize carriers across many lattice sites.
For solids with large band dispersion (also known as ‘‘band-
width’’) such as Si (Fig. 2a), the energy gained by delocalizing the
charge (BW/2) makes the electron–electron repulsion effects
insignificant. In metals, the repulsion effects relative to Si are
further reduced electrostatically by the large density of free
carriers. However, true metallic conduction (i.e. decreasing con-
ductivity with increasing temperature) is not observed in many
materials with bandwidth less than B0.5 eV. This is the case
even when the Fermi level moves into the VB or the CB due to
strong carrier localization; here, the carriers are energetically
Table 1 Comparison of conductivity data for a selection of MOFs and other conducting materials
Material or formula unit Conductivity (S cm
1
) Charge carrier
e
Mobility (cm
2
V
1
s
1
) Ref.
Copper 10
5
–10
6
e46 41
Doped polyacetylene 560 (n); 360 (p) h or e 1 (n-doped, cis)42
Undoped polyacetylene 10
9
42
Doped polyaniline 10
3
41
Graphene 550
b
41
Polycrystalline graphite 1250 43
Polythiophenes 1975 h 1–10 29 and 44
Rubrene 445
TTF-TCNQ 700 41
Cu[Ni(PDT)
2
](I
2
doped) 1 10
4 a
12
Cu
3
(BHT)
2
d
1580
b
h or e 99 (h); 116 (e) 46
Ni
3
(HITP)
2
2;
a
40
b
h or e 48.6 28 and 31
Ni
3
(BHT)
2
0.15;
a
2.8–160
c
47 and 48
Mn
2
(DOBDC) 3.9 10
13 a
49
Fe
2
(DOBDC) 3.2 10
7 a
49
Mn
2
(DSBDC) 1.2 10
12 a
0.01 49 and 50
{[Cd
2
(AZBPY)
2
(HO-1,3-BDC)
2
](AZBPY)(H
2
O)}
n
1.86
b
e51
K
1.2
Ru
3.6
[Ru(CN)
6
]
3
16H
2
O 5.7 10
3
36
TCNQ@Cu
3
(BTC)
2
0.07
b
h18
TCNQ@[Cu(TPyP)Cu
2
(O
2
CCH
3
)
4
] 2.5 10
6
34
Zn
2
(TTFTB) 4.0 10
6
0.2 22
Porphyrin Zn-SURMOF-2 h 0.002 52
Pd@porphyrin Zn-SURMOF-2 h 0.003–0.004 52
[Sr(HBTC)(H
2
O)]
n
10
9
–10
7 a
32
NNU-7 (anthracene MOF) 1.3 10
3 c
24
(NBu
4
)
2
Fe
2
(DHBQ)
3
0.16
a
15
Sample morphologies used for conductivity measurements, if specified:
a
pellet;
b
film;
c
microflakes or single crystal.
d
Coordination polymer
without any indication of guest-accessible porosity.
e
h: hole; e: electron.
Fig. 2 Calculated band diagrams. (a) Si. Adapted from ref. 9. Copyright 2011 Springer. (b) MOF-5. Reproduced with permission from ref. 10.
(c) Ni
3
(HITP)
2
. Reproduced with permission from ref. 14. Copyright 2016 American Chemical Society. The band width (W) is approximately 8 eV, 0 eV,
and 0.8 eV, respectively.

Citations
More filters
Journal ArticleDOI
TL;DR: The purpose of this Review is to examine the fundamental development of the concept of pseudocapacitance and how it came to prominence in electrochemical energy storage as well as to describe new classes of materials whose electrochemicalEnergy storage behavior can be described as pseudOCapacitive.
Abstract: There is an urgent global need for electrochemical energy storage that includes materials that can provide simultaneous high power and high energy density One strategy to achieve this goal is with pseudocapacitive materials that take advantage of reversible surface or near-surface Faradaic reactions to store charge This allows them to surpass the capacity limitations of electrical double-layer capacitors and the mass transfer limitations of batteries The past decade has seen tremendous growth in the understanding of pseudocapacitance as well as materials that exhibit this phenomenon The purpose of this Review is to examine the fundamental development of the concept of pseudocapacitance and how it came to prominence in electrochemical energy storage as well as to describe new classes of materials whose electrochemical energy storage behavior can be described as pseudocapacitive

767 citations

Journal ArticleDOI
TL;DR: This Review discusses the efforts undertaken so far to achieve efficient charge transport in MOFs and focuses on four common strategies that have been harnessed toward high conductivities.
Abstract: Metal–organic frameworks (MOFs) are intrinsically porous extended solids formed by coordination bonding between organic ligands and metal ions or clusters. High electrical conductivity is rare in M...

751 citations

Journal ArticleDOI
TL;DR: This review highlights the most recent progress in developing MOF sensing and switching materials with an emphasis on sensing mechanisms based on electricity, magnetism, ferroelectricity and chromism, and provides insight for the future development of advanced MOF materials as next-generation gas and VOC sensors.
Abstract: Developing efficient sensor materials with superior performance for selective, fast and sensitive detection of gases and volatile organic compounds (VOCs) is essential for human health and environmental protection, through monitoring indoor and outdoor air pollutions, managing industrial processes, controlling food quality and assisting early diagnosis of diseases. Metal–organic frameworks (MOFs) are a unique type of crystalline and porous solid material constructed from metal nodes (metal ions or clusters) and functional organic ligands. They have been investigated extensively for possible use as high performance sensors for the detection of many different gases and VOCs in recent years, due to their large surface area, tunable pore size, functionalizable sites and intriguing properties, such as electrical conductivity, magnetism, ferroelectricity, luminescence and chromism. The high porosity of MOFs allows them to interact strongly with various analytes, including gases and VOCs, thus resulting in easily measurable responses to different physicochemical parameters. Although much of the recent work on MOF-based luminescent sensors have been summarized in several excellent reviews (up to 2018), a comprehensive overview of these materials for sensing gases and VOCs based on chemiresistive, magnetic, ferroelectric, and colorimertic mechanisms is missing. In this review, we highlight the most recent progress in developing MOF sensing and switching materials with an emphasis on sensing mechanisms based on electricity, magnetism, ferroelectricity and chromism. We provide a comprehensive analysis on the MOF–analyte interactions in these processes, which play a key role in the sensing performance of the MOF-based sensors and switches. We discuss in detail possible applications of MOF-based sensing and switching materials in detecting oxygen, water vapor, toxic industrial gases (such as hydrogen sulfide, ammonia, sulfur dioxide, nitrous oxide, carbon oxides and carbon disulfide) and VOCs (such as aromatic and aliphatic hydrocarbons, ketones, alcohols, aldehydes, chlorinated hydrocarbons and N,N′-dimethylformamide). Overall, this review serves as a timely source of information and provides insight for the future development of advanced MOF materials as next-generation gas and VOC sensors.

631 citations

Journal ArticleDOI
TL;DR: The recent advances in MOF thin films are reviewed, including fabrication and patterning strategies and existing nanotechnology applications, and the most attractive future opportunities as well as the most urgent challenges are listed.
Abstract: Surface-supported metal–organic framework thin films are receiving increasing attention as a novel form of nanotechnology. New deposition techniques that enable the control of the film thickness, homogeneity, morphology, and dimensions with a huge number of metal–organic framework compounds offer tremendous opportunities in a number of different application fields. In response to increasing demands for environmental sustainability and cleaner energy, much effort in recent years has been devoted to the development of MOF thin films for applications in photovoltaics, CO2 reduction, energy storage, water splitting, and electronic devices, as well as for the fabrication of membranes. Although existing applications are promising and encouraging, MOF thin films still face numerous challenges, including the need for a more thorough understanding of the thin-film growth mechanism, stability of the internal and external interfaces, strategies for doping and models for charge carrier transport. In this paper, we review the recent advances in MOF thin films, including fabrication and patterning strategies and existing nanotechnology applications. We conclude by listing the most attractive future opportunities as well as the most urgent challenges.

482 citations

Journal ArticleDOI
TL;DR: Key advances in the application of 2D materials, from both a historical and analytical perspective, are summarized for four different groups of analytes: gases, volatile compounds, ions, and biomolecules.
Abstract: Electrically–transduced sensors, with their simplicity and compatibility with standard electronic technologies, produce signals that can be efficiently acquired, processed, stored, and analyzed. Two dimensional (2D) nanomaterials, including graphene, phosphorene (BP), transition metal dichalcogenides (TMDCs), and others, have proven to be attractive for the fabrication of high–performance electrically-transduced chemical sensors due to their remarkable electronic and physical properties originating from their 2D structure. This review highlights the advances in electrically-transduced chemical sensing that rely on 2D materials. The structural components of such sensors are described, and the underlying operating principles for different types of architectures are discussed. The structural features, electronic properties, and surface chemistry of 2D nanostructures that dictate their sensing performance are reviewed. Key advances in the application of 2D materials, from both a historical and analytical pers...

443 citations

References
More filters
Journal ArticleDOI
30 Aug 2013-Science
TL;DR: Metal-organic frameworks are porous materials that have potential for applications such as gas storage and separation, as well as catalysis, and methods are being developed for making nanocrystals and supercrystals of MOFs for their incorporation into devices.
Abstract: Crystalline metal-organic frameworks (MOFs) are formed by reticular synthesis, which creates strong bonds between inorganic and organic units. Careful selection of MOF constituents can yield crystals of ultrahigh porosity and high thermal and chemical stability. These characteristics allow the interior of MOFs to be chemically altered for use in gas separation, gas storage, and catalysis, among other applications. The precision commonly exercised in their chemical modification and the ability to expand their metrics without changing the underlying topology have not been achieved with other solids. MOFs whose chemical composition and shape of building units can be multiply varied within a particular structure already exist and may lead to materials that offer a synergistic combination of properties.

10,934 citations

Journal ArticleDOI
TL;DR: The aim is to present the state of the art chemistry and physics of and in the micropores of porous coordination polymers, and the next generation of porous functions based on dynamic crystal transformations caused by guest molecules or physical stimuli.
Abstract: The chemistry of the coordination polymers has in recent years advanced extensively, affording various architectures, which are constructed from a variety of molecular building blocks with different interactions between them. The next challenge is the chemical and physical functionalization of these architectures, through the porous properties of the frameworks. This review concentrates on three aspects of coordination polymers: 1). the use of crystal engineering to construct porous frameworks from connectors and linkers ("nanospace engineering"), 2). characterizing and cataloging the porous properties by functions for storage, exchange, separation, etc., and 3). the next generation of porous functions based on dynamic crystal transformations caused by guest molecules or physical stimuli. Our aim is to present the state of the art chemistry and physics of and in the micropores of porous coordination polymers.

9,661 citations

Journal ArticleDOI
01 May 2008-Nature
TL;DR: It is shown, using a simple analytical example, that memristance arises naturally in nanoscale systems in which solid-state electronic and ionic transport are coupled under an external bias voltage.
Abstract: Anyone who ever took an electronics laboratory class will be familiar with the fundamental passive circuit elements: the resistor, the capacitor and the inductor. However, in 1971 Leon Chua reasoned from symmetry arguments that there should be a fourth fundamental element, which he called a memristor (short for memory resistor). Although he showed that such an element has many interesting and valuable circuit properties, until now no one has presented either a useful physical model or an example of a memristor. Here we show, using a simple analytical example, that memristance arises naturally in nanoscale systems in which solid-state electronic and ionic transport are coupled under an external bias voltage. These results serve as the foundation for understanding a wide range of hysteretic current-voltage behaviour observed in many nanoscale electronic devices that involve the motion of charged atomic or molecular species, in particular certain titanium dioxide cross-point switches.

8,971 citations

Journal ArticleDOI
TL;DR: In this paper, eigenfrequenz der Platte infolge Vergroserung der schwingenden Masse is vermessen, so das eine empirische Eichung bei der Schichtwagung mit Schwingquarzen entfallt.
Abstract: Wird eine Fremdschicht auf eine zu Dickenscherungsschwingungen angeregte Schwingquarzplatte aufgebracht, so andert sich die Eigenfrequenz der Platte infolge Vergroserung der schwingenden Masse. Da die Frequenzanderung eines Schwingquarzes sehr genau vermessen werden kann, ergibt sich daraus eine sehr empfindliche Methode zur Wagung dunner Schichten. Massenbelegung der Fremdschicht und Frequenzanderung sind einander proportional. Die Proportionalitatskonstante last sich aus der Eigenfrequenz des Schwingquarzes berechnen, so das eine empirische Eichung bei der Schichtwagung mit Schwingquarzen entfallt. Die Genauigkeit des Schichtwageverfahrens ist in erster Linie durch die Temperaturabhangigkeit der Quarzeigenfrequenz begrenzt und betragt bei 1° C zugelassener Temperaturschwankung etwa ±4 · 10−9 g · cm−2. Das entspricht einer mittleren Dicke von 0,4 A bei der Dichte ϱ=1 g · cm−3. Das Verfahren wurde auch zur direkten Wagung einer Masse ausgenutzt (Mikrowagung). Dabei lies sich eine Genauigkeit von 10−10g erreichen.

8,035 citations

Frequently Asked Questions (18)
Q1. What is the method for forming a free-standing MOF film?

The solvent–air interface or the boundary layer between immiscible solvents can be used to grow a free-standing MOF film that can be subsequently transferred to a substrate. 

This review highlights the research aimed at the implementation of MOFs as an integral part of solid-state microelectronics. Both the fundamental and applied aspects of this two-pronged approach are discussed. 

A low density of electrically active defects and high charge mobility are also essential for an efficient LED so that injected holes and electrons can penetrate the emitting layer(s) and recombine to form excitons withminimal non-radiative recombination. 

MOFs are well suited to serve as the dye (i.e. light harvesting) component of a DSSC by virtue of the ability to build structures with multiple light absorbers locked into a stable crystalline structure. 

The same material characteristics that make MOFs attractive for charge transport operate here, namely synthetic tunability, long-range order and porosity as an additional design element. 

In AC circuit analysis, the generalized concept of impedance (Z, O) is defined in analogy to DC resistance, as the voltage to current ratio. 

in some cases the MOF phase has an intrinsic preference for alignment parallel to the surface, because of the formation of well-defined crystal faces or the inherently layered nature of the material. 

For instance, in a synthesis solution containing Zn(II) nitrate and terephthalic acid, the generation of OH ions through reduction of the NO3anion results in ligand deprotonation and formation of a MOF-5 film on the cathode. 

The approach of using metal oxide films as precursors for MOF coatings benefits from a range of established technologies for deposition of the former (PVD, CVD, ALD, sol–gel methods, etc.). 

While most of the proton-conducting frameworks require hydration, several promising strategies have been developed for anhydrous proton transport in MOFs. 

replacing these systems with solid-state electrolytes is an active research topic, mainly because of their volatility, flammability and reactivity towards the electrodes. 

In the context of microelectronic devices, integration of liquid components as part of vertical stacks is not possible due to structural reasons and incompatibility with vacuum technology. 

Although nano-indentation is becoming a more common tool to characterize single MOF crystals and thin film, few materials have been characterized in depth. 

To fabricate the first FETs based on semiconducting MOFs,28,46 interfacial growth processes were combined with subsequent film transfer. 

Compared to established thin film deposition technologies (e.g. sol–gel methods, PVD, CVD, ALD), MOF films typically show a higher roughness, often above 10% of the film thickness. 

In contrast to purely inorganic or organic conductors such as MoS2 or graphene, which do not easily lend themselves to chemical functionalization, the electronic properties of MOFs can be tuned by chemically altering the linker, metal ion or guest species adsorbed in the pore space. 

recent studies demonstrated that analyte-permeable dielectric sensing materials can also be screened using the KP method. 

It will be interesting to see the performance gain by combining MOFs with more recent sensors that exploit different elastic wave propagation modes including acoustic-plate-mode and flexural-plate-wave devices.