An updated roadmap for the integration of metal–organic frameworks with electronic devices and chemical sensors
Summary (7 min read)
1. Introduction
- The structure and dynamics of matter at the nanometer scale form the basis for both natural processes and technological applications.
- His research interests include solvent-free and gas-phase synthesis of metal– organic frameworks, host–guest properties and fabrication of functional nanoporous structures such as thin films, patterns and devices.
- The enormous success of electronic devices has mainly been enabled by low-cost production through scalable ‘‘CMOS’’ microfabrication (CMOS = complementary metal-oxide–semiconductor).
- Therefore, it is important that research efforts focus in parallel on a fundamental understanding of the distinguishing properties of MOFs and eliminating fabrication-related obstacles for integration.
2. Fundamental MOF properties
- A crucial requirement for designing and fabricating electronic devices incorporating MOFs is knowledge of their basic charge transport, photonic, and magnetic properties.
- Compared to established materials such as silicon and organic semiconductors, little is known about MOFs.
- The authors intention here is not to exhaustively cover the same ground, but rather to discuss recent milestones that highlight progress and to identify opportunities and critical needs for advancing the field.
- Relevant review articles for further reading will be cited where applicable.
- Following the structure of the first-generation roadmap, in this section the authors update the status of charge transport, optical, and light generation.
2.1 Electronic conductivity
- The ability to conduct electrical charge is perhaps the most important and also least explored property of MOFs to developing them as active materials in electronic devices.
- These issues are reviewed elsewhere,8,26 but it suffices to say that control of morphology is essential and that versatile synthetic approaches are needed to fully understand intrinsic vs. defect- or grain boundary-controlled conductivity of MOFs.
- The conductivity displays a temperature dependence with a relatively large activation energy of 0.49 eV, suggesting a weak hopping mechanism in a material with relatively little band dispersion.
- 54,55 Nevertheless, as will be discussed below, the number of MOFs for which the band structure has been predicted has grown considerably.
- 68 As discussed above, Foster et al. proposed a different strategy to achieve semiconducting behavior in this structure, substituting Cr(III) ions for Ni(II) and inserting pillar ligands between the two dimensional sheets.
2.2 Ionic conductivity
- Ion conduction is a critical aspect in many energy storage and -conversion devices, for instance Li(I) and proton transport in Li-ion batteries and many fuel cell types, respectively.
- Cointegration of power functions directly on microelectronic chips is currently attracting a lot of interest for application in self-powered electronics such as portables, wearables and implants.
- Either type of mechanism can be dominant in the different proton introduction strategies.
- While most of the proton-conducting frameworks require hydration, several promising strategies have been developed for anhydrous proton transport in MOFs.
- 88 Conduction of larger and/or multivalent metal ions imposes more challenging requirements on the development of solid electrolytes, for instance in charge compensation along the conduction path.
2.3 Energy harvesting and emission
- The hybrid organic–inorganic structure of MOFs provides numerous opportunities for light harvesting and tuning energy transport.
- Long hopping distances have been reported in porphyrin- and BODIPY-based MOFs as well,108,109 suggesting that the ordered crystalline structure of MOFs is a key advantage.
- Besides PV applications, the designer nature of MOFs offers opportunities in light emission as well.
- A low density of electrically active defects and high charge mobility are also essential for an efficient LED so that injected holes and electrons can penetrate the emitting layer(s) and recombine to form excitons with minimal non-radiative recombination.
2.4 Magnetic properties
- The presence of open-shell metal centers can impart magnetic properties in MOFs.
- Several reviews discussed such structure– property relationships and the magnetic changes that occur in response to different chemical and physical stimuli.
- While initial spin crossover studies focused primarily on small, polar molecules, the range of guest species targeted now spans an array of solvent and gas molecules, including halogens and aromatic species.
- Molecular modeling is playing an increasingly important role in elucidating the underlying principles governing the spin crossover response, with recent studies of the Fe[Pt(CN)4] framework providing valuable insight into the origin of its guestmodulated behavior.
2.5 Dielectric properties
- The charge carriers of nonconductive materials, by definition, cannot move freely along the direction of electric fields.
- Currently, a few cases have been reported that can be considered particularly promising.
- The gate dielectric of a downsized microprocessor FET needs to be high-k, particularly when fast switching and low leakage is required.
3. Microfabrication and current state of MOF processing
- The practical application of functional materials in devices requires synthesis methods that provide control over properties and morphology.
- In addition to performance, durability and cost as criteria to assess a material, processability and compatibility with all fabrication steps is key.
- The latter includes thin film deposition and patterning, templating uses of MOFs and mechanical thin film behavior to illustrate the importance of implementation-related engineering and its relation with fundamental materials properties.
- Note that a generalized description of microfabrication is inevitably an oversimplification, and that production routes different from the example of CMOS technology are utilized in specific areas such as large-area electronics, low-cost devices on plastics, etc.
3.1 Microfabrication: key characteristics and processing steps
- CMOS production of integrated circuits (ICs, chips) is an excellent example of cost-effective industrial microfabrication as its persistent progress enabled modern information technology.
- Among a wide range of film growth techniques, vapor phase depositions are typically the process of choice, particularly for inorganics.
- Basically, in this fabrication step the computer-assisted design of the device is transferred to the physical reality.
- After selective removal of the photoresist, the functional material is patterned through etching.
3.2 Depositing and patterning MOF thin films
- The first step toward the fabrication of devices requires the deposition of MOF films, with control over composition, homogeneity, thickness, roughness and ideally crystal orientation.
- Highlighting the most relevant progress and the conceptual differences.
- As the contact between ligand and inorganic is required, the process is limited by the diffusion of precursors through the MOF film.
- When solvothermally converting patterned precursors, particular care should be taken to match dissolution and MOF crystallization.
- This method most clearly offers opportunities for the deposition of relatively thick films (e.g. 20 mm ZIF-8 films).
3.3 Other fabrication uses of MOFs
- The authors review other types of templating, shown schematically in Fig. 14.
- Alternatively, a pre-synthesized nanostructure can be encapsulated by assembling the MOF around it (Fig. 14b).
- It has been demonstrated that the MOF structure and geometry can be used to control the size and orientation of nanoparticles or nanowires over a range inaccessible via traditional templating.
- One advantage of this approach over the infiltration-reaction route is that it is a simple one-pot procedure.
- By pyrolysis of a suitable transition metal MOF (e.g. ZIF-67), it is therefore possible to generate a porous carbon matrix with embedded metal oxide particles (e.g. Co3O4) with the same composition as used in batteries.
3.4 Mechanical properties of MOF thin films
- The measurement, understanding and alteration of mechanical properties of functional materials is of critical importance in the context of miniaturized devices as mechanical loading (e.g. bending, torsion, compression) is practically unavoidable, during microfabrication, back-end processing or real-world operation.
- MOFs often exhibit ‘‘anomalous’’ mechanical behavior related to their structural flexibility and the diverse chemical interactions that can take place within the pores.
- Wöll and co-workers observed an elastic modulus (9.3 GPa) and hardness (0.23 GPa) for {100} oriented LPE HKUST-1 thin films,309 which closely matched with computed values.
- This large CTE mismatch between a MOF thin film and its substrate could lead to film cracking or delamination.
4. Case studies of MOFs in electronic devices
- Following publication of the first roadmap in 2011, several milestones in MOF-based devices have been realized, as well as important progress in this direction.
- MOF-enabled sensing continues to be a particularly active area of research and has been thoroughly reviewed,335 most recently in 2014.93.
- In contrast to previous overviews of this area, recent progress allows us to adhere more strictly to the definition of an electronic device, which shifts the focus from chemistry- to more engineering-focused.
- Such as changes in color or luminescence upon uptake of chemical species, the authors do not consider these devices.
- The case studies the authors picked serve to highlight the diversity of roles MOFs can play in electronic devices, a versatility that stems directly from the range of properties discussed in Section 2.
4.1 Digital circuits
- Digital circuits are broad group of devices for processing and storage of logic signals (signal/ground voltage = ON/OFF).
- The thin films were transferred to a prefabricated device structure to form BG–BC FETs.
- The observed mobility is competitive with state-of-the-art solution-processed organic and inorganic semiconductors, a remarkable feature for a material that consists for a significant part of empty pore space.
- When characterized as memristors at moderate voltages ( 1–2.5 V), the cells showed a relatively large sample-tosample distribution of the high and low resistance states, but consistently with a very large ON/OFF ratio of 107.
- The mechanism of resistance switching relies on the reversible formation of silver ions at the silver electrode.
4.2 Chemical sensors
- Chemical sensors are devices that respond to changes in analyte concentration and transduce this information as electrical signals.
- Improvements in terms of performance, size and cost would open up a range of new opportunities for chemical sensors.
- Note that actual sensor performance can be highly dependent upon additional factors such as the substrate thickness, sensor exposure conditions, and physical properties (thickness, uniformity, adhesion) of the thin film Device Operating frequency (MHz) Mass detection limit (ng) Microcantilever B0.02–5 B0.01 Microcantilever strain gauge N/A 10 6 Quartz crystal microbalance B5–30 B1 Surface acoustic wave sensor B20–500 B0.1 analyte.
- Chemical sensors operating through analyte-induced electrical conductance variation are often analyzed through monitoring of the direct current (DC) that flow through the element at a constant biasing voltage (i.e. conductometry).
- Much improved responses may be expected for MOFs that can maintain their crystallinity and porosity upon exposure to the analyte.
5. Challenges and perspectives: an updated roadmap
- As stated in the introduction, the large and growing interest in MOF materials stems from a desire to better understand and design matter at the atomic scale.
- At this level, where the boundaries between chemistry and materials science blur, the well-controlled and ordered environment offered by selfassembled crystalline solids enables a range of novel properties.
- Such work is currently in a proof-ofconcept stage.
- To further mature and pinpoint actual requirements, the developed concepts need to find their way into other scientific communities, ranging from solid-state physicists to electronic engineers and hardware specialists.
- The purpose of the current update is to highlight the significant progress as well as remaining challenges, to stimulate reflection within the community and raise awareness within other fields.
MOF as electronic conductors
- In the past few years, significant progress has been made in the synthesis of conductive MOFs.
- In contrast to purely inorganic or organic conductors such as MoS2 or graphene, which do not easily lend themselves to chemical functionalization, the electronic properties of MOFs can be tuned by chemically altering the linker, metal ion or guest species adsorbed in the pore space.
- 14,336 the potential offered by porous crystalline (semi)conductors is clear.
- The increasing number of conductive MOFs also highlights the challenge of accurately determining their properties, especially for the more conductive ones.
- Such data are available from single-crystal measurements, although care should be taken how to attach electrodes.
MOFs as ionic conductors
- An intensive search for solid electrolytes is ongoing, mainly for energy storage and conversion devices, but as well for electrochemical sensors and ionic transistors.
- As these species are small and relatively mobile, the risk for failure through evaporation or diffusion to and reaction at the electrodes is not completely eliminated.
- Also in this case, rational design through the host– guest chemistry of MOFs can generate entirely solvent-free solid electrolyte materials, for instance through the inclusion of polymer chains from a melt or via in-pore polymerization.
- Another approach that perhaps surprisingly has not yet been explored for metal ion conduction is the covalent anchoring of solvent-like moieties to the framework.
- If this is not the case, the ionic mobility measured by impedance spectroscopy represents a combined cation and anion mobility.
Optoelectronics
- Significant progress has been made in exploiting the hybrid organic–inorganic structure of MOFs for energy harvesting.
- The crystalline organization of porphyrin entities in a Zn(II) framework resulted in the formation of what may be an indirect bad gap semiconductor with efficient photocarrier generation.
- In addition to fine-tuning light absorption, the regular organization of dyes in the pores of the crystalline solid can create novel guest@MOF emission properties.
Dielectrics
- Studies on the use of MOFs as both low- and high-k materials show clear potential but also indicate that a fundamental understanding of the factors contributing to the k and the chemical concepts for their tunability are largely unexplored.
- From the limited data available, it is clear that to achieve a low-k MOF, ligands with fewer polar functional groups and less-polarized bonds can be introduced.
- As empty space has the lowest possible dielectric constant, increasing the MOF pore size will further decrease the k value.
- Importantly, very few papers report on the functional testing of integrated MOF dielectrics.
- Organic–inorganic dielectric hybrids such as ceramic–polymer composites, are receiving a lot of attention e.g. for application in low-loss dielectric resonators for wireless communication.
Mechanical properties
- In MOF-based electronic devices, mechanical properties will play a role at the level of both the MOF and the device characteristics.
- The former aspect is considered more ‘‘fundamental’’ and received more attention.
- As already highlighted in Section 4.2, these data will be crucial in interfacing MOFs with oscillating mass-sensitive devices, for which stiffer materials and tailorability is desirable.
- This research trend is also reflected in the increasing attention for ‘‘molecular layer deposition’’ (MLD) processes, used in an analogous way to ALD to deposit hybrid coatings.
- In addition, this approach could open up opportunities to modulate the electronic structure of MOFs through the introduction of mechanical stress and strain.
Property modeling
- To design MOF-based electronics, in silico modeling will become an increasingly important tool, in the first place to understand and predict fundamental material properties.
- Specific challenges are abound in each of the above sections.
- The determination of the band gap and type (direct vs. indirect) has important implications for photovoltaics as well as the general use of MOFs as semiconductors.
- Since machine-learning tools show an ability to offer insight beyond the ability of human chemical intuition, they could become valuable and widespread screening tools for the MOF community.
- Previously, the ComputationReady Experimental MOF (CoRE MOF) database was already released by an independent group authors, comprising over 4700 MOF structures from the Cambridge Structural Database for which solvent molecules, partially occupied and disordered atoms were removed.
Thin films and fabrication
- As is clear from the discussion in the previous sections, reliable methods to deposit uniform and defect-free MOF films will form the basis for microelectronic device fabrication.
- Such single-crystalline domains would be a remarkable achievement with practical implications for device fabrication.
- It is not unlikely that currently other properties and functions are obscured by sub-optimal thin film deposition methods.
Chemical sensors
- As is clear from the case study in Section 4.2, chemical sensing is receiving a lot of research attention and might be the first discussed area to shift from the proof-of-concept to the development stage.
- Currently, the main barrier to progress is finding the right combination of MOF material and transduction mechanism for a certain analyte.
- Also in this case, highthroughput computational screening coupled to a detailed understanding of how host–guest interactions are transduced could be a valuable aid.
- In mass-based sensing, QCM and SAW are the most developed acoustic wave sensors.
- In chemical sensors, MOFs are ideally suitable to fulfil other roles than the active sensing layer as well.
Valorization perspectives
- Practical applicability should not be the sole guidance of scientific explorations.
- Examples include the applications highlighted herein, as well as other opportunities in the biomedical field, optical coatings, etc.
- Any demonstration of commercial viability will lead to increased interest from different domains.
- It is clear that many opportunities remain to bring the fascinating properties of MOFs stemming from their nanoscale organization into real-world applications.
General concepts
- AC Alternating current ALD Atomic layer deposition BC–BG Bottom contact, bottom gate (FET geometry) BG–BC Bottom gate, bottom contact (FET geometry) BHJ Bulk heterojunction CB Conduction band CHEMFET.
- Chemically sensitive field effect transistor CMOS Complementary metal-oxide–semiconductor (fabrication platform) CMP Chemical-mechanical planarization or polishing CPD Contact potential difference CTE Coefficient of thermal expansion CVD Chemical vapor deposition DBA Donor–bridge–acceptor DC Direct current DFT.
- Density functional theory DSSC Dye-sensitized solar cell FET Field effect transistor FRET Fluorescence resonance energy transfer GGA Generalized gradient approximation HOMO.
- Top gate, bottom contact (FET geometry) VB Valence band VOC Volatile organic compound.
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Frequently Asked Questions (18)
Q2. What are the contributions mentioned in the paper "An updated roadmap for the integration of metal–organic frameworks with electronic devices and chemical sensors" ?
This review highlights the research aimed at the implementation of MOFs as an integral part of solid-state microelectronics. Both the fundamental and applied aspects of this two-pronged approach are discussed.
Q3. What is the importance of a low density of defects and high charge mobility?
A low density of electrically active defects and high charge mobility are also essential for an efficient LED so that injected holes and electrons can penetrate the emitting layer(s) and recombine to form excitons withminimal non-radiative recombination.
Q4. What is the role of a MOF in a DSSC?
MOFs are well suited to serve as the dye (i.e. light harvesting) component of a DSSC by virtue of the ability to build structures with multiple light absorbers locked into a stable crystalline structure.
Q5. What are the characteristics that make MOFs attractive for charge transport?
The same material characteristics that make MOFs attractive for charge transport operate here, namely synthetic tunability, long-range order and porosity as an additional design element.
Q6. What is the generalized concept of impedance in AC circuit analysis?
In AC circuit analysis, the generalized concept of impedance (Z, O) is defined in analogy to DC resistance, as the voltage to current ratio.
Q7. What is the reason why the MOF phase has an intrinsic preference for alignment parallel to the surface?
in some cases the MOF phase has an intrinsic preference for alignment parallel to the surface, because of the formation of well-defined crystal faces or the inherently layered nature of the material.
Q8. What is the effect of a reduction of the NO3anion on the MOF-5?
For instance, in a synthesis solution containing Zn(II) nitrate and terephthalic acid, the generation of OH ions through reduction of the NO3anion results in ligand deprotonation and formation of a MOF-5 film on the cathode.
Q9. What are the advantages of using metal oxide films as precursors for MOF coatings?
The approach of using metal oxide films as precursors for MOF coatings benefits from a range of established technologies for deposition of the former (PVD, CVD, ALD, sol–gel methods, etc.).
Q10. What are the promising strategies for proton transport in MOFs?
While most of the proton-conducting frameworks require hydration, several promising strategies have been developed for anhydrous proton transport in MOFs.
Q11. Why is the substitution of solid-state electrolytes an active research topic?
replacing these systems with solid-state electrolytes is an active research topic, mainly because of their volatility, flammability and reactivity towards the electrodes.
Q12. What are the reasons why integrating liquid components as part of vertical stacks is not possible?
In the context of microelectronic devices, integration of liquid components as part of vertical stacks is not possible due to structural reasons and incompatibility with vacuum technology.
Q13. How many materials have been characterized in depth?
Although nano-indentation is becoming a more common tool to characterize single MOF crystals and thin film, few materials have been characterized in depth.
Q14. How did the researchers combine the interfacial growth processes with subsequent film transfer?
To fabricate the first FETs based on semiconducting MOFs,28,46 interfacial growth processes were combined with subsequent film transfer.
Q15. How do MOF films differ from other thin film deposition technologies?
Compared to established thin film deposition technologies (e.g. sol–gel methods, PVD, CVD, ALD), MOF films typically show a higher roughness, often above 10% of the film thickness.
Q16. How can the electronic properties of MOFs be tuned?
In contrast to purely inorganic or organic conductors such as MoS2 or graphene, which do not easily lend themselves to chemical functionalization, the electronic properties of MOFs can be tuned by chemically altering the linker, metal ion or guest species adsorbed in the pore space.
Q17. How can analyte-permeable dielectric sensing materials be screened?
recent studies demonstrated that analyte-permeable dielectric sensing materials can also be screened using the KP method.
Q18. What is the way to combine MOFs with more recent sensors?
It will be interesting to see the performance gain by combining MOFs with more recent sensors that exploit different elastic wave propagation modes including acoustic-plate-mode and flexural-plate-wave devices.