Journal ArticleDOI
Analytic description of short-channel effects in fully-depleted double-gate and cylindrical, surrounding-gate MOSFETs
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TLDR
In this paper, a simple but powerful evanescent-mode analysis showed that the length /spl lambda/ over which the source and drain perturb the channel potential, is 1/spl pi/ of the effective device thickness in the double-gate case, and 1/4.810 of the cylindrical case, in excellent agreement with PADRE device simulations.Abstract:
Short-channel effects in fully-depleted double-gate (DG) and cylindrical, surrounding-gate (Cyl) MOSFETs are governed by the electrostatic potential as confined by the gates, and thus by the device dimensions. The simple but powerful evanescent-mode analysis shows that the length /spl lambda/, over which the source and drain perturb the channel potential, is 1//spl pi/ of the effective device thickness in the double-gate case, and 1/4.810 of the effective diameter in the cylindrical case, in excellent agreement with PADRE device simulations. Thus for equivalent silicon and gate oxide thicknesses, evanescent-mode analysis indicates that Cyl-MOSFETs can be scaled to 35% shorter channel lengths than DG-MOSFETs.read more
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References
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Journal ArticleDOI
Scaling the Si MOSFET: from bulk to SOI to bulk
R.-H. Yan,Abbas Ourmazd,K.F. Lee +2 more
TL;DR: In this article, the scaling of fully depleted SOI devices is considered and the concept of controlling horizontal leakage through vertical structures is highlighted, and several structural variations of conventional SOI structures are discussed in terms of a natural length scale to guide the design.
Journal ArticleDOI
Scaling theory for cylindrical, fully-depleted, surrounding-gate MOSFET's
C.P. Auth,James D. Plummer +1 more
TL;DR: In this paper, a scaling theory for fully-depleted, cylindrical MOSFET's was presented. But the scaling theory was derived from the cylinrical form of Poisson's equation by assuming a parabolic potential in the radial direction.
Journal ArticleDOI
Scaling theory for double-gate SOI MOSFET's
TL;DR: In this paper, a scaling theory for double-gate SOI MOSFETs is presented, which gives guidance for device design that maintains a sub-threshold factor for a given gate length.
Journal ArticleDOI
Generalized scale length for two-dimensional effects in MOSFETs
TL;DR: In this paper, the authors derived a new scale length for two-dimensional effects in MOSFETs and discussed its significance, and showed that the utility of higher dielectric constant gate insulators decreases for /spl epsiv/expexp/exp/spl/exp eps/exp v/expv//sub 0/>-20 and that in no event should the insulator be thicker than the Si depletion depth.