Atomic force microscopy analysis of surface topography of pure thin aluminum films
27 Apr 2018-Vol. 5, Iss: 4, pp 046416
TL;DR: In this paper, the surface structure evolution, roughness and distribution of thin aluminium thin films were examined and discussed using atomic force microscopy, and the results showed that the morphologies of the surface structures of Al thin films vary with power and substrate type.
Abstract: Pure aluminium thin films were deposited on stainless and mild steel substrates through rf magnetron sputtering at rf powers of 150 and 200 W. Surface analysis of the films was undertaken using atomic force microscopy. The surface structure evolution, roughness and distribution were examined and discussed. Power spectral density, skewness and Kurtosis parameters were used to explain the nature and distribution of the surface structures on the thin aluminium films as reported from the line profile analyses. The result shows that the morphologies of the surface structures of Al thin films vary with power and substrate type. The coatings also exhibited higher roughness at the power of 200 W. A strong link exists between the atomic force microscopy (AFM) observations and scanning electron microscopy (SEM) analysis, which implies that AFM can be considerably used to study the microstructural evolution of thin films prepared by magnetron sputtering.
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TL;DR: In this paper, the micromorphology of tantalum pentoxide (Ta2O5) thin films, deposited on glass substrates by electron gun method, has been analyzed using atomic force microscopy (AFM), UV-Vis-NIR spectrophotometry and multifractal analyses.
Abstract: The micromorphology of tantalum pentoxide (Ta2O5) thin films, deposited on glass substrates by electron gun method, has been analyzed using atomic force microscopy (AFM), UV–Vis–NIR spectrophotometry and multifractal analyses. Two samples were grown at basic pressure of 7 × 10−6 mbar, work pressures of 1.3 × 10−4 and 2.0 × 10−4 mbar, and thicknesses of 0.38 μm and 0.39 μm, respectively. Subsequently, these samples were annealed at 300 °C for 2 h. The physical, structural and optical analyses were investigated by spectroscopic ellipsometry, spectrophotometry and AFM. The measured transmittance spectra were studied based on the Swanepoel method, whose results also yielded to the estimation of the film thickness and the refractive index. Finally, Ta2O5 thin films were characterized by AFM measurements and multifractal analyses for an accurate description of the 3-D surface microtexture features. The fractal examinations of the samples revealed that these microstructures exhibit multifractal characteristics. Essential parameters that characterized the thin films were compared and discussed thoroughly.
47 citations
01 Jan 2020
TL;DR: It is derived that fractal analysis is important in understanding the growth of structures during different manufacturing processes (and parameters) and developing fractal-like structures for enhanced performance in various engineering applications.
Abstract: A review of the applications of fractal theory in modern manufacturing is presented in this chapter. A brief conceptual foundation, typical examples, and methods of computing fractals are summarized. The most common methods of computing fractal dimensions include box-counting, area-based measurements, and fractional Brownian motion (fBm) methods and have been briefly discussed along with the proposed improvements in the literature. It is noted that there are concerted efforts to improve on the known methods to enhance their accuracy and application in various fields. Finally, applications of fractals in thin films, laser processing, machining, and friction stir processes/welding are illustrated based on the published data. It is derived that fractal analysis is important in (1) understanding the growth of structures during different manufacturing processes (and parameters) and (2) developing fractal-like structures for enhanced performance in various engineering applications. Directions for future research and applications of fractal theory in manufacturing and their potentials are described in respective sections of the chapter. The chapter is a useful resource for academic and industry in studying, developing, and manufacturing of fractal-like engineering components and the interrelationships among the manufacturing process, parameters, and fractal characteristics of the engineering product.
38 citations
34 citations
25 Mar 2019
30 citations
TL;DR: In this paper, a monofractal and multifractal approach on quantification of hillocks on Al thin films deposited on glass substrates at a varying substrate temperature (Ts) has been reported.
26 citations
References
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TL;DR: In this paper, the authors review the present understanding of film growth processes and their role in microstructural evolution as a function of deposition variables including temperature, the presence of reactive species, and the use of low-energy ion irradiation during growth.
Abstract: Atomic-scale control and manipulation of the microstructure of polycrystalline thin films during kinetically limited low-temperature deposition, crucial for a broad range of industrial applications, has been a leading goal of materials science during the past decades. Here, we review the present understanding of film growth processes—nucleation, coalescence, competitive grain growth, and recrystallization—and their role in microstructural evolution as a function of deposition variables including temperature, the presence of reactive species, and the use of low-energy ion irradiation during growth.
1,499 citations
TL;DR: In this paper, the power spectral density (PSD) of the surface topography of real-world surfaces has been used for tuning functional properties of surfaces, such as adhesion, friction, and contact conductance.
Abstract: Roughness determines many functional properties of surfaces, such as adhesion, friction, and (thermal and electrical) contact conductance. Recent analytical models and simulations enable quantitative prediction of these properties from knowledge of the power spectral density (PSD) of the surface topography. The utility of the PSD is that it contains statistical information that is unbiased by the particular scan size and pixel resolution chosen by the researcher. In this article, we first review the mathematical definition of the PSD, including the one- and two-dimensional cases, and common variations of each. We then discuss strategies for reconstructing an accurate PSD of a surface using topography measurements at different size scales. Finally, we discuss detecting and mitigating artifacts at the smallest scales, and computing upper/lower bounds on functional properties obtained from models. We accompany our discussion with virtual measurements on computer-generated surfaces. This discussion summarizes how to analyze topography measurements to reconstruct a reliable PSD. Analytical models demonstrate the potential for tuning functional properties by rationally tailoring surface topography - however, this potential can only be achieved through the accurate, quantitative reconstruction of the power spectral density of real-world surfaces.
272 citations
IBM1
01 Mar 1970-Metallurgical and Materials Transactions B-process Metallurgy and Materials Processing Science
TL;DR: In this article, the feasibility of depositing aluminum thin films by means of rf sputtering has been investigated, and film characteristics compatible with the requirements of conductive stripes in integrated circuits have been obtained.
Abstract: The feasibility of depositing aluminum thin films by means of rf sputtering has been investigated. Film characteristics compatible with the requirements of conductive stripes in integrated circuits have been obtained. The rate of film deposition has been related to rf power dissipation, argon pressure, geometry, and magnetic field. Film characteristics such as electrical resistivity, stress, grain size, and orientation have been studied and compared to the characteristics of films deposited by means of evaporation. The effects of annealing on some of these characteristics have been determined.
239 citations
27 Jan 2017
TL;DR: In this article, the power spectral density (PSD) of the surface topography has been used to predict surface properties, such as adhesion, friction, and contact conductance.
Abstract: Roughness determines many functional properties of surfaces, such as adhesion, friction, and (thermal and electrical) contact conductance. Recent analytical models and simulations enable quantitative prediction of these properties from knowledge of the power spectral density (PSD) of the surface topography. The utility of the PSD is that it contains statistical information that is unbiased by the particular scan size and pixel resolution chosen by the researcher. In this article, we first review the mathematical definition of the PSD, including the one- and two-dimensional cases, and common variations of each. We then discuss strategies for reconstructing an accurate PSD of a surface using topography measurements at different size scales. Finally, we discuss detecting and mitigating artifacts at the smallest scales, and computing upper/lower bounds on functional properties obtained from models. We accompany our discussion with virtual measurements on computer-generated surfaces. This discussion summarizes how to analyze topography measurements to reconstruct a reliable PSD. Analytical models demonstrate the potential for tuning functional properties by rationally tailoring surface topography—however, this potential can only be achieved through the accurate, quantitative reconstruction of the PSDs of real-world surfaces.
201 citations
TL;DR: In this paper, the power spectral density (PSD) functions derived from morphologies of various gadolinia thin films have been fitted with a novel multi peak-shifting Gaussian model along with fractal and k-correlation functions, to extract characteristic parameters of the precision surfaces.
101 citations