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Fig. 4. Superposition of the reference and scattered fields in a Mirau objective.
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Journal Article
•
DOI
•
Coherence scanning interferometry: linear theory of surface measurement
[...]
Jeremy M. Coupland
1
,
Rahul Mandal
1
,
Kanik Palodhi
1
,
Richard Leach
2
•
Institutions (2)
Loughborough University
1
,
National Physical Laboratory
2
01 Jun 2013
-
Applied Optics