Journal ArticleDOI
D–Band RF–MEMS SPDT Switch in a $0.13~\mu$ m SiGe BiCMOS Technology
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TLDR
In this paper, the authors presented a D-band (110-170 GHz) RF-MEMS based SPDT switch fabricated in a $0.13~\mu \text {m}$ SiGe BiCMOS technology.Abstract:
This letter presents a D–Band (110–170 GHz) RF–MEMS based Single–Pole Double–Throw (SPDT) switch fabricated in a $0.13~\mu \text {m}$ SiGe BiCMOS technology. The on–wafer S–parameter measurements of the RF–MEMS based SPDT switch show beyond state of the art RF performances, 1.42 dB insertion loss and 54.5 dB isolation at 140 GHz. The SPDT switch consists of a tee junction connected to two Single–Pole Single–Throw (SPST) RF–MEMS switches. The RF–MEMS switch is actuated using 60 V actuation voltage and provides less than $10~\mu \text {s}$ switch–on and switch–off times. To the best of the authors’ knowledge, the results achieved in this study are the lowest insertion loss and the highest isolation of a SPDT reported in D–band.read more
Citations
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Journal ArticleDOI
A novel RF MEMS switch on frequency reconfigurable antenna application
TL;DR: In this paper, a novel radio-frequency micro electromechanical system (RF MEMS) switch on the frequency reconfigurable antenna application was designed, analyzed, and simulated using ANSYS.
Journal ArticleDOI
Comprehensive Study on RF-MEMS Switches Used for 5G Scenario
TL;DR: This paper presents a comprehensive study on radio frequency-microelectromechanical systems (RF-MEMS) switches, which are expected to be extensively integrated into 5G infrastructures and can be beneficial for further RF-Mems switches’ design and improvement.
Journal ArticleDOI
A 125–143-GHz Frequency-Reconfigurable BiCMOS Compact LNA Using a Single RF-MEMS Switch
Julio Heredia,Miquel Ribo,Lluis Pradell,Selin Tolunay Wipf,Alexander Goritz,Matthias Wietstruck,C. Wipf,Mehmet Kaynak +7 more
TL;DR: A systematic general design procedure to obtain a balanced gain and noise figure in both frequency states is proposed and the measured results are in good agreement with simulations.
Proceedings ArticleDOI
0.13-μm SiGe BiCMOS technology with More-than-Moore modules
Mehmet Kaynak,Matthias Wietstruck,Alexander Goritz,S. Tolunay Wipf,Mesut Inac,Barbaros Cetindogan,C. Wipf,C. Baristiran Kaynak,Markus Wöhrmann,S. Voges,Tanja Braun +10 more
TL;DR: Three different technology modules, integrated into a 0.13-μm SiGe BiCMOS process; namely RF-MEMS switch, microfluidics and heterogeneous integration technologies offer a technology platform to follow the More-than-Moore path for multi-functional and smart systems.
Journal ArticleDOI
Design and Performance of a J Band MEMS Switch.
TL;DR: This paper presents a novel J band (220–325 GHz) MEMS switch design, which has achieved a low insertion loss, and shows great potential in the integration for terahertz components.
References
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Proceedings ArticleDOI
Half-Terahertz SiGe BiCMOS technology
TL;DR: In this article, the integration of a new generation of high-speed SiGe HBTs with f T / f max of 300/500 GHz and minimum CML ring oscillator gate delays of 2.0 ps in a 0.13 μm BiCMOS technology is discussed.
Journal Article
High-isolation W-band MEMS switches
TL;DR: In this article, the authors present the design, fabrication and measurement of single, T-match and π-match W-band high-isolation MEMS shunt switches on silicon substrates.
Journal ArticleDOI
140–220 GHz SPST and SPDT Switches in 45 nm CMOS SOI
Mehmet Uzunkol,Gabriel M. Rebeiz +1 more
TL;DR: In this article, a tuned-shunt topology is used to minimize the insertion loss, and the transistor layout results in very low ground inductance and high isolation for 140-220 GHz single-pole single-throw (SPST) switches built using 45 nm semiconductor-on-insulator (SOI) technology.
Journal ArticleDOI
High-isolation W-band MEMS switches
TL;DR: In this paper, the authors present the design, fabrication and measurement of single, T-match and /spl pi/-match W-band high-isolation MEMS shunt switches on silicon substrates.
Proceedings ArticleDOI
BEOL embedded RF-MEMS switch for mm-wave applications
Mehmet Kaynak,K.-E. Ehwald,J. Drews,R. Scholz,F. Korndorfer,D. Knoll,Bernd Tillack,R. Barth,Mario Birkholz,K. Schulz,Yaoming Sun,D. Wolansky,S. Leidich,S. Kurth,Yasar Gurbuz +14 more
TL;DR: In this paper, the authors demonstrate the embedded integration of a RF-MEMS capacitive switch for mm-wave integrated circuits in a BiCMOS Back-end-of-line (BEOL).