Journal ArticleDOI
Design and analysis of MEMS piezoresistive rectangular paddle microcantilever based wind speed sensor
Reads0
Chats0
TLDR
In this article, a wind speed sensor based on MEMS piezoresistive microcantilever is presented, which is based on the drag force of the wind flow on any...Abstract:
This paper presents design, simulation and finite element analysis of a wind speed sensor based on MEMS piezoresistive microcantilever. The design is based on the drag force of the wind flow on any...read more
Citations
More filters
Journal ArticleDOI
A Compact Optical MEMS Pressure Sensor Based on Fabry–Pérot Interference
TL;DR: In this paper , a compact optical Fabry-Pérot (FP) pressure sensor for wind pressure measurement was developed by MEMS technology, which consists of a MEMS sensing chip, a vertical-cavity surface-emitting laser (Vcsel), and a photodiode (PD).
Journal ArticleDOI
Sensitivity and reliability enhancement of a MEMS based wind speed sensor
TL;DR: In this paper, shape modification of microcantilever to enhance the sensitivity and reliability of a MEMS-based wind speed sensor is described, and the experimental results have been compared to evaluate the performance of the fabricated sensor.
References
More filters
Book
Fundamentals of microfabrication
TL;DR: The second edition of the Fundamentals of Microfabrication as discussed by the authors provides an in-depth coverage of the science of miniaturization, its methods, and materials, from the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering.
Book
Fundamentals of microfabrication : the science of miniaturization
TL;DR: In this paper, a comparison of top-down and bottom-up manufacturing methods for micro-manufacturing is presented, with a focus on the use of micro-processors.
Journal ArticleDOI
Micromachined flow sensors—a review
TL;DR: A review of the research and development of micromachined flow sensors which have been done in the last few years by international academic and industrial institutions can be found in this article, which covers the need of low-cost, accurate and reliable sensors for industrial and consumer product applications.
Journal ArticleDOI
Design and fabrication of artificial lateral line flow sensors
TL;DR: In this article, the authors report the development of micromachined, distributed flow sensors based on a biological inspiration, the fish lateral line sensors, and design and fabrication processes for realizing individual lateral line sensor nodes are discussed.
Journal ArticleDOI
Vapor detection using resonating microcantilevers
TL;DR: In this paper, changes in the resonance frequency of microcantilevers due to adsorption of analyte vapor on exposed surfaces is shown to provide a novel means for detection of the analyte.