Journal ArticleDOI
Design and fabrication of a reduced stiction radio frequency MEMS switch
Deepak Bansal,Deepak Bansal,Anuroop Bajpai,Pramod Kumar,Amit Kumar,Amit Kumar,Maninder Kaur,Kamaljit Rangra,Kamaljit Rangra +8 more
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TLDR
In this article, the design, fabrication, and mechanical characterization of a compact-reduced stiction see-saw radio frequency MEMS switch is presented, which has a resonance frequency of 9.8 kHz with a corresponding switching speed of 46μs.Abstract:
The design, fabrication, and mechanical characterization of a compact-reduced stiction see-saw radio frequency MEMS switch are presented. The switch has a resonance frequency of 9.8 kHz with a corresponding switching speed of 46 μs. Use of a floating metal layer and optimal contact area ensures reduced stiction and smaller capacitive leakage. Overall size of the switch is 0.535 (0.50×1.070) mm2. Reduction in up-state capacitance also results in improvement in self-actuation voltage, insertion, and return loss. The optimized topology has improved the stiction and power handling of the switch.read more
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Journal ArticleDOI
Low voltage driven RF MEMS capacitive switch using reinforcement for reduced buckling
Deepak Bansal,Deepak Bansal,Anuroop Bajpai,Pramod Kumar,Maninder Kaur,Amit Kumar,Amit Kumar,Achu Chandran,Kamaljit Rangra,Kamaljit Rangra +9 more
TL;DR: In this paper, a low voltage driven RF MEMS capacitive switch with the introduction of perforations and reinforcement is proposed, which reduces the pull-in voltage from 70 V to 16.2 V and the magnitude of deformation from 8 µm to 1 µm.
Journal ArticleDOI
A novel capacitive RF-MEMS switch for multi-frequency operation
TL;DR: In this article, a novel capacitive RF-MEMS switch is realized through two non-uniform cantilevers with dissimilar shape to achieve the different value of inductance in the downstate of the device and hence the different electrical resonant frequency.
Journal ArticleDOI
Fabrication and analysis of radiofrequency MEMS series capacitive single-pole double-throw switch
TL;DR: In this paper, a single-pole double-throw (SPDT) switch based on series capacitive configuration is proposed, and the critical process parameters are analyzed to improve the fabrication process.
Journal ArticleDOI
Performance analysis of EBG bandstop filter using U: shaped meander type electrostatically actuated RF MEMS switch
TL;DR: A reconfigurable band stop filter is designed by integrating RF MEMS switch and Filter for Ku-band frequency application using COMSOL and HFSS FEM tools to understand the electromechanical and electromagnetic characteristics of both switch and filter.
Journal ArticleDOI
Low Actuating Voltage Spring-Free RF MEMS SPDT Switch
TL;DR: A see-saw single pole double throw (SPDT) RF MEMS switch based on anchor-free mechanism is proposed which eliminates the above-mentioned disadvantages of MEMS devices.
References
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Book
RF MEMS: Theory, Design, and Technology
TL;DR: In this paper, the basics of RF MEMS and how to design practical devices and circuits are discussed, as well as expert tips for designers and a range of real-world applications.
Journal ArticleDOI
RF MEMS switches and switch circuits
TL;DR: In this paper, the authors concentrate on electrostatic switches at 0.1-100 GHz with high reliability (100 million to 10 billion cycles) and wafer-scale manufacturing techniques.
Journal ArticleDOI
Stiction in surface micromachining
TL;DR: In this article, four major adhesion mechanisms have been analyzed: capillary forces, hydrogen bridging, electrostatic forces and van der Waals forces, and they have been successfully reduced.
Journal ArticleDOI
Extending the travel range of analog-tuned electrostatic actuators
E.S. Hung,S.D. Senturia +1 more
TL;DR: In this paper, the authors examined the "leveraged bending" and "strain-stiffening" methods for extending the travel range of elastically suspended parallel-plate electrostatic microactuators.
Journal ArticleDOI
Mechanics of adhesion in MEMS - a review
Ya-Pu Zhao,Lisen Wang,Tongxi Yu +2 more
TL;DR: A review of the mechanics of microscale adhesion in microelectromechanical systems (MEMS) is presented in this article, where dimensionless numbers such as Tabor number, adhesion parameter and peel number for microscale elastic adhesion contact are discussed in detail.