Design and Simulation of A Novel Piezoelectric AlN-Si Cantilever Gyroscope.
Reads0
Chats0
TLDR
A novel design of piezoelectric aluminum nitride (AlN)-Si composite cantilever gyroscope is proposed, which has a small size and simple structure and will be a better choice for the consumer electronics.Abstract:
A novel design of piezoelectric aluminum nitride (AlN)-Si composite cantilever gyroscope is proposed in this paper. The cantilever is stimulated to oscillate in plane by two inverse voltages which are applied on the two paralleled drive electrodes, respectively. The whole working principles are deduced, which based on the piezoelectric equation and elastic vibration equation. In this work, a cantilever gyroscope has been simulated and optimized by COMSOL Multiphysics 5.2a. The drive mode frequency is 87.422 kHz, and the sense mode frequency is 87.414 kHz. The theoretical sensitivity of this gyroscope is 0.145 pm/◦/s. This gyroscope has a small size and simple structure. It will be a better choice for the consumer electronics.read more
Citations
More filters
Journal ArticleDOI
A T-Shape Aluminum Nitride Thin-Film Piezoelectric MEMS Resonant Accelerometer
TL;DR: In this article, a novel aluminum nitride (AlN) resonant micro-electromechanical systems (MEMS) accelerometer is reported, where the spring beams are T-shaped with two masses hanged at the end.
Journal ArticleDOI
A Resonant Z-Axis Aluminum Nitride Thin-Film Piezoelectric MEMS Accelerometer.
Jian Yang,Meng Zhang,Yurong He,Yan Su,Guowei Han,Chaowei Si,Jin Ning,Fuhua Yang,Xiaodong Wang +8 more
TL;DR: A novel aluminum nitride (AlN) thin-film piezoelectric resonant accelerometer, whose entire structure, including the mass and the springs, is excited to resonate in-plane, and the resonance frequency is sensitive to the out-plane acceleration.
Journal ArticleDOI
An Autonomous Vehicle Navigation System Based on Inertial and Visual Sensors.
TL;DR: Experimental results show that the proposed inertial-visual navigation system can mitigate the SINS drift and improve the accuracy, stability, and reliability of the navigation system.
Journal ArticleDOI
A High-Dynamic-Range Switched-Capacitor Sigma-Delta ADC for Digital Micromechanical Vibration Gyroscopes
TL;DR: A multi-stage noise shaping (MASH) switched-capacitor (SC) sigma-delta (ΣΔ) analog-to-digital converter (ADC) composed of an analog modulator with an on-chip noise cancellation logic and a reconfigurable digital decimator for MEMS digital gyroscope applications.
References
More filters
Journal ArticleDOI
Thickness dependence of the properties of highly c-axis textured AlN thin films
TL;DR: In this paper, the influence of film thickness on the material properties of aluminum nitride (AlN) thin films deposited on Pt(111) electrodes has been investigated experimentally by means of x-ray diffraction, dielectric response, atomic force microscopy, interferometry measurement of effective d33, and residual stress measurement.
Journal ArticleDOI
Simulation and laser vibrometry characterization of piezoelectric AlN thin films
J. Hernando,José Luis Sánchez-Rojas,S. González-Castilla,Enrique Iborra,Abdallah Ababneh,Ulrich Schmid +5 more
TL;DR: In this article, the displacement of the top and bottom surfaces of both the thin film and the substrate for either a free or a perfectly clamped structure was studied by numerical calculations and scanning laser interferometric measurements.
Journal ArticleDOI
Activity Recognition Using Fusion of Low-Cost Sensors on a Smartphone for Mobile Navigation Application
Sara Saeedi,Naser El-Sheimy +1 more
TL;DR: A comparison has been conducted on different sensor data, feature spaces and feature selection methods to increase the efficiency and reduce the computation cost of activity recognition on the smartphones to show that the Bayesian Network classifier yields recognition accuracy of 96.21% using four features while requiring fewer computations.
Journal ArticleDOI
High-Frequency AlN-on-Silicon Resonant Square Gyroscopes
TL;DR: In this paper, a high-frequency resonant square micro-gyroscope using piezoelectric transduction was presented, achieving linear rate sensitivity of 20.38 μV/°/s when operating in its first flexural mode at ~ 11 MHz.
Proceedings ArticleDOI
A dynamically mode-matched piezoelectrically transduced high-frequency flexural disk gyroscope
TL;DR: In this paper, a dynamic mode-matching high-frequency piezoelectrically transduced silicon disk gyroscope utilizing a unique pair of degenerate orthogonal in-plane flexural gyroscopic modes is presented.
Related Papers (5)
Design and analysis of slotted cantilever structure for piezoelectric energy harvesting
Prateek Asthana,Gargi Khanna +1 more