Design and testing of a compliant mechanism-based XYθ stage for micro/nanopositioning
TL;DR: A compliant mechanism-based micro/nanopositioning stages are used to perform high precision motion in various fields and various methods to achieve the compliant status are proposed.
Abstract: A compliant mechanism-based micro/nanopositioning stages are used to perform high precision motion in various fields. In recent years, researches proposed various methods to achieve the compliant m...
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TL;DR: In this article , a constraint-flow based method is proposed to synthesize compliant parallel mechanisms (CPMs) with decoupled motion and actuation characteristics for increasing applications from semiconductor manufacture to bio-nanotechnology.
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TL;DR: The progresses of different modeling and control approaches for piezo-actuated nanopositioning stages are discussed and new opportunities for the extended studies are highlighted.
Abstract: Piezo-actuated stages have become more and more promising in nanopositioning applications due to the excellent advantages of the fast response time, large mechanical force, and extremely fine resolution. Modeling and control are critical to achieve objectives for high-precision motion. However, piezo-actuated stages themselves suffer from the inherent drawbacks produced by the inherent creep and hysteresis nonlinearities and vibration caused by the lightly damped resonant dynamics, which make modeling and control of such systems challenging. To address these challenges, various techniques have been reported in the literature. This paper surveys and discusses the progresses of different modeling and control approaches for piezo-actuated nanopositioning stages and highlights new opportunities for the extended studies.
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447 citations
TL;DR: In this article, a flexure-based, piezoelectric stack-actuated XY nanopositioning stage was designed to combine the ability to scan over a relatively large range (25times25 mum) with high scanning speed.
Abstract: The design, identification, and control of a novel, flexure-based, piezoelectric stack-actuated XY nanopositioning stage are presented in this paper. The main goal of the design is to combine the ability to scan over a relatively large range (25times25 mum) with high scanning speed. Consequently, the stage is designed to have its first dominant mode at 2.7 kHz. Cross-coupling between the two axes is kept to -35 dB, low enough to utilize single-input--single-output control strategies for tracking. Finite-element analysis (FEA) is used during the design process to analyze the mechanical resonance frequencies, travel range, and cross-coupling between the X- and Y-axes of the stage. Nonlinearities such as hysteresis are present in such stages. These effects, which exist due to the use of piezoelectric stacks for actuation, are minimized using charge actuation. The integral resonant control method is applied in conjunction with feedforward inversion technique to achieve high-speed and accurate scanning performances, up to 400 Hz.
347 citations
TL;DR: The kinematic and dynamic modeling of the manipulator are conducted by resorting to compliance and stiffness analysis based on the matrix method, which are validated by finite-element analysis (FEA).
Abstract: In this paper, a concept of totally decoupling is proposed for the design of a flexure parallel micromanipulator with both input and output decoupling. Based on flexure hinges, the design procedure for an XY totally decoupled parallel stage (TDPS) is presented, which is featured with decoupled actuation and decoupled output motion as well. By employing (double) compound parallelogram flexures and a compact displacement amplifier, a class of novel XY TDPS with simple and symmetric structures are enumerated, and one example is chosen for further analysis. The kinematic and dynamic modeling of the manipulator are conducted by resorting to compliance and stiffness analysis based on the matrix method, which are validated by finite-element analysis (FEA). In view of predefined performance constraints, the dimension optimization is carried out by means of particle swarm optimization, and a prototype of the optimized stage is fabricated for performance tests. Both FEA and experimental studies well validate the decoupling property of the XY stage that is expected to be adopted into micro-/nanoscale manipulations.
336 citations
TL;DR: In this paper, a flexure-based compound bridge-type (CBT) displacement amplifier for piezoelectric drives is investigated, and the derived models are utilized to optimize the amplifier structure through particle swarm optimization (PSO).
206 citations