Journal ArticleDOI
Design, Modeling and Fabrication of TPoS MEMS Resonators With Improved Performance at 1 GHz
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In this paper, the effects of physical dimensions such as length, width and thickness as well as the mode of vibration and the number of anchors on the performance of longitudinal thin film piezoelectric on silicon (TPoS) MEMS resonators have been studied.Abstract:
In this work, the effects of physical dimensions such as length, width and thickness as well as the mode of vibration and the number of anchors on the performance of longitudinal thin film piezoelectric on silicon (TPoS) MEMS resonators have been studied. TPoS resonators, designed for a resonant frequency of around 1 GHz, were fabricated with a 4 mask CMOS compatible process. A $225~\mu \text{m}$ wide resonator excited in its $23^{rd}$ order had an unloaded quality factor of 9453 (in vacuum), which is the highest value reported so far for similar resonators, motional resistance of $107~\Omega $ and linear thermal coefficient of frequency of -28.4 ppm. We have also studied and modeled the different loss mechanisms in these devices. The model matches well with measured results for resonators of different geometries, modes of vibrations and number of anchors. [2020-0397]read more
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Journal ArticleDOI
Effect of Phononic Crystal Orientation on AlN-on-Silicon Lamb Wave Micromechanical Resonators
TL;DR: In this article , the effect of orientation on the acoustic band gap (ABG) of two PnC designs and their effect on boosting quality factor (Q) of AlN-on-Silicon Lamb Wave Resonators (LWRs) was explored.
Effect of Phononic Crystal Orientation on AlN-on-Silicon Lamb Wave Micromechanical Resonators
TL;DR: In this article , the effect of orientation on the acoustic band gap (ABG) of two PnC designs and their effect on boosting quality factor (Q) was explored, and it was shown that adding a hole into the disk to form a ring changes its ABG to be much more sensitive to orientation.
Proceedings ArticleDOI
Effect of Undercut due to Isotropic Etch while Releasing on the Performance of TPoS Resonators
TL;DR: In this paper , the effect of additional loss due to the isotropic etch used to release the extensional mode thin piezoelectric on silicon (TPoS) resonators is reported and validated.
Proceedings ArticleDOI
Effect of Undercut due to Isotropic Etch while Releasing on the Performance of TPoS Resonators
TL;DR: In this paper , the effect of additional loss due to the isotropic etch used to release the extensional mode thin piezoelectric on silicon (TPoS) resonators is reported and validated.
References
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MEMS technology for timing and frequency control
TL;DR: As vibrating RF MEMS devices are perceived more as circuit building blocks than as stand-alone devices, and as the frequency processing circuits they enable become larger and more complex, the makings of an integrated micromechanical circuit technology begin to take shape, perhaps with a functional breadth not unlike that of integrated transistor circuits.
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Piezoelectric-on-Silicon Lateral Bulk Acoustic Wave Micromechanical Resonators
TL;DR: In this article, the design, fabrication, and characterization of piezoelectrically-transduced micromechanical single-crystal-silicon resonators operating in their lateral bulk acoustic modes to address the need for high-Q microelectronic-integrable frequency-selective components is presented.
Proceedings ArticleDOI
Effect of phonon interactions on limiting the f.Q product of micromechanical resonators
TL;DR: In this paper, the authors discuss the contribution of phonon interactions in determining the upper limit of the f.Q product in micromechanical resonators, and show that for frequencies higher than ω τ = 1/τ, where τ is the phonon relaxation time, the FQ product is no longer constant but a linear function of frequency.
Journal ArticleDOI
Micromachined Resonators: A Review
TL;DR: A review of the remarkable progress that has been made during the past few decades in design, modeling, and fabrication of micromachined resonators with references to the most influential contributions in the field for those interested in a deeper understanding of the material.
Journal ArticleDOI
In-plane acoustic reflectors for reducing effective anchor loss in lateral?extensional MEMS resonators
TL;DR: In this paper, in-plane acoustic reflectors are proposed to enhance the quality factor (Q) in lateral-mode micromachined resonators, which can reduce the overall anchor loss with minimum modification in the resonator design.