Development of Wobble Motor.
01 Jan 1992-Transactions of the Japan Society of Mechanical Engineers. C-Vol. 58, Iss: 549, pp 1628-1633
TL;DR: In this article, the results of the development of the electrostatic microrotational motor, the so-called wobble motor, have been analyzed by the boundary element method.
Abstract: This paper deals with some results of development of the electrostatic microrotational motor : the so-called wobble motor. A rotor of the wobble motor revolves inside a stator with rotation on its own axis. The rotational speed on its own axis is less than the revolutional speed. Then, if the rotational speed can be taken out, this motor develops low-speed, high-torque characteristics. The size of the developed motor is 9 mm in outer diameter and 23 mm in length. The generated static torque of two rotors of different sizes has been analyzed by the boundary element method. The experiment for confirmation of the analyzed results has been carried out, and satisfactory results have been obtained. On the basis of these confirmed theoretical results, the optimal design factors are explained.
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26 Jan 1997
TL;DR: In this article, a micro electrostatic wobble motor with toothed electrodes has been designed using a newly proposed tooth profile, which is called the "composite profile". This new design results from considering the profile of the noncontact area, on which the generated electrostatic torque depends.
Abstract: A micro electrostatic wobble motor with toothed electrodes has been designed using a newly proposed tooth profile, which we call the "composite profile". This new design results from considering the profile of the non-contact area, on which the generated electrostatic torque depends. The new tooth profile eliminates slip between stator and rotor, so complete wobble motions are achieved even when a large load is applied. A micro wobble motor based on this design was fabricated by micro-wire electrical discharge machining. The motor is 6 mm in gear pitch diameter and 3 mm in thickness. The module of the teeth is 0.063, and the tooth numbers of the stator and rotor are 96 and 95, respectively. Experimental results show that the stall torque was about 0.015 mNm with a 350 V supply and the motor maintained an almost constant speed and full wobble motion until just before stalling. We conclude that toothed electrodes with the proposed profile are a very effective way to achieve complete wobble motion even when a large load is applied.
26 citations
25 Jan 1994
TL;DR: In this paper, a new fabrication technique based on assembly-free process is developed to produce wobble motors with both sufficient mechanical strength and appropriate interface to other devices, such as MEMS.
Abstract: For practical applications of wobble motors to MEMS, we have developed a new fabrication technique. This technique is based on assembly-free process and can produce wobble motors with both sufficient mechanical strength and appropriate interface to other devices. This new process features the concentric build-up of layers around a cylindrical substrate and three dimensional bulk structures can be easily produced by microfabrication methods. In this paper, we present the details of this novel fabrication technique and show the experimental results of the fabricated wobble motors.
12 citations