Drain Current Optimization in DIBS-Grown MgZnO/CdZnO HFET
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...application displaying strong 2-D electron gas density (2DEG) [13], [14]....
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References
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"Drain Current Optimization in DIBS-..." refers background in this paper
...6 in the barrier layer of the MgxZn1−x O, which is difficult to fabricate without causing phase separation [3]–[5]....
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Additional excerpts
...Prior to film deposition, in order to remove organic contaminants and native oxide, the Si substrate is thoroughly cleaned, details of which are described in our previous work [14]....
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"Drain Current Optimization in DIBS-..." refers background in this paper
...This could probably be due to the formation of a TiOx monolayer at the MgZnO–Ti interface [24]....
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"Drain Current Optimization in DIBS-..." refers background in this paper
...[7] have achieved ns ∼ 1014 cm−2 for x ≥ 0....
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...The SAED patterns of the MZO and MCO-II show a nearly crystalline lattice pattern of the grown heterostructures, which can be attributed to the pattern observed in the [1̄ 2 1̄ 0] axis of the wurtzite crystal [7], as opposed to the definitive...
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...The drawback observed in the DIBS-grown MCO heterostructure was one order lower electron mobility (μ ≈ 3 cm2V−1s−1) [9], when compared to the sputtered MZO heterostructure (∼30 cm2V−1s−1) [6], [7] at barrier layer thickness (tb) = 30 nm and x = 0....
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