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Proceedings ArticleDOI

Effect of tool shape and tool feed rate on the machined profile of a quartz substrate using an electrochemical discharge machining process

07 Mar 2015-pp 313-316
TL;DR: In this paper, the results of the combined effects of tool feed-rate and tool shape on the micro-machining of a quartz substrate using an ECDM process are presented.
Abstract: Electro-chemical discharge machining (ECDM) is a recent technique used to machine insulating materials like glass and ceramics. This paper presents the results of the combined effects of tool feed-rate and tool shape on the micro-machining of a quartz substrate using an ECDM process. The investigations show that a tool with a spherical tip provides a profile with a reduced entrance diameter and the overcut can be considerably reduced by controlling the tool feed-rate.
Citations
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Journal ArticleDOI
TL;DR: In this article, the state-of-the-art mechanism for the generation of spark by means of micro-electrochemical discharge machining (µ-ECDM) process is reviewed.
Abstract: The present study reviews the state-of-the-art mechanism for the generation of spark by means of micro-electrochemical discharge machining (µ-ECDM) process. It also describes various electr...

65 citations


Cites background or methods from "Effect of tool shape and tool feed ..."

  • ...[142] Yang et al.[138] observed that tungsten carbide tool enables to drill a hole with minimum average diameter and tool wear along with maximum machining control in contrast to stainless steel and tungsten tool under same machining condition....

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  • ...Carbon alloy steel([65]) Platinum electrode([65]) Graphite([75]) 304 stainless steel([106]) High speed steel([78]) Platinum foil([137]) Copper tool([133]) Copper plate([133]) Tungsten carbide([138]) Graphite([139]) Nickel plate([134]) 304Stainless Steel([138]) Brass wire([140]) Brass([141]) Steel([142]) Tungsten([142]) End flatted HSS drilling tool([143]) CuZn73brasswire([144]) S-3748/T35Cr5Mo1V30([145]) 378 N....

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  • ...surface texture tool fabricated on the brass wire([134]) EDM Enhanced the discharge frequency....

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  • ...Yang et al.([134]) improved the quality of the slit by using SiC abrasive-electrolyte mix while carrying out machining operation on pyrex glass by W-ECDM....

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  • ...Yang et al.[134] improved the quality of the slit by using SiC abrasive-electrolyte mix while carrying out machining operation on pyrex glass by W-ECDM....

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Journal ArticleDOI
TL;DR: In this paper, the influence of various process parameters like electrolyte type, electrolytic concentration, tool travel rate (TTR) and applied voltage on the process characteristics have been studied. But the authors did not consider the impact of these parameters on the quality of the machined channels.
Abstract: Electrochemical discharge machining (ECDM) process is a recent non-traditional machining technique used for structuring insulating materials like glass and ceramic substrates. In this work, systematic experimental investigations have been carried out to study the electrical and 2-D machining characteristics of an ECDM process. The influence of various process parameters like electrolyte type, electrolytic concentration, tool travel rate (TTR) and applied voltage on the process characteristics have been studied. Two different electrolytes, i.e., KOH and NaOH with concentrations varying from 10 to 50 % have been used to study their effect on critical voltage (Vc) and critical current (Ic). A cylindrical tungsten carbide tool of diameter 0.4 mm with varying TTRs (ranging from 0.3 to 4 mm/min) and an applied voltage varying from Vc + 2 V to Vc + 5 V is used for realizing microchannels. The influence of these parameters on the quality factors such as geometric accuracy, surface smoothness and channel outlines are explored using the optical images of the machined channels. Experimental results demonstrate that precise channels with smooth surface, and regular channel edges can be obtained at an applied voltage of Vc + 4 V and TTRs between 1 and 2 mm/min.

25 citations

Journal ArticleDOI
TL;DR: In this paper, a room temperature coated thick insulating film for improving the quality of the microchannels realized using a Spark assisted chemical engraving (SACE) process is presented.
Abstract: Microfluidics is an emerging field giving rise to a number of scientific developments with wide applications in proteomics, genomics, DNA analysis, drug delivery systems and lab-on-a-chip. Among the various microfluidic structures, microchannels form an integral part of Lab-on-a-chip devices for clinical diagnosis. The geometrical accuracy and surface finish quality of the microchannels affect the performance of microfluidic systems, thereby demanding a precise microfabrication technique for realizing microchannels. Spark assisted chemical engraving (SACE) is an effective hybrid micromachining technique used for micro-structuring non-conducting substrates such as glass and ceramics. In the present work, we report on a room temperature coated thick insulating film for improving the quality of the microchannels realized using a SACE process. The insulator film coated around a tool electrode confines the spark discharges only to the bottom surface of the tool. Moreover, the proposed insulator coating...

25 citations

Journal ArticleDOI
TL;DR: In this article, the authors created high aspect ratio microgroove in hard, brittle materials using an electrochemical discharge machining (ECDM) process by introducing microtextured machining tool.
Abstract: In this study, we created high-aspect-ratio microgrooves in hard, brittle materials using an electrochemical discharge machining (ECDM) process by introducing microtextured machining tool. To enhance the electrical discharge activity, the morphology of the tool side surface was treated via micro-electrical discharge machining to produce fine microprotrusive patterns. The resulting microtextured surface morphology enhanced the electric field and played a key role in improving the step milling depth in the ECDM process. Using the FEM analysis, the evaluation of the field enhancement factor is also addressed. Our experimental investigation revealed microgrooves having an aspect ratio of 1:4, with high geometric accuracy and crack-free surfaces, using one-step ECDM.

24 citations

References
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Journal ArticleDOI
TL;DR: TTL-based circuitry for measuring the resonant frequency of an oscillating quartz crystal having one face in contact with an electrolytic solution is described in this article, where the effect of double layer structure and specific adsorption is discussed.

737 citations


"Effect of tool shape and tool feed ..." refers methods in this paper

  • ...It is used for fabricating MEMS devices like gyro sensors [1], tuning fork resonators [2], quartz crystal microbalance [3], gas sensors [4], etc....

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Journal ArticleDOI
TL;DR: In this paper, a novel gas sensor composed of electrospun nanofibrous membranes and quartz crystal microbalance (QCM) was successfully fabricated, which can be deposited on the surface of QCM by electrospinning the homogenous blend solutions of cross-linkable poly(acrylic acid) (PAA) and poly(vinyl alcohol)(PVA).
Abstract: A novel gas sensor composed of electrospun nanofibrous membranes and quartz crystal microbalance (QCM) was successfully fabricated. The electrospun nanofibers with diameter of 100–400 nm can be deposited on the surface of QCM by electrospinning the homogenous blend solutions of cross-linkable poly(acrylic acid) (PAA) and poly(vinyl alcohol) (PVA). A series of nanofibrous membranes with various weight percentage of PAA to PVA were fabricated and characterized regarding their morphology and sensitivity to NH 3 . Sensing experiments were examined by measuring the resonance frequency shifts of QCM which due to the additional mass loading. The results showed that the sensing properties were mainly affected by the content of PAA component in nanofibrous membranes, concentration of NH 3 , and relative humidity. Additionally, the sensitivity of nanofibrous membranes coated (NMC) QCM sensor was much higher than that of continuous films coated QCM sensor.

242 citations


"Effect of tool shape and tool feed ..." refers methods in this paper

  • ...It is used for fabricating MEMS devices like gyro sensors [1], tuning fork resonators [2], quartz crystal microbalance [3], gas sensors [4], etc....

    [...]

Journal ArticleDOI
TL;DR: In this article, a theoretical model of the electrochemical discharge phenomenon was developed and the critical voltage and current required to initiate discharge between the electrode and the electrolyte were estimated. But the model was not applied to the case of nonconducting work materials.

161 citations


Additional excerpts

  • ...[14] proposed an analytical model for the material removal rate (MRR), critical voltage and critical current showing their dependence on the process parameters like electrolyte type, electrolytic concentration and tool dimensions....

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Journal ArticleDOI
TL;DR: In this article, an inductively coupled plasma reactive ion etching (ICP RIE) using SF 6 gas has been applied to the Deep RIE of quartz plate to achieve high etch rate (∼0.5 μm/min) and mirror surface (roughness, ∼2 nm) were achieved at the conditions of low process pressure (2 mTorr) and high self-bias voltage (−340 V).
Abstract: In this paper, we present a one-chip multichannel quartz crystal microbalance (QCM) sensor fabricated by deep reactive ion etching (Deep RIE). An inductively coupled plasma reactive ion etching (ICP RIE) using SF 6 gas has been applied to the Deep RIE of quartz. High etch rate (∼0.5 μm/min) and mirror surface (roughness, ∼2 nm) were achieved at the conditions of low process pressure (2 mTorr) and high self-bias voltage (−340 V). The multichannel QCM sensor, which has different resonance frequencies, was formed by fabricating diaphragms of different thicknesses on a single crystal of quartz plate. The resonance frequencies ranged from 21.7 to 20.75 MHz. The Q factors of each peak were approximately 2000 in air and the resolution for mass change was ±1 ng on 2-mm-diameter electrode. We have successfully shown that the sensor with different coating films can be applied to chemometric odor sensor.

150 citations


"Effect of tool shape and tool feed ..." refers background in this paper

  • ...Deep reactive ion etching [6] can provide high aspect ratio anisotropic structures, but is a cost intensive process....

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Journal ArticleDOI
TL;DR: In this article, a successful attempt has been made to develop an EMM setup for carrying out in depth independent research for achieving satisfactory control of electrochemical machining process parameters to meet the micromachining requirements.
Abstract: A better understanding of high rate anodic dissolution processes is urgently required for electrochemical micromachining (EMM) to become a widely employed manufacturing process in the electronic and precision manufacturing industries particularly in the micromanufacturing domain. A successful attempt has been made to develop an EMM setup for carrying out in depth independent research for achieving satisfactory control of electrochemical machining process parameters to meet the micromachining requirements. The developed EMM setup mainly consists of various sub-components and systems, e.g., mechanical machining unit, microtooling system, electrical power and controlling system and controlled electrolyte flow system, etc. All these system components are integrated in such a way that the developed EMM system setup will be capable of performing basic and fundamental research in the area of EMM fulfilling the requirements of micromachining objectives.

141 citations


"Effect of tool shape and tool feed ..." refers background in this paper

  • ...Electrochemical discharge machining (ECDM) is a recent hybrid [10, 11] (electro discharge machining (EDM) + electrochemical machining (ECM)) micro-machining process that has gained a lot of attention in the recent past....

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  • ...It is a cost effective nonconventional machining technique that can machine nonconducting materials like ceramics and glass unlike the EDM [12] and the ECM [13] processes....

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