Electrical Contact Resistance Degradation of a Hot-Switched Simulated Metal MEMS Contact
19 Mar 2007-IEEE Transactions on Components and Packaging Technologies (IEEE)-Vol. 30, Iss: 1, pp 75-80
TL;DR: In this paper, a simulated gold-platinum metal microelectromechanical system contact was hot-switched to determine the sensitivity of the contact resistance degradation to current level and environment, and the mechanism responsible for resistance degradation was found to be arc-induced decomposition of adsorbed surface contaminants.
Abstract: Electrical contact resistance testing was performed by hot-switching a simulated gold-platinum metal microelectromechanical systems contact. The experimental objective was to determine the sensitivity of the contact resistance degradation to current level and environment. The contact resistance increased sharply after 100hot-switched cycles in air. Hot-switching at a reduced current and in nitrogen atmosphere curtailed contact resistance degradation by several orders of magnitude. The mechanism responsible for the resistance degradation was found to be arc-induced decomposition of adsorbed surface contaminants
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TL;DR: In this article, a review of the important characteristics of the contact interface such as modeling and material choice is discussed. And a brief comparison of actuation methods is provided to show why electrostatic actuation is most commonly used by radio frequency microelectromechanical systems designers.
Abstract: Innovations in relevant micro-contact areas are highlighted, these include, design, contact resistance modeling, contact materials, performance and reliability. For each area the basic theory and relevant innovations are explored. A brief comparison of actuation methods is provided to show why electrostatic actuation is most commonly used by radio frequency microelectromechanical systems designers. An examination of the important characteristics of the contact interface such as modeling and material choice is discussed. Micro-contact resistance models based on plastic, elastic-plastic and elastic deformations are reviewed. Much of the modeling for metal contact micro-switches centers around contact area and surface roughness. Surface roughness and its effect on contact area is stressed when considering micro-contact resistance modeling. Finite element models and various approaches for describing surface roughness are compared. Different contact materials to include gold, gold alloys, carbon nanotubes, composite gold-carbon nanotubes, ruthenium, ruthenium oxide, as well as tungsten have been shown to enhance contact performance and reliability with distinct trade offs for each. Finally, a review of physical and electrical failure modes witnessed by researchers are detailed and examined.
122 citations
TL;DR: In this article, a review of recent contributions from recent experimental investigations of three classes of materials that exhibit uniquely contrasting tribological behaviors: metals, polymers, and ionic solids is presented.
Abstract: From the context of a contemporary understanding of the phenomenological origins of friction and wear of materials, we review insightful contributions from recent experimental investigations of three classes of materials that exhibit uniquely contrasting tribological behaviors: metals, polymers, and ionic solids. We focus on the past decade of research by the community to better understand the correlations between environment parameters, materials properties, and tribological behavior in systems of increasingly greater complexity utilizing novel synthesis and in situ experimental techniques. In addition to such review, and a half-century after seminal publications on the subject, we present recently acquired evidence linking anisotropy in friction response with anisotropy in wear behavior of crystalline ionic solids as a function of crystallographic orientation. Although the tribological behaviors of metals, polymers, and ionic solids differ widely, it is increasingly more evident that the mechanistic ori...
110 citations
TL;DR: A review of surface science studies on passive two-dimensional substrates compare to and contrast with studies performed on, or by, micro-and nano-electro-mechanical (MEMS) devices as discussed by the authors.
100 citations
TL;DR: In this paper, the authors measured the contact resistance of radio frequency microelectromechanical system switches operating in an ultrahigh vacuum system equipped with in situ oxygen plasma cleaning capabilities, and the time dependence of the resistance was fit to power law extrapolations to infer contact creep properties and resistance values at t = ∞.
Abstract: Contact resistance measurements are reported for radio frequency microelectromechanical system switches operating in an ultrahigh vacuum system equipped with in situ oxygen plasma cleaning capabilities. Ru-based contacts were prepared by means of standard sputtering techniques, sputtering followed by postdeposition oxidation, (surface RuO2) or reactive sputtering in the presence of oxygen (bulk RuO2). In situ oxygen plasma cleaning lowered the resistance of Ru contacts by two or more orders of magnitude but not lower than Au contacts, irrespective of whether the Au contacts were cleaned. The time dependence of the resistance was fit to power law extrapolations to infer contact creep properties and resistance values at t=∞. Time-dependent creep properties of mixed Au-Ru contacts were observed to be similar to those of Au-Au contacts, while the absolute value of the resistance of such contacts was more comparable to Ru-Ru contacts. Prior to, and for short oxygen plasma exposure times, bulk RuO2 resistance v...
49 citations
References
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31 Mar 1999
TL;DR: In this paper, the authors discuss the effect of dust contamination on the performance of electrical contact devices and propose a method to prevent contact failure due to the presence of dust in the contact surfaces.
Abstract: Preface to the Second Edition Preface to the First Edition Introduction Editor Contributors Contact Interface Conduction Electrical Contact Resistance: Fundamental Principles Roland S Timsit Introduction Electrical Constriction Resistance Effect of Surface Films on Constriction and Contact Resistance Temperature of an Electrically Heated a-Spot Mechanics of a-Spot Formation Breakdown of Classical Electrical Contact Theory in Small Contact Spots Constriction Resistance at High Frequencies Summary Acknowledgements References Introduction to Contact Tarnishing and Corrosion Paul G Slade Introduction Corrosion Rates Corrosion Gases Types of Corrosion Gas Concentrations in the Atmosphere Measurements Mixed Flow Gas Laboratory Testing Electronic Connectors Power Connectors Other Considerations Acknowledgements References Gas Corrosion William H Abbott and Paul G Slade Introduction The Field Environments for Electrical Contacts Laboratory Accelerated Testing Lubrication and Inhibition of Corrosion Acknowledgement References Effect of Dust Contamination on Electrical Contacts Ji Gao Zhang Introduction Dusty Environment and Dust Composition The Characteristics of Dust Particles Application Conditions in Dusty Environment Theoretical Analysis of Connector Contact Failure due to the Dust Future Work References Nonarcing Contacts Power Connectors Milenko Braunovic Introduction Types of Power Connectors Properties of Conductor and Connector Materials Parameters Affecting Performance of Power Connections Palliative Measures Connector Degradation Prognostic Models Shape-Memory Alloys (SMA) Metal Foam Materials Installation of Power Connections Accelerated Current-Cycling Tests (Standards) References Low-Power Commercial, Automotive, and Appliance Connections Anthony Lee and George Drew Introduction Connectors Contact Terminals Degradation of Connector Contact Automotive Connector Contacts Summary References Tribology of Electronic Connectors: Contact Sliding Wear, Fretting, and Lubrication Roland S Timsit and Morton Antler Introduction Sliding Wear Fretting Lubrication References Materials, Coatings, and Platings Morton Antler and Paul G Slade Introduction Metallic Finishes Properties Related to Porosity Metallurgical and Structural Properties Physical and Mechanical Properties Acknowledgement References The Electric Arc and Switching Device Technology The Arc and Interruption Paul G Slade Introduction The Fourth State of Matter Establishing an Arc The Formation of the Electric Arc The Arc in Air at Atmospheric Pressure The Arc in Vacuum Arc Interruption Acknowledgements References The Consequences of Arcing Paul G Slade Introduction Arcing Time Arc Erosion of Electrical Contacts Blow-Off Force Contact Welding Changes in the Contact Surface as a Result of Arcing Acknowledgements References Reed Switches Kunio Hinohara Principles and Design of the Reed Switch Recommended Contact Plating Contact Surface Degradation and Countermeasures Applications of Reed Switches References Low Current and High Frequency Miniature Switches: Microelectromechanical Systems (MEMS) Metal Contact Switches Benjamin F Toler, Ronald A Coutu, Jr, and John W McBride Introduction Micro-Contact Resistance Modeling Contact Materials for Performance and Reliability Failure Modes and Reliability Conclusion References Low Current Switching John W McBride Introduction and Device Classification Device Types Design Parameters for Static Switching Contacts Mechanical Design Parameters The Measurement of Contact Wear and Contact Dynamics Electrical Characteristics of Low-Current Switching Devices at Opening Electrical Characteristics of Low-Current Switching Devices at Closure Summary Acknowledgements References Medium to High Current Switching: Low Voltage Contractors and Circuit Breakers, and Vacuum Interrupters Manfred Lindmayer General Aspects of Switching in Air Contacts for Switching in Air Low-Voltage Contactors Low-Voltage Circuit-Breakers and Miniature Circuit-Breakers Simulations of Low-Voltage Switching Devices Vacuum Interrupters References Arc Faults and Electrical Safety John J Shea Introduction Arc Fault Circuit Interrupters (AFCIs) Arcing Faults Glowing Connections Arcing Fault Properties Other Types of Arcing Faults Conclusions References Arcing Contact Materials Arcing Contact Materials Gerald J Witter Introduction Silver Metal Oxides Silver Refractory Metals Vacuum Interrupter Materials Tungsten Contacts Non-Noble Silver Alloys Silver-Nickel Contact Materials Silver Alloys and Noble Metals Silver-Graphite Contact Materials Conclusion Acknowledgements References Contact Design and Attachment Gerald J Witter and Guenther Horn Introduction Staked Contact Assembly Designs Welded Contact Assembly Designs Brazed Contact Assembly Designs Clad Metals, Inlay, and Edge Lay Contact Alloys for Non-Arcing Separable Contacts Acknowledgements References Electrical Contact Material Testing Design and Measurement Gerald J Witter and Werner Rieder Objectives Device Testing and Model Switch Testing Electrical Contact Testing Variables Electrical Testing Result Types and Measurement Methods References Arc Interactions with Contaminants Gerald J Witter and Werner Rieder Introduction Organic Contamination and Activation Mineral Particulate Contamination of Arcing Contacts Silicone Contamination of Arcing Contacts Lubricants with Refractory Fillers Oxidation of Contact Materials Resistance Effects from Long Arcs Acknowledgements References Sliding Electrical Contacts Sliding Electrical Contacts (Graphitic Type Lubrication) Kiochiro Sawa and Erle I Shobert II Introduction Mechanical Aspects Chemical Aspects Electrical Effects Thermal Effects Brush Wear Brush Materials and Abrasion Summary References Illustrative Modern Brush Applications Wilferd E Yohe and William A Nystrom Introduction Brush Materials Brush Applications Sliding Contacts for Instrumentation and Control Glenn Dorsey and Jax Glossbrenner Introduction Sliding Contact-The Micro Perspective Electrical Performance Micro-Environment of Contact Region Macro Sliding Contact Materials for Sliding Contacts Friction and Wear Characteristics Contact Parameters and Sliding-Contact Assemblies Future Summary Acknowledgements References Metal Fiber Brushes Glenn Dorsey and Doris Kuhlmann-Wilsdorf Introduction Sliding Wear of Multi-Fiber Brushes Surface Films, Friction, and Materials Properties Electrical Contact Brush Dynamics Future Summary Acknowledgements References Contact Data Useful Electric Contact Information Paul G Slade Introduction Notes to the Tables References Author Index Subject Index
758 citations
TL;DR: In this article, direct evidence as to surface cleanliness is given in the form of Auger electron spectrograms measured prior to and after the water contact angle measurement in a UHV system (in clean argon).
317 citations
26 Oct 1998
TL;DR: In this article, the authors present a tribological study of gold metallic contacts regarding contact resistance, heat dissipation, and surface damage in the normal-force regime of tens to hundreds of /spl mu/N, which is typical of the contact forces from microactuation.
Abstract: This work presents a tribological study of gold metallic contacts regarding contact resistance, heat dissipation, and surface damage in the normal-force regime of tens to hundreds of /spl mu/N, which is typical of the contact forces from microactuation. The purpose of this work is to present the micromechanical switch designer with practical information on gold contact phenomena in this force regime, as most work in micrometallic contacts has focused on contact forces greater than 1 mN. Results indicate actuation forces of several hundred /spl mu/N are required for reliable fully-metallic contacts, with resistance and current carrying ability primarily dependent on morphology, thermal management, and nm-depth material properties of the contact electrodes.
294 citations
10 Sep 2001
TL;DR: In this article, the electrical field between the contacts used in one of the experiments was analyzed using finite element analysis to model the electric field and the experimental data on the electrical breakdown voltage could be divided into three regions as a function of the gap spacing.
Abstract: The increasing importance of electrical contacts in air with micrometer spacing prompted recent experiments on the electrical breakdown behavior of these gaps. The electrical field between the contacts used in one of the experiments was analyzed using finite element analysis to model the electric field. The experimental data on the electrical breakdown voltage could be divided into three regions as a function of the gap spacing. First, at close gap spacing (/spl les/4 /spl mu/m) both the breakdown voltages as well as the electrical fields at the cathode were similar to values measured during the breakdown of vacuum gaps of less than 200 /spl mu/m. Second, at larger gaps (>6 /spl mu/m) the breakdown voltages followed Paschen's curve for the Townsend electron avalanche process in air. Finally, in between these two regions the breakdown values were below the expected values for purely vacuum breakdown or purely Townsend breakdown. The breakdown phenomena have been discussed in terms of field emission of electrons from the cathode and their effect on initiating the observed breakdown regimes.
181 citations