Electrical, Thermal, and Mechanical Characterization of Silicon Microcantilever Heaters
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Cites background or methods from "Electrical, Thermal, and Mechanical..."
...Uncooled Infrared (IR) radiation detector were then designed at room temperature [134, 108, 135, 93]....
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..., the resonance frequency f and the quality factor Q of the resonance peak, can be obtained from the vibrational noise spectrum [93] obtained with a spectrum analyzer....
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"Electrical, Thermal, and Mechanical..." refers background in this paper
...equipartition theorem and relates thermal energy to the elastic potential energy of the cantilever [46]....
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Additional excerpts
...stress tensor for any silicon material [42]–[44]....
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...ficiently long time to deform the polymer and to form nanoscale data bit indents [3], [5]....
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...AFM cantilevers having integrated solid-state heating elements were originally designed for data storage [2], [3] and have enabled progress on highly parallel AFM and compact data storage [4]....
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