Electrostatic pull-in analysis of a nonuniform micro-resonator undergoing large elastic deflection:
01 Sep 2018-Vol. 232, Iss: 18, pp 3337-3350
TL;DR: In this paper, pull-in analysis of an electrostatically actuated non-uniform micro-resonator under large elastic deflection has been investigated with a focus on qualitative analysis to understand the essence of n...
Abstract: Pull-in analysis of an electrostatically actuated nonuniform micro-resonator under large elastic deflection has been investigated with a focus on qualitative analysis to understand the essence of n...
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TL;DR: In this article, the authors present the current stage of the research on electrically actuated NEMS/MEMS by analysing the latest models and studies in this field in the framework of electro-mechanical coupling and small-size effects.
Abstract: Nano and micro electro-mechanical systems (NEMS and MEMS) have been attracting a large amount of attention recently as they have extensive current/potential applications. However, due to their scale, molecular interaction and size effects are considerably high which needs to be considered in the theoretical modelling of their electro-mechanical behaviour. Both nano- and micro-scale electrically actuated structures are discussed when subjected to constant and time-varying voltages, and different theories and models, introduced in the past few years for modelling such small structures, are discussed. It is highlighted that considering the intermolecular forces and size-dependence effects can change both the static and dynamic behaviours of such systems significantly. This review presents the current stage of the research on electrically actuated NEMS/MEMS by analysing the latest models and studies in this field in the framework of electro-mechanical coupling and small-size effects.
32 citations
31 May 2021
TL;DR: In this article, the authors deal with the nonlinear static pull-in instability of smart nano-switches regarding the new size-dependent phenomenon known as flexoelectricity, together with the surf...
Abstract: This paper deals with the investigation of nonlinear static pull-in instability of smart Nano-switches regarding the new size-dependent phenomenon, known as flexoelectricity, together with the surf...
6 citations
TL;DR: In this paper , a two-node finite element model with 10 degrees of freedom is proposed and Hermite polynomials are adopted to satisfy the higher order continuity requirement of the electric potential and displacement due to flexoelectricity.
Abstract: Abstract In this work, we present a finite element (FE) approach for analyzing flexoelectric beam energy harvesters with nonuniform cross-section. A two nodes finite element model with 10 degrees of freedom is proposed and Hermite polynomials are adopted to satisfy the higher order continuity requirement of the electric potential and displacement due to flexoelectricity. The proposed model can also be simplified to investigate a flexoelectric actuator, for which analytical solutions are obtained and thus can be used to validate the proposed FE method. Results indicate the performance of flexoelectric energy harvesters with nonuniform cross-section can exceed that of rectangular ones.
5 citations
TL;DR: In this article , a review of pull-in switches made by flexible materials and their applications in radio frequency systems, microfluidic systems, and electrostatic discharge protection is presented.
Abstract: The electrostatic pull-in effect is a common phenomenon and a key parameter in the design of microscale and nanoscale devices. Flexible electronic devices based on the pull-in effect have attracted increasing attention due to their unique ductility. This review summarizes nanoelectromechanical switches made by flexible materials and classifies and discusses their applications in, among others, radio frequency systems, microfluidic systems, and electrostatic discharge protection. It is supposed to give researchers a more comprehensive understanding of the pull-in phenomenon and the development of its applications. Also, the review is meant to provide a reference for engineers to design and optimize devices.
2 citations
15 Nov 2013
TL;DR: In this article, nonlinear static pull-in phenomena of a piezoelectric viscoelastic microbeam under a DC load and a pizeoelectoric voltage are studied and corresponding numerical analyses are performed.
Abstract: Nonlinear piezoelectric viscoelastic model is used to account for a DC load and a pizeoelectric voltage. On the basis of the Euler-Bernoulli hypothesis, nonlinear static pull-in phenomena of a piezoelectric viscoelastic microbeam under a DC load and a pizeoelectric voltage is studied and the corresponding numerical analyses are performed. The influences of piezoelectric effect on the static pull-in voltages of the piezoelectric viscoelastic microbeam are discussed.Copyright © 2013 by ASME
1 citations
References
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TL;DR: In this paper, a reduced-order model is proposed to investigate the behavior of electrically actuated microbeam-based MEMS devices by discretizing the distributed-parameter system using a Galerkin procedure into a finite-degree-of-freedom system consisting of ordinary-differential equations in time.
Abstract: We present an analytical approach and a reduced-order model (macromodel) to investigate the behavior of electrically actuated microbeam-based MEMS. The macromodel provides an effective and accurate design tool for this class of MEMS devices. The macromodel is obtained by discretizing the distributed-parameter system using a Galerkin procedure into a finite-degree-of-freedom system consisting of ordinary-differential equations in time. The macromodel accounts for moderately large deflections, dynamic loads, and the coupling between the mechanical and electrical forces. It accounts for linear and nonlinear elastic restoring forces and the nonlinear electric forces generated by the capacitors. A new technique is developed to represent the electric force in the equations of motion. The new approach allows the use of few linear-undamped mode shapes of a microbeam in its straight position as basis functions in a Galerkin procedure. The macromodel is validated by comparing its results with experimental results and finite-element solutions available in the literature. Our approach shows attractive features compared to finite-element softwares used in the literature. It is robust over the whole device operation range up to the instability limit of the device (i.e., pull-in). Moreover, it has low computational cost and allows for an easier understanding of the influence of the various design parameters. As a result, it can be of significant benefit to the development of MEMS design software.
585 citations
"Electrostatic pull-in analysis of a..." refers methods in this paper
...Younis et al.(44) presented an analytical approach and a reduced-order macro-model (macromodel) to investigate the behavior of electrically actuated microbeam-based MEMS....
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...Younis et al.44 presented an analytical approach and a reduced-order macro-model (macromodel) to investigate the behavior of electrically actuated microbeam-based MEMS....
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TL;DR: In this article, a nonlinear model of electrically actuated microbeams accounting for the electrostatic forcing of the air gap capacitor, the restoring force of the microbeam and the axial load applied to the micro-beam is presented.
Abstract: We present a nonlinear model of electrically actuated microbeams accounting for the electrostatic forcing of the air gap capacitor, the restoring force of the microbeam and the axial load applied to the microbeam The boundary-value problem describing the static deflection of the microbeam under the electrostatic force due to a dc polarization voltage is solved numerically The eigenvalue problem describing the vibration of the microbeam around its statically deflected position is solved numerically for the natural frequencies and mode shapes Comparison of results generated by our model to the experimental results shows excellent agreement, thus verifying the model Our results show that failure to account for mid-plane stretching in the microbeam restoring force leads to an underestimation of the stability limits It also shows that the ratio of the width of the air gap to the microbeam thickness can be tuned to extend the domain of the linear relationship between the dc polarization voltage and the fundamental natural frequency This fact and the ability of the nonlinear model to accurately predict the natural frequencies for any dc polarization voltage allow designers to use a wider range of dc polarization voltages in resonators
473 citations
"Electrostatic pull-in analysis of a..." refers background in this paper
...Pratiher42 studied the assessment of stability and bifurcation of a large deformed microbeam under electrostatic actuation and here obtained results were compared with the outcomes in Chaterjee and Pohit.41 Abdel Rahman et al.43 demonstrated static deflection due to DC polarization from a nonlinear model of electrically actuated microbeams accounting for the electrostatic forcing and axial load....
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...Abdel Rahman et al.(43) demonstrated static deflection due to DC polarization from a nonlinear model of electrically actuated microbeams accounting for the electrostatic forcing and axial load....
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TL;DR: In this paper, a review of the pull-in phenomenon in electrostatically actuated MEMS and NEMS devices is presented, along with physical principles that have enabled fundamental insights into the pullin instability as well as pullin induced failures.
Abstract: Pull-in instability as an inherently nonlinear and crucial effect continues to become increasingly important for the design of electrostatic MEMS and NEMS devices and ever more interesting scientifically. This review reports not only the overview of the pull-in phenomenon in electrostatically actuated MEMS and NEMS devices, but also the physical principles that have enabled fundamental insights into the pull-in instability as well as pull-in induced failures. Pull-in governing equations and conditions to characterize and predict the static, dynamic and resonant pull-in behaviors are summarized. Specifically, we have described and discussed on various state-of-the-art approaches for extending the travel range, controlling the pull-in instability and further enhancing the performance of MEMS and NEMS devices with electrostatic actuation and sensing. A number of recent activities and achievements methods for control of torsional electrostatic micromirrors are introduced. The on-going development in pull-in applications that are being used to develop a fundamental understanding of pull-in instability from negative to positive influences is included and highlighted. Future research trends and challenges are further outlined.
442 citations
"Electrostatic pull-in analysis of a..." refers background in this paper
...Therefore, understanding the theoretical concept of electrostatic instability in microsystems has been extensively useful for designing various electrostatically actuated microsystems.(1) The behavior of microbeams under electrostatic actuation was characterized earlier....
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TL;DR: In this paper, the pull-in instability in microelectromechanical (MEMS) resonators was studied and the authors proposed a low-voltage MEMS RF switch actuated with a combined DC and AC loading, which uses a voltage much lower than the traditionally used DC voltage.
Abstract: We study the pull-in instability in microelectromechanical (MEMS) resonators and find that characteristics of the pull-in phenomenon in the presence of AC loads differ from those under purely DC loads. We analyze this phenomenon, dubbed dynamic pull-in, and formulate safety criteria for the design of MEMS resonant sensors and filters excited near one of their natural frequencies. We also utilize this phenomenon to design a low-voltage MEMS RF switch actuated with a combined DC and AC loading. The new switch uses a voltage much lower than the traditionally used DC voltage. Either the frequency or the amplitude of the AC loading can be adjusted to reduce the driving voltage and switching time. The new actuation method has the potential of solving the problem of high driving voltages of RF MEMS switches.
421 citations
"Electrostatic pull-in analysis of a..." refers background in this paper
...Nayfeh et al.(45) studied the dynamic pull-in of a capacitively actuated MEMS and exhibited the need to take into account the static and dynamic instabilities in the design of MEMS....
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...Nayfeh et al.45 studied the dynamic pull-in of a capacitively actuated MEMS and exhibited the need to take into account the static and dynamic instabilities in the design of MEMS....
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02 Dec 2009
TL;DR: In this article, the authors provide an overview of the dynamics of nonlinear micromechanical and nanomechanical oscillators and resonators, as well as an amplitude equation description for the array of coupled Duffing resonators.
Abstract: Inthe last decadewe havewitnessed excitingtechnologicaladvancesin the fabricationand control of microelectromechanical and nanoelectromechanical systems (MEMS& NEMS) [1–5]. Such systems are being developed for a host of nanotechnologicalapplications,suchashighly-sensitivemass[6–8],spin[9],andchargedetectors[10,11],aswellasforbasicresearchinthemesoscopicphysicsofphonons[12],andthegeneralstudy of the behavior of mechanical degrees of freedom at the interface between thequantum and the classical worlds [13,14]. Surprisingly, MEMS & NEMS have alsoopenedup a whole new experimentalwindowinto the study of the nonlineardynamicsof discrete systems in the form of nonlinear micromechanical and nanomechanicaloscillators and resonators.Thepurposeofthisreviewisto providean introductionto thenonlineardynamicsofmicromechanical and nanomechanical resonators that starts from the basics, but alsotouches upon some of the advanced topics that are relevant for current experimentswith MEMS & NEMS devices. We begin in this section with a general motivation,explaining why nonlinearities are so often observed in NEMS & MEMS devices. In§ 1.2 we describe the dynamics of one of the simplest nonlinear devices—the Duffingresonator—while giving a tutorial in secular perturbation theory as we calculate itsresponse to an external drive. We continue to use the same analytical tools in § 1.3 todiscuss the dynamics of a parametrically-excited Duffing resonator, building up to thedescription of the dynamicsof an array of coupled parametrically-excitedDuffing res-onatorsin § 1.4. We conclude in § 1.5 by giving an amplitude equation description forthe array of coupled Duffing resonators, allowing us to extend our analytic capabilitiesin predicting and explaining the nature of its dynamics.
281 citations